JP2003101373A5 - - Google Patents

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Publication number
JP2003101373A5
JP2003101373A5 JP2001292471A JP2001292471A JP2003101373A5 JP 2003101373 A5 JP2003101373 A5 JP 2003101373A5 JP 2001292471 A JP2001292471 A JP 2001292471A JP 2001292471 A JP2001292471 A JP 2001292471A JP 2003101373 A5 JP2003101373 A5 JP 2003101373A5
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
film thickness
piezoelectric substrate
wave device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001292471A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003101373A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001292471A priority Critical patent/JP2003101373A/ja
Priority claimed from JP2001292471A external-priority patent/JP2003101373A/ja
Priority to EP02021468.0A priority patent/EP1296454B1/en
Priority to US10/253,988 priority patent/US20030062969A1/en
Publication of JP2003101373A publication Critical patent/JP2003101373A/ja
Priority to US10/699,779 priority patent/US7116187B2/en
Publication of JP2003101373A5 publication Critical patent/JP2003101373A5/ja
Pending legal-status Critical Current

Links

JP2001292471A 2001-09-25 2001-09-25 弾性表面波素子および弾性表面波装置 Pending JP2003101373A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001292471A JP2003101373A (ja) 2001-09-25 2001-09-25 弾性表面波素子および弾性表面波装置
EP02021468.0A EP1296454B1 (en) 2001-09-25 2002-09-25 SAW element and SAW device
US10/253,988 US20030062969A1 (en) 2001-09-25 2002-09-25 Saw element and saw device
US10/699,779 US7116187B2 (en) 2001-09-25 2003-11-04 Saw element and saw device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001292471A JP2003101373A (ja) 2001-09-25 2001-09-25 弾性表面波素子および弾性表面波装置

Publications (2)

Publication Number Publication Date
JP2003101373A JP2003101373A (ja) 2003-04-04
JP2003101373A5 true JP2003101373A5 (https=) 2005-10-06

Family

ID=19114427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001292471A Pending JP2003101373A (ja) 2001-09-25 2001-09-25 弾性表面波素子および弾性表面波装置

Country Status (1)

Country Link
JP (1) JP2003101373A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5558158B2 (ja) * 2009-03-27 2014-07-23 京セラ株式会社 弾性表面波装置及びその製造方法
US10056878B2 (en) 2014-12-12 2018-08-21 Taiyo Yuden Co., Ltd. Acoustic wave device and method of fabricating the same
WO2018135538A1 (ja) 2017-01-19 2018-07-26 株式会社村田製作所 高周波フィルタ、高周波フロントエンド回路、および通信装置
WO2018139320A1 (ja) 2017-01-30 2018-08-02 株式会社村田製作所 高周波フィルタ、高周波フロントエンド回路及び通信装置

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