JPWO2022230677A1 - - Google Patents

Info

Publication number
JPWO2022230677A1
JPWO2022230677A1 JP2023517437A JP2023517437A JPWO2022230677A1 JP WO2022230677 A1 JPWO2022230677 A1 JP WO2022230677A1 JP 2023517437 A JP2023517437 A JP 2023517437A JP 2023517437 A JP2023517437 A JP 2023517437A JP WO2022230677 A1 JPWO2022230677 A1 JP WO2022230677A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023517437A
Other languages
Japanese (ja)
Other versions
JP7485212B2 (ja
JPWO2022230677A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022230677A1 publication Critical patent/JPWO2022230677A1/ja
Publication of JPWO2022230677A5 publication Critical patent/JPWO2022230677A5/ja
Application granted granted Critical
Publication of JP7485212B2 publication Critical patent/JP7485212B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Reciprocating Pumps (AREA)
JP2023517437A 2021-04-27 2022-04-14 アクチュエータ、ポンプ、アクチュエータの製造方法 Active JP7485212B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021074741 2021-04-27
JP2021074741 2021-04-27
PCT/JP2022/017808 WO2022230677A1 (ja) 2021-04-27 2022-04-14 アクチュエータ、ポンプ、アクチュエータの製造方法

Publications (3)

Publication Number Publication Date
JPWO2022230677A1 true JPWO2022230677A1 (https=) 2022-11-03
JPWO2022230677A5 JPWO2022230677A5 (https=) 2023-10-19
JP7485212B2 JP7485212B2 (ja) 2024-05-16

Family

ID=83847451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023517437A Active JP7485212B2 (ja) 2021-04-27 2022-04-14 アクチュエータ、ポンプ、アクチュエータの製造方法

Country Status (4)

Country Link
US (1) US12595788B2 (https=)
JP (1) JP7485212B2 (https=)
CN (1) CN117203428A (https=)
WO (1) WO2022230677A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025197618A1 (ja) * 2024-03-19 2025-09-25 株式会社村田製作所 アクチュエータおよび流体制御装置
WO2026070336A1 (ja) * 2024-09-26 2026-04-02 株式会社村田製作所 アクチュエータ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10201027C1 (de) * 2002-01-11 2003-08-07 Eads Deutschland Gmbh Flüssigkeitspumpe
JP2006207436A (ja) * 2005-01-26 2006-08-10 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプ
KR100891245B1 (ko) * 2005-01-26 2009-04-01 파나소닉 전공 주식회사 압전구동 격막펌프
JP2008180161A (ja) * 2007-01-25 2008-08-07 Star Micronics Co Ltd ダイヤフラムポンプ
KR101333542B1 (ko) 2010-05-21 2013-11-28 가부시키가이샤 무라타 세이사쿠쇼 유체 펌프
CN103140674B (zh) * 2011-04-11 2016-06-08 株式会社村田制作所 致动器支承结构及泵装置
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP6127361B2 (ja) 2011-11-08 2017-05-17 株式会社村田製作所 流体制御装置
JP6001482B2 (ja) * 2013-03-25 2016-10-05 京セラ株式会社 入力装置および電子機器
WO2015125843A1 (ja) * 2014-02-21 2015-08-27 株式会社村田製作所 流体制御装置およびポンプ
US10284986B2 (en) * 2015-04-29 2019-05-07 Goertek Inc. Piezoelectric speaker and method for forming the same
JP2017052135A (ja) * 2015-09-08 2017-03-16 セイコーエプソン株式会社 Ｍｅｍｓデバイス、液体噴射ヘッド、液体噴射装置、ｍｅｍｓデバイスの製造方法、及び液体噴射ヘッドの製造方法
TWI683959B (zh) * 2016-09-05 2020-02-01 研能科技股份有限公司 壓電致動器及其所適用之微型流體控制裝置

Also Published As

Publication number Publication date
WO2022230677A1 (ja) 2022-11-03
JP7485212B2 (ja) 2024-05-16
US20240044323A1 (en) 2024-02-08
CN117203428A (zh) 2023-12-08
US12595788B2 (en) 2026-04-07

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