JP2003101373A - 弾性表面波素子および弾性表面波装置 - Google Patents
弾性表面波素子および弾性表面波装置Info
- Publication number
- JP2003101373A JP2003101373A JP2001292471A JP2001292471A JP2003101373A JP 2003101373 A JP2003101373 A JP 2003101373A JP 2001292471 A JP2001292471 A JP 2001292471A JP 2001292471 A JP2001292471 A JP 2001292471A JP 2003101373 A JP2003101373 A JP 2003101373A
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- film thickness
- piezoelectric substrate
- excitation electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 70
- 230000005284 excitation Effects 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 9
- 230000006866 deterioration Effects 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 86
- 239000010410 layer Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 21
- 229920002120 photoresistant polymer Polymers 0.000 description 14
- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 239000010409 thin film Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001292471A JP2003101373A (ja) | 2001-09-25 | 2001-09-25 | 弾性表面波素子および弾性表面波装置 |
| EP02021468.0A EP1296454B1 (en) | 2001-09-25 | 2002-09-25 | SAW element and SAW device |
| US10/253,988 US20030062969A1 (en) | 2001-09-25 | 2002-09-25 | Saw element and saw device |
| US10/699,779 US7116187B2 (en) | 2001-09-25 | 2003-11-04 | Saw element and saw device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001292471A JP2003101373A (ja) | 2001-09-25 | 2001-09-25 | 弾性表面波素子および弾性表面波装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003101373A true JP2003101373A (ja) | 2003-04-04 |
| JP2003101373A5 JP2003101373A5 (https=) | 2005-10-06 |
Family
ID=19114427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001292471A Pending JP2003101373A (ja) | 2001-09-25 | 2001-09-25 | 弾性表面波素子および弾性表面波装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003101373A (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010252321A (ja) * | 2009-03-27 | 2010-11-04 | Kyocera Corp | 弾性表面波装置及びその製造方法 |
| WO2018135538A1 (ja) * | 2017-01-19 | 2018-07-26 | 株式会社村田製作所 | 高周波フィルタ、高周波フロントエンド回路、および通信装置 |
| WO2018139320A1 (ja) * | 2017-01-30 | 2018-08-02 | 株式会社村田製作所 | 高周波フィルタ、高周波フロントエンド回路及び通信装置 |
| US10056878B2 (en) | 2014-12-12 | 2018-08-21 | Taiyo Yuden Co., Ltd. | Acoustic wave device and method of fabricating the same |
-
2001
- 2001-09-25 JP JP2001292471A patent/JP2003101373A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010252321A (ja) * | 2009-03-27 | 2010-11-04 | Kyocera Corp | 弾性表面波装置及びその製造方法 |
| US10056878B2 (en) | 2014-12-12 | 2018-08-21 | Taiyo Yuden Co., Ltd. | Acoustic wave device and method of fabricating the same |
| WO2018135538A1 (ja) * | 2017-01-19 | 2018-07-26 | 株式会社村田製作所 | 高周波フィルタ、高周波フロントエンド回路、および通信装置 |
| US11012050B2 (en) | 2017-01-19 | 2021-05-18 | Murata Manufacturing Co., Ltd. | Radio-frequency filter, radio-frequency front-end circuit, and communication apparatus |
| WO2018139320A1 (ja) * | 2017-01-30 | 2018-08-02 | 株式会社村田製作所 | 高周波フィルタ、高周波フロントエンド回路及び通信装置 |
| US11031920B2 (en) | 2017-01-30 | 2021-06-08 | Murata Manufacturing Co., Ltd. | Radio-frequency filter, radio-frequency front-end circuit, and communication apparatus |
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Legal Events
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| A521 | Written amendment |
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