JPWO2023188514A5 - - Google Patents
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- Publication number
- JPWO2023188514A5 JPWO2023188514A5 JP2024511194A JP2024511194A JPWO2023188514A5 JP WO2023188514 A5 JPWO2023188514 A5 JP WO2023188514A5 JP 2024511194 A JP2024511194 A JP 2024511194A JP 2024511194 A JP2024511194 A JP 2024511194A JP WO2023188514 A5 JPWO2023188514 A5 JP WO2023188514A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric material
- layer
- material layer
- atoms
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2025080369A JP7811679B2 (ja) | 2022-03-30 | 2025-05-13 | 接合体および弾性波素子 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022056518 | 2022-03-30 | ||
| JP2022056518 | 2022-03-30 | ||
| PCT/JP2022/041912 WO2023188514A1 (ja) | 2022-03-30 | 2022-11-10 | 接合体および弾性波素子 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025080369A Division JP7811679B2 (ja) | 2022-03-30 | 2025-05-13 | 接合体および弾性波素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023188514A1 JPWO2023188514A1 (https=) | 2023-10-05 |
| JPWO2023188514A5 true JPWO2023188514A5 (https=) | 2024-10-10 |
| JP7682379B2 JP7682379B2 (ja) | 2025-05-23 |
Family
ID=88199939
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024511194A Active JP7682379B2 (ja) | 2022-03-30 | 2022-11-10 | 接合体および弾性波素子 |
| JP2025080369A Active JP7811679B2 (ja) | 2022-03-30 | 2025-05-13 | 接合体および弾性波素子 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025080369A Active JP7811679B2 (ja) | 2022-03-30 | 2025-05-13 | 接合体および弾性波素子 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20250023551A1 (https=) |
| JP (2) | JP7682379B2 (https=) |
| KR (1) | KR102937541B1 (https=) |
| CN (1) | CN118872204A (https=) |
| DE (1) | DE112022006665T5 (https=) |
| WO (1) | WO2023188514A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20260052906A1 (en) * | 2024-08-16 | 2026-02-19 | Tel Manufacturing And Engineering Of America, Inc. | Method for processing a substrate |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06303073A (ja) * | 1993-02-17 | 1994-10-28 | Fujitsu Ltd | 弾性表面波デバイスとその製造方法 |
| JPH07202631A (ja) * | 1993-11-25 | 1995-08-04 | Fujitsu Ltd | 弾性表面波装置及びその製造方法 |
| JP5029711B2 (ja) * | 2010-02-16 | 2012-09-19 | 日立電線株式会社 | 圧電薄膜素子及び圧電薄膜デバイス |
| US10727809B2 (en) | 2016-12-15 | 2020-07-28 | Qorvo Us, Inc. | Bulk acoustic wave resonator with multilayer piezoelectric structure |
| JP7493306B2 (ja) * | 2019-04-26 | 2024-05-31 | 京セラ株式会社 | 弾性波装置 |
| WO2020250490A1 (ja) | 2019-06-11 | 2020-12-17 | 日本碍子株式会社 | 複合基板、弾性波素子および複合基板の製造方法 |
-
2022
- 2022-11-10 DE DE112022006665.2T patent/DE112022006665T5/de active Pending
- 2022-11-10 WO PCT/JP2022/041912 patent/WO2023188514A1/ja not_active Ceased
- 2022-11-10 KR KR1020247035752A patent/KR102937541B1/ko active Active
- 2022-11-10 JP JP2024511194A patent/JP7682379B2/ja active Active
- 2022-11-10 CN CN202280093066.2A patent/CN118872204A/zh active Pending
-
2024
- 2024-09-27 US US18/899,612 patent/US20250023551A1/en active Pending
-
2025
- 2025-05-13 JP JP2025080369A patent/JP7811679B2/ja active Active
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