JPWO2023286327A5 - - Google Patents

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Publication number
JPWO2023286327A5
JPWO2023286327A5 JP2023535106A JP2023535106A JPWO2023286327A5 JP WO2023286327 A5 JPWO2023286327 A5 JP WO2023286327A5 JP 2023535106 A JP2023535106 A JP 2023535106A JP 2023535106 A JP2023535106 A JP 2023535106A JP WO2023286327 A5 JPWO2023286327 A5 JP WO2023286327A5
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JP
Japan
Prior art keywords
metal layer
piezoelectric
piece
piezoelectric vibrator
vibrator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023535106A
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English (en)
Japanese (ja)
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JP7733882B2 (ja
JPWO2023286327A1 (https=
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Priority claimed from PCT/JP2022/008919 external-priority patent/WO2023286327A1/ja
Publication of JPWO2023286327A1 publication Critical patent/JPWO2023286327A1/ja
Publication of JPWO2023286327A5 publication Critical patent/JPWO2023286327A5/ja
Application granted granted Critical
Publication of JP7733882B2 publication Critical patent/JP7733882B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023535106A 2021-07-12 2022-03-02 圧電振動子及び圧電振動子の製造方法 Active JP7733882B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021114739 2021-07-12
JP2021114739 2021-07-12
PCT/JP2022/008919 WO2023286327A1 (ja) 2021-07-12 2022-03-02 圧電振動子及び圧電振動子の製造方法

Publications (3)

Publication Number Publication Date
JPWO2023286327A1 JPWO2023286327A1 (https=) 2023-01-19
JPWO2023286327A5 true JPWO2023286327A5 (https=) 2024-03-25
JP7733882B2 JP7733882B2 (ja) 2025-09-04

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ID=84919792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023535106A Active JP7733882B2 (ja) 2021-07-12 2022-03-02 圧電振動子及び圧電振動子の製造方法

Country Status (2)

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JP (1) JP7733882B2 (https=)
WO (1) WO2023286327A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025192111A1 (ja) * 2024-03-12 2025-09-18 株式会社村田製作所 圧電振動素子

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3903698B2 (ja) * 2000-08-08 2007-04-11 セイコーエプソン株式会社 水晶振動片の製造方法及び水晶デバイス
JP4936221B2 (ja) * 2007-06-08 2012-05-23 セイコーエプソン株式会社 メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器
JP5504927B2 (ja) 2010-01-29 2014-05-28 株式会社大真空 圧電振動片、圧電振動デバイス、及び圧電振動デバイスの製造方法
JP6191152B2 (ja) 2013-02-15 2017-09-06 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、及び移動体
WO2020195830A1 (ja) 2019-03-28 2020-10-01 株式会社村田製作所 圧電振動子とその製造方法

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