JP2024051471A5 - - Google Patents

Info

Publication number
JP2024051471A5
JP2024051471A5 JP2022157659A JP2022157659A JP2024051471A5 JP 2024051471 A5 JP2024051471 A5 JP 2024051471A5 JP 2022157659 A JP2022157659 A JP 2022157659A JP 2022157659 A JP2022157659 A JP 2022157659A JP 2024051471 A5 JP2024051471 A5 JP 2024051471A5
Authority
JP
Japan
Prior art keywords
metal film
disposed
support portion
metal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022157659A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024051471A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022157659A priority Critical patent/JP2024051471A/ja
Priority claimed from JP2022157659A external-priority patent/JP2024051471A/ja
Priority to US18/476,529 priority patent/US20240113688A1/en
Priority to CN202311273130.8A priority patent/CN117811536A/zh
Publication of JP2024051471A publication Critical patent/JP2024051471A/ja
Publication of JP2024051471A5 publication Critical patent/JP2024051471A5/ja
Pending legal-status Critical Current

Links

JP2022157659A 2022-09-30 2022-09-30 振動素子 Pending JP2024051471A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022157659A JP2024051471A (ja) 2022-09-30 2022-09-30 振動素子
US18/476,529 US20240113688A1 (en) 2022-09-30 2023-09-28 Vibrator Element
CN202311273130.8A CN117811536A (zh) 2022-09-30 2023-09-28 振动元件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022157659A JP2024051471A (ja) 2022-09-30 2022-09-30 振動素子

Publications (2)

Publication Number Publication Date
JP2024051471A JP2024051471A (ja) 2024-04-11
JP2024051471A5 true JP2024051471A5 (https=) 2025-08-28

Family

ID=90432414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022157659A Pending JP2024051471A (ja) 2022-09-30 2022-09-30 振動素子

Country Status (3)

Country Link
US (1) US20240113688A1 (https=)
JP (1) JP2024051471A (https=)
CN (1) CN117811536A (https=)

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