JP2008182511A5 - - Google Patents

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Publication number
JP2008182511A5
JP2008182511A5 JP2007014668A JP2007014668A JP2008182511A5 JP 2008182511 A5 JP2008182511 A5 JP 2008182511A5 JP 2007014668 A JP2007014668 A JP 2007014668A JP 2007014668 A JP2007014668 A JP 2007014668A JP 2008182511 A5 JP2008182511 A5 JP 2008182511A5
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JP
Japan
Prior art keywords
structure portion
piezoelectric film
surface side
film
electrode formed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007014668A
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English (en)
Japanese (ja)
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JP2008182511A (ja
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Publication date
Application filed filed Critical
Priority to JP2007014668A priority Critical patent/JP2008182511A/ja
Priority claimed from JP2007014668A external-priority patent/JP2008182511A/ja
Publication of JP2008182511A publication Critical patent/JP2008182511A/ja
Publication of JP2008182511A5 publication Critical patent/JP2008182511A5/ja
Withdrawn legal-status Critical Current

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JP2007014668A 2007-01-25 2007-01-25 バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法 Withdrawn JP2008182511A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007014668A JP2008182511A (ja) 2007-01-25 2007-01-25 バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007014668A JP2008182511A (ja) 2007-01-25 2007-01-25 バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法

Publications (2)

Publication Number Publication Date
JP2008182511A JP2008182511A (ja) 2008-08-07
JP2008182511A5 true JP2008182511A5 (https=) 2010-02-12

Family

ID=39726072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007014668A Withdrawn JP2008182511A (ja) 2007-01-25 2007-01-25 バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法

Country Status (1)

Country Link
JP (1) JP2008182511A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6374653B2 (ja) * 2013-11-18 2018-08-15 太陽誘電株式会社 弾性波フィルタ及び分波器
KR102482602B1 (ko) 2020-08-19 2022-12-29 삼성전기주식회사 음향 공진기 필터

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149783A (en) * 1977-06-01 1978-12-27 Seiko Instr & Electronics Ltd Composite piezo-electric vibrator
JPH03178211A (ja) * 1989-12-07 1991-08-02 Murata Mfg Co Ltd 圧電共振子
JP3514224B2 (ja) * 1999-11-11 2004-03-31 株式会社村田製作所 圧電共振子、フィルタ及び電子機器
JP3979073B2 (ja) * 2000-12-06 2007-09-19 株式会社村田製作所 圧電共振子、圧電フィルタおよびデュプレクサ
JP2005117641A (ja) * 2003-09-17 2005-04-28 Matsushita Electric Ind Co Ltd 圧電体共振器、それを用いたフィルタ及び共用器

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