KR102937541B1 - 접합체 및 탄성파 소자 - Google Patents

접합체 및 탄성파 소자

Info

Publication number
KR102937541B1
KR102937541B1 KR1020247035752A KR20247035752A KR102937541B1 KR 102937541 B1 KR102937541 B1 KR 102937541B1 KR 1020247035752 A KR1020247035752 A KR 1020247035752A KR 20247035752 A KR20247035752 A KR 20247035752A KR 102937541 B1 KR102937541 B1 KR 102937541B1
Authority
KR
South Korea
Prior art keywords
piezoelectric material
layer
material layer
substrate
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020247035752A
Other languages
English (en)
Korean (ko)
Other versions
KR20240167884A (ko
Inventor
유키 이토
다이시 다카하시
Original Assignee
엔지케이 인슐레이터 엘티디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엔지케이 인슐레이터 엘티디 filed Critical 엔지케이 인슐레이터 엘티디
Publication of KR20240167884A publication Critical patent/KR20240167884A/ko
Application granted granted Critical
Publication of KR102937541B1 publication Critical patent/KR102937541B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
KR1020247035752A 2022-03-30 2022-11-10 접합체 및 탄성파 소자 Active KR102937541B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022056518 2022-03-30
JPJP-P-2022-056518 2022-03-30
PCT/JP2022/041912 WO2023188514A1 (ja) 2022-03-30 2022-11-10 接合体および弾性波素子

Publications (2)

Publication Number Publication Date
KR20240167884A KR20240167884A (ko) 2024-11-28
KR102937541B1 true KR102937541B1 (ko) 2026-03-10

Family

ID=88199939

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247035752A Active KR102937541B1 (ko) 2022-03-30 2022-11-10 접합체 및 탄성파 소자

Country Status (6)

Country Link
US (1) US20250023551A1 (https=)
JP (2) JP7682379B2 (https=)
KR (1) KR102937541B1 (https=)
CN (1) CN118872204A (https=)
DE (1) DE112022006665T5 (https=)
WO (1) WO2023188514A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20260052906A1 (en) * 2024-08-16 2026-02-19 Tel Manufacturing And Engineering Of America, Inc. Method for processing a substrate

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06303073A (ja) * 1993-02-17 1994-10-28 Fujitsu Ltd 弾性表面波デバイスとその製造方法
JPH07202631A (ja) * 1993-11-25 1995-08-04 Fujitsu Ltd 弾性表面波装置及びその製造方法
JP5029711B2 (ja) * 2010-02-16 2012-09-19 日立電線株式会社 圧電薄膜素子及び圧電薄膜デバイス
US10727809B2 (en) 2016-12-15 2020-07-28 Qorvo Us, Inc. Bulk acoustic wave resonator with multilayer piezoelectric structure
JP7493306B2 (ja) * 2019-04-26 2024-05-31 京セラ株式会社 弾性波装置
WO2020250490A1 (ja) 2019-06-11 2020-12-17 日本碍子株式会社 複合基板、弾性波素子および複合基板の製造方法

Also Published As

Publication number Publication date
JP7682379B2 (ja) 2025-05-23
JP7811679B2 (ja) 2026-02-05
KR20240167884A (ko) 2024-11-28
US20250023551A1 (en) 2025-01-16
JP2025107428A (ja) 2025-07-17
JPWO2023188514A1 (https=) 2023-10-05
CN118872204A (zh) 2024-10-29
WO2023188514A1 (ja) 2023-10-05
DE112022006665T5 (de) 2024-12-12

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