JP2022112576A5 - - Google Patents
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- Publication number
- JP2022112576A5 JP2022112576A5 JP2021008415A JP2021008415A JP2022112576A5 JP 2022112576 A5 JP2022112576 A5 JP 2022112576A5 JP 2021008415 A JP2021008415 A JP 2021008415A JP 2021008415 A JP2021008415 A JP 2021008415A JP 2022112576 A5 JP2022112576 A5 JP 2022112576A5
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- wave device
- metal film
- device package
- film made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims 16
- 239000002184 metal Substances 0.000 claims 16
- 239000011347 resin Substances 0.000 claims 6
- 229920005989 resin Polymers 0.000 claims 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000010936 titanium Substances 0.000 claims 4
- 229910052719 titanium Inorganic materials 0.000 claims 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 3
- 229910052802 copper Inorganic materials 0.000 claims 3
- 239000010949 copper Substances 0.000 claims 3
- 238000010030 laminating Methods 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 229910001374 Invar Inorganic materials 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 239000011574 phosphorus Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021008415A JP7610248B2 (ja) | 2021-01-22 | 2021-01-22 | 弾性波デバイスパッケージ |
| CN202110773549.4A CN114785312A (zh) | 2021-01-22 | 2021-07-08 | 弹性波装置封装 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021008415A JP7610248B2 (ja) | 2021-01-22 | 2021-01-22 | 弾性波デバイスパッケージ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022112576A JP2022112576A (ja) | 2022-08-03 |
| JP2022112576A5 true JP2022112576A5 (https=) | 2024-01-24 |
| JP7610248B2 JP7610248B2 (ja) | 2025-01-08 |
Family
ID=82422604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021008415A Active JP7610248B2 (ja) | 2021-01-22 | 2021-01-22 | 弾性波デバイスパッケージ |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7610248B2 (https=) |
| CN (1) | CN114785312A (https=) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07111438A (ja) * | 1993-10-08 | 1995-04-25 | Hitachi Ltd | 弾性表面波装置、及びその製造方法 |
| DE10136743B4 (de) | 2001-07-27 | 2013-02-14 | Epcos Ag | Verfahren zur hermetischen Verkapselung eines Bauelementes |
| JP2005184309A (ja) | 2003-12-18 | 2005-07-07 | Matsushita Electric Ind Co Ltd | 弾性表面波デバイス及びその製造方法 |
| JP4375037B2 (ja) | 2004-02-05 | 2009-12-02 | パナソニック株式会社 | 弾性表面波素子 |
| JP2006318949A (ja) | 2005-05-10 | 2006-11-24 | Fujimaru Kogyo Kk | ハーメチックシール用蓋体 |
| KR102091424B1 (ko) * | 2015-12-21 | 2020-03-20 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성파 장치 |
| WO2017212742A1 (ja) | 2016-06-09 | 2017-12-14 | 株式会社村田製作所 | 弾性波装置 |
| JP6449836B2 (ja) | 2016-11-25 | 2019-01-09 | 太陽誘電株式会社 | 電子部品およびその製造方法 |
| JP2018129631A (ja) | 2017-02-07 | 2018-08-16 | 太陽誘電株式会社 | 弾性波デバイス |
| JP2019125871A (ja) * | 2018-01-12 | 2019-07-25 | 株式会社村田製作所 | 弾性波装置 |
-
2021
- 2021-01-22 JP JP2021008415A patent/JP7610248B2/ja active Active
- 2021-07-08 CN CN202110773549.4A patent/CN114785312A/zh active Pending
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