JP7610248B2 - 弾性波デバイスパッケージ - Google Patents

弾性波デバイスパッケージ Download PDF

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Publication number
JP7610248B2
JP7610248B2 JP2021008415A JP2021008415A JP7610248B2 JP 7610248 B2 JP7610248 B2 JP 7610248B2 JP 2021008415 A JP2021008415 A JP 2021008415A JP 2021008415 A JP2021008415 A JP 2021008415A JP 7610248 B2 JP7610248 B2 JP 7610248B2
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Japan
Prior art keywords
acoustic wave
wave device
film made
metal film
metal layer
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JP2021008415A
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Japanese (ja)
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JP2022112576A (ja
JP2022112576A5 (https=
Inventor
博文 中村
浩一 熊谷
裕 門川
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SANAN JAPAN TECHNOLOGY
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SANAN JAPAN TECHNOLOGY
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Priority to JP2021008415A priority Critical patent/JP7610248B2/ja
Priority to CN202110773549.4A priority patent/CN114785312A/zh
Publication of JP2022112576A publication Critical patent/JP2022112576A/ja
Publication of JP2022112576A5 publication Critical patent/JP2022112576A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2021008415A 2021-01-22 2021-01-22 弾性波デバイスパッケージ Active JP7610248B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021008415A JP7610248B2 (ja) 2021-01-22 2021-01-22 弾性波デバイスパッケージ
CN202110773549.4A CN114785312A (zh) 2021-01-22 2021-07-08 弹性波装置封装

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021008415A JP7610248B2 (ja) 2021-01-22 2021-01-22 弾性波デバイスパッケージ

Publications (3)

Publication Number Publication Date
JP2022112576A JP2022112576A (ja) 2022-08-03
JP2022112576A5 JP2022112576A5 (https=) 2024-01-24
JP7610248B2 true JP7610248B2 (ja) 2025-01-08

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ID=82422604

Family Applications (1)

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JP2021008415A Active JP7610248B2 (ja) 2021-01-22 2021-01-22 弾性波デバイスパッケージ

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JP (1) JP7610248B2 (https=)
CN (1) CN114785312A (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004537178A (ja) 2001-07-27 2004-12-09 エプコス　アクチエンゲゼルシャフト 構成素子を気密封止するための方法
JP2005184309A (ja) 2003-12-18 2005-07-07 Matsushita Electric Ind Co Ltd 弾性表面波デバイス及びその製造方法
JP2005223580A (ja) 2004-02-05 2005-08-18 Matsushita Electric Ind Co Ltd 弾性表面波素子、弾性表面波デバイス及びその製造方法
JP2006318949A (ja) 2005-05-10 2006-11-24 Fujimaru Kogyo Kk ハーメチックシール用蓋体
WO2017212742A1 (ja) 2016-06-09 2017-12-14 株式会社村田製作所 弾性波装置
JP2018085490A (ja) 2016-11-25 2018-05-31 太陽誘電株式会社 電子部品およびその製造方法
JP2018129631A (ja) 2017-02-07 2018-08-16 太陽誘電株式会社 弾性波デバイス

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07111438A (ja) * 1993-10-08 1995-04-25 Hitachi Ltd 弾性表面波装置、及びその製造方法
KR102091424B1 (ko) * 2015-12-21 2020-03-20 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
JP2019125871A (ja) * 2018-01-12 2019-07-25 株式会社村田製作所 弾性波装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004537178A (ja) 2001-07-27 2004-12-09 エプコス　アクチエンゲゼルシャフト 構成素子を気密封止するための方法
JP2005184309A (ja) 2003-12-18 2005-07-07 Matsushita Electric Ind Co Ltd 弾性表面波デバイス及びその製造方法
JP2005223580A (ja) 2004-02-05 2005-08-18 Matsushita Electric Ind Co Ltd 弾性表面波素子、弾性表面波デバイス及びその製造方法
JP2006318949A (ja) 2005-05-10 2006-11-24 Fujimaru Kogyo Kk ハーメチックシール用蓋体
WO2017212742A1 (ja) 2016-06-09 2017-12-14 株式会社村田製作所 弾性波装置
JP2018085490A (ja) 2016-11-25 2018-05-31 太陽誘電株式会社 電子部品およびその製造方法
JP2018129631A (ja) 2017-02-07 2018-08-16 太陽誘電株式会社 弾性波デバイス

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JP2022112576A (ja) 2022-08-03
CN114785312A (zh) 2022-07-22

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