JP7733882B2 - 圧電振動子及び圧電振動子の製造方法 - Google Patents

圧電振動子及び圧電振動子の製造方法

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Publication number
JP7733882B2
JP7733882B2 JP2023535106A JP2023535106A JP7733882B2 JP 7733882 B2 JP7733882 B2 JP 7733882B2 JP 2023535106 A JP2023535106 A JP 2023535106A JP 2023535106 A JP2023535106 A JP 2023535106A JP 7733882 B2 JP7733882 B2 JP 7733882B2
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JP
Japan
Prior art keywords
metal layer
quartz crystal
piezoelectric
thickness
base member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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JP2023535106A
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English (en)
Japanese (ja)
Other versions
JPWO2023286327A5 (https=
JPWO2023286327A1 (https=
Inventor
光洋 山田
茂夫 尾島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
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Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2023286327A1 publication Critical patent/JPWO2023286327A1/ja
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Application granted granted Critical
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Active legal-status Critical Current
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Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2023535106A 2021-07-12 2022-03-02 圧電振動子及び圧電振動子の製造方法 Active JP7733882B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021114739 2021-07-12
JP2021114739 2021-07-12
PCT/JP2022/008919 WO2023286327A1 (ja) 2021-07-12 2022-03-02 圧電振動子及び圧電振動子の製造方法

Publications (3)

Publication Number Publication Date
JPWO2023286327A1 JPWO2023286327A1 (https=) 2023-01-19
JPWO2023286327A5 JPWO2023286327A5 (https=) 2024-03-25
JP7733882B2 true JP7733882B2 (ja) 2025-09-04

Family

ID=84919792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023535106A Active JP7733882B2 (ja) 2021-07-12 2022-03-02 圧電振動子及び圧電振動子の製造方法

Country Status (2)

Country Link
JP (1) JP7733882B2 (https=)
WO (1) WO2023286327A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025192111A1 (ja) * 2024-03-12 2025-09-18 株式会社村田製作所 圧電振動素子

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008306594A (ja) 2007-06-08 2008-12-18 Epson Toyocom Corp メサ型振動片およびメサ型振動デバイス
JP2011160095A (ja) 2010-01-29 2011-08-18 Daishinku Corp 圧電振動片、圧電振動デバイス、及び圧電振動デバイスの製造方法
JP2014158149A (ja) 2013-02-15 2014-08-28 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器、及び移動体
WO2020195830A1 (ja) 2019-03-28 2020-10-01 株式会社村田製作所 圧電振動子とその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3903698B2 (ja) * 2000-08-08 2007-04-11 セイコーエプソン株式会社 水晶振動片の製造方法及び水晶デバイス

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008306594A (ja) 2007-06-08 2008-12-18 Epson Toyocom Corp メサ型振動片およびメサ型振動デバイス
JP2011160095A (ja) 2010-01-29 2011-08-18 Daishinku Corp 圧電振動片、圧電振動デバイス、及び圧電振動デバイスの製造方法
JP2014158149A (ja) 2013-02-15 2014-08-28 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器、及び移動体
WO2020195830A1 (ja) 2019-03-28 2020-10-01 株式会社村田製作所 圧電振動子とその製造方法

Also Published As

Publication number Publication date
WO2023286327A1 (ja) 2023-01-19
JPWO2023286327A1 (https=) 2023-01-19

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