JP7485212B2 - アクチュエータ、ポンプ、アクチュエータの製造方法 - Google Patents

アクチュエータ、ポンプ、アクチュエータの製造方法 Download PDF

Info

Publication number
JP7485212B2
JP7485212B2 JP2023517437A JP2023517437A JP7485212B2 JP 7485212 B2 JP7485212 B2 JP 7485212B2 JP 2023517437 A JP2023517437 A JP 2023517437A JP 2023517437 A JP2023517437 A JP 2023517437A JP 7485212 B2 JP7485212 B2 JP 7485212B2
Authority
JP
Japan
Prior art keywords
outer edge
shape
frame body
convex portion
vibration member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023517437A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022230677A1 (https=
JPWO2022230677A5 (https=
Inventor
伸拓 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2022230677A1 publication Critical patent/JPWO2022230677A1/ja
Publication of JPWO2022230677A5 publication Critical patent/JPWO2022230677A5/ja
Application granted granted Critical
Publication of JP7485212B2 publication Critical patent/JP7485212B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Reciprocating Pumps (AREA)
JP2023517437A 2021-04-27 2022-04-14 アクチュエータ、ポンプ、アクチュエータの製造方法 Active JP7485212B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021074741 2021-04-27
JP2021074741 2021-04-27
PCT/JP2022/017808 WO2022230677A1 (ja) 2021-04-27 2022-04-14 アクチュエータ、ポンプ、アクチュエータの製造方法

Publications (3)

Publication Number Publication Date
JPWO2022230677A1 JPWO2022230677A1 (https=) 2022-11-03
JPWO2022230677A5 JPWO2022230677A5 (https=) 2023-10-19
JP7485212B2 true JP7485212B2 (ja) 2024-05-16

Family

ID=83847451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023517437A Active JP7485212B2 (ja) 2021-04-27 2022-04-14 アクチュエータ、ポンプ、アクチュエータの製造方法

Country Status (4)

Country Link
US (1) US12595788B2 (https=)
JP (1) JP7485212B2 (https=)
CN (1) CN117203428A (https=)
WO (1) WO2022230677A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025197618A1 (ja) * 2024-03-19 2025-09-25 株式会社村田製作所 アクチュエータおよび流体制御装置
WO2026070336A1 (ja) * 2024-09-26 2026-04-02 株式会社村田製作所 アクチュエータ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006207436A (ja) 2005-01-26 2006-08-10 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプ
JP2008180161A (ja) 2007-01-25 2008-08-07 Star Micronics Co Ltd ダイヤフラムポンプ
JP2013100746A (ja) 2011-11-08 2013-05-23 Murata Mfg Co Ltd 流体制御装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10201027C1 (de) * 2002-01-11 2003-08-07 Eads Deutschland Gmbh Flüssigkeitspumpe
KR100891245B1 (ko) * 2005-01-26 2009-04-01 파나소닉 전공 주식회사 압전구동 격막펌프
KR101333542B1 (ko) 2010-05-21 2013-11-28 가부시키가이샤 무라타 세이사쿠쇼 유체 펌프
CN103140674B (zh) * 2011-04-11 2016-06-08 株式会社村田制作所 致动器支承结构及泵装置
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP6001482B2 (ja) * 2013-03-25 2016-10-05 京セラ株式会社 入力装置および電子機器
WO2015125843A1 (ja) * 2014-02-21 2015-08-27 株式会社村田製作所 流体制御装置およびポンプ
US10284986B2 (en) * 2015-04-29 2019-05-07 Goertek Inc. Piezoelectric speaker and method for forming the same
JP2017052135A (ja) * 2015-09-08 2017-03-16 セイコーエプソン株式会社 Ｍｅｍｓデバイス、液体噴射ヘッド、液体噴射装置、ｍｅｍｓデバイスの製造方法、及び液体噴射ヘッドの製造方法
TWI683959B (zh) * 2016-09-05 2020-02-01 研能科技股份有限公司 壓電致動器及其所適用之微型流體控制裝置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006207436A (ja) 2005-01-26 2006-08-10 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプ
JP2008180161A (ja) 2007-01-25 2008-08-07 Star Micronics Co Ltd ダイヤフラムポンプ
JP2013100746A (ja) 2011-11-08 2013-05-23 Murata Mfg Co Ltd 流体制御装置

Also Published As

Publication number Publication date
WO2022230677A1 (ja) 2022-11-03
JPWO2022230677A1 (https=) 2022-11-03
US20240044323A1 (en) 2024-02-08
CN117203428A (zh) 2023-12-08
US12595788B2 (en) 2026-04-07

Similar Documents

Publication Publication Date Title
US9482217B2 (en) Fluid control device
US9028226B2 (en) Fluid control device
JP3700559B2 (ja) 圧電音響部品およびその製造方法
CN113826408B (zh) 压电装置和超声波换能器
JP7485212B2 (ja) アクチュエータ、ポンプ、アクチュエータの製造方法
JP7609780B2 (ja) 圧電素子
CN112771295B (zh) 阀以及气体控制装置
US12313054B2 (en) Fluid control device
CN108696808B (zh) 扬声器及扬声器装配方法
WO2019221121A1 (ja) 圧電ガスポンプ
JP5239784B2 (ja) 圧電振動デバイス
CN115210469A (zh) 流体控制装置
JPWO2022230677A5 (https=)
US12276274B2 (en) Fluid control device
JP7351407B2 (ja) アクチュエータ、流体制御装置、および、アクチュエータの製造方法
JP7227571B2 (ja) 振動素子、振動子及び振動素子の製造方法
JP5007522B2 (ja) 圧電振動子およびその製造方法
CN114746650B (zh) 致动器以及流体控制装置
CN114127421B (zh) 流体控制装置
TWI912050B (zh) 流體控制裝置
JP7550066B2 (ja) 振動デバイス
WO2025134808A1 (ja) アクチュエータ
JP2026060087A (ja) 圧電振動デバイスおよび圧電振動デバイス製造方法
WO2024135219A1 (ja) 流体制御装置
JP2026059541A (ja) アクチュエータ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230724

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230724

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240402

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240415

R150 Certificate of patent or registration of utility model

Ref document number: 7485212

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150