JP2008182511A - バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法 - Google Patents
バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法 Download PDFInfo
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- JP2008182511A JP2008182511A JP2007014668A JP2007014668A JP2008182511A JP 2008182511 A JP2008182511 A JP 2008182511A JP 2007014668 A JP2007014668 A JP 2007014668A JP 2007014668 A JP2007014668 A JP 2007014668A JP 2008182511 A JP2008182511 A JP 2008182511A
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- 238000000034 method Methods 0.000 title claims description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 12
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- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000011946 reduction process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
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- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910003134 ZrOx Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007014668A JP2008182511A (ja) | 2007-01-25 | 2007-01-25 | バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007014668A JP2008182511A (ja) | 2007-01-25 | 2007-01-25 | バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008182511A true JP2008182511A (ja) | 2008-08-07 |
| JP2008182511A5 JP2008182511A5 (https=) | 2010-02-12 |
Family
ID=39726072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007014668A Withdrawn JP2008182511A (ja) | 2007-01-25 | 2007-01-25 | バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008182511A (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015099988A (ja) * | 2013-11-18 | 2015-05-28 | 太陽誘電株式会社 | 弾性波フィルタ及び分波器 |
| US11387809B2 (en) | 2020-08-19 | 2022-07-12 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator filter |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149783A (en) * | 1977-06-01 | 1978-12-27 | Seiko Instr & Electronics Ltd | Composite piezo-electric vibrator |
| JPH03178211A (ja) * | 1989-12-07 | 1991-08-02 | Murata Mfg Co Ltd | 圧電共振子 |
| JP2001203558A (ja) * | 1999-11-11 | 2001-07-27 | Murata Mfg Co Ltd | 圧電共振子、フィルタ及び電子機器 |
| JP2002237738A (ja) * | 2000-12-06 | 2002-08-23 | Murata Mfg Co Ltd | 圧電共振子、圧電フィルタおよびデュプレクサ |
| JP2005117641A (ja) * | 2003-09-17 | 2005-04-28 | Matsushita Electric Ind Co Ltd | 圧電体共振器、それを用いたフィルタ及び共用器 |
-
2007
- 2007-01-25 JP JP2007014668A patent/JP2008182511A/ja not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149783A (en) * | 1977-06-01 | 1978-12-27 | Seiko Instr & Electronics Ltd | Composite piezo-electric vibrator |
| JPH03178211A (ja) * | 1989-12-07 | 1991-08-02 | Murata Mfg Co Ltd | 圧電共振子 |
| JP2001203558A (ja) * | 1999-11-11 | 2001-07-27 | Murata Mfg Co Ltd | 圧電共振子、フィルタ及び電子機器 |
| JP2002237738A (ja) * | 2000-12-06 | 2002-08-23 | Murata Mfg Co Ltd | 圧電共振子、圧電フィルタおよびデュプレクサ |
| JP2005117641A (ja) * | 2003-09-17 | 2005-04-28 | Matsushita Electric Ind Co Ltd | 圧電体共振器、それを用いたフィルタ及び共用器 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015099988A (ja) * | 2013-11-18 | 2015-05-28 | 太陽誘電株式会社 | 弾性波フィルタ及び分波器 |
| US11387809B2 (en) | 2020-08-19 | 2022-07-12 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator filter |
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