JPWO2023190677A5 - - Google Patents

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Publication number
JPWO2023190677A5
JPWO2023190677A5 JP2024512672A JP2024512672A JPWO2023190677A5 JP WO2023190677 A5 JPWO2023190677 A5 JP WO2023190677A5 JP 2024512672 A JP2024512672 A JP 2024512672A JP 2024512672 A JP2024512672 A JP 2024512672A JP WO2023190677 A5 JPWO2023190677 A5 JP WO2023190677A5
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JP
Japan
Prior art keywords
multilayer film
acoustic
layer
acoustic multilayer
film according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2024512672A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023190677A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2023/012784 external-priority patent/WO2023190677A1/ja
Publication of JPWO2023190677A1 publication Critical patent/JPWO2023190677A1/ja
Publication of JPWO2023190677A5 publication Critical patent/JPWO2023190677A5/ja
Withdrawn legal-status Critical Current

Links

JP2024512672A 2022-03-31 2023-03-29 Withdrawn JPWO2023190677A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022058814 2022-03-31
PCT/JP2023/012784 WO2023190677A1 (ja) 2022-03-31 2023-03-29 音響多層膜、高周波フィルタデバイス、及びバルク弾性波フィルタデバイス

Publications (2)

Publication Number Publication Date
JPWO2023190677A1 JPWO2023190677A1 (https=) 2023-10-05
JPWO2023190677A5 true JPWO2023190677A5 (https=) 2026-02-10

Family

ID=88202021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024512672A Withdrawn JPWO2023190677A1 (https=) 2022-03-31 2023-03-29

Country Status (4)

Country Link
US (1) US20250219611A1 (https=)
JP (1) JPWO2023190677A1 (https=)
TW (1) TW202406299A (https=)
WO (1) WO2023190677A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025205107A1 (ja) * 2024-03-28 2025-10-02 日東電工株式会社 圧電デバイス及び電子機器
CN118249774B (zh) * 2024-05-21 2024-09-20 河源市艾佛光通科技有限公司 一种体声波谐振器及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005197983A (ja) * 2004-01-07 2005-07-21 Tdk Corp 薄膜バルク波共振器
JP4693407B2 (ja) * 2004-12-28 2011-06-01 京セラキンセキ株式会社 圧電薄膜デバイス及びその製造方法
JP4846477B2 (ja) * 2006-07-26 2011-12-28 パナソニック株式会社 薄膜音響共振器の製造方法
JP2008187303A (ja) * 2007-01-26 2008-08-14 Matsushita Electric Works Ltd 共振装置の製造方法
US8586195B2 (en) * 2007-07-11 2013-11-19 Avago Technologies General Ip (Singapore) Pte. Ltd. Method for forming an acoustic mirror with reduced metal layer roughness and related structure
US7869187B2 (en) * 2007-09-04 2011-01-11 Paratek Microwave, Inc. Acoustic bandgap structures adapted to suppress parasitic resonances in tunable ferroelectric capacitors and method of operation and fabrication therefore

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