JPWO2023105845A5 - - Google Patents

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Publication number
JPWO2023105845A5
JPWO2023105845A5 JP2023566084A JP2023566084A JPWO2023105845A5 JP WO2023105845 A5 JPWO2023105845 A5 JP WO2023105845A5 JP 2023566084 A JP2023566084 A JP 2023566084A JP 2023566084 A JP2023566084 A JP 2023566084A JP WO2023105845 A5 JPWO2023105845 A5 JP WO2023105845A5
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JP
Japan
Prior art keywords
substrate
resonator according
vibration
thickness
support
Prior art date
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Granted
Application number
JP2023566084A
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English (en)
Japanese (ja)
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JP7685163B2 (ja
JPWO2023105845A1 (https=
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Priority claimed from PCT/JP2022/029124 external-priority patent/WO2023105845A1/ja
Publication of JPWO2023105845A1 publication Critical patent/JPWO2023105845A1/ja
Publication of JPWO2023105845A5 publication Critical patent/JPWO2023105845A5/ja
Application granted granted Critical
Publication of JP7685163B2 publication Critical patent/JP7685163B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023566084A 2021-12-06 2022-07-28 共振子及び共振装置 Active JP7685163B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021197531 2021-12-06
JP2021197531 2021-12-06
PCT/JP2022/029124 WO2023105845A1 (ja) 2021-12-06 2022-07-28 共振子及び共振装置

Publications (3)

Publication Number Publication Date
JPWO2023105845A1 JPWO2023105845A1 (https=) 2023-06-15
JPWO2023105845A5 true JPWO2023105845A5 (https=) 2024-08-01
JP7685163B2 JP7685163B2 (ja) 2025-05-29

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ID=86730070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023566084A Active JP7685163B2 (ja) 2021-12-06 2022-07-28 共振子及び共振装置

Country Status (4)

Country Link
US (1) US20240305266A1 (https=)
JP (1) JP7685163B2 (https=)
CN (1) CN118451653A (https=)
WO (1) WO2023105845A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6402869B2 (ja) * 2014-10-22 2018-10-10 株式会社村田製作所 共振子及び共振装置
JP6814419B2 (ja) * 2017-07-05 2021-01-20 株式会社村田製作所 共振子及び共振装置
FI128436B (en) * 2018-02-08 2020-05-15 Tikitin Oy MEMS resonator
WO2020213210A1 (ja) * 2019-04-19 2020-10-22 株式会社村田製作所 共振子及び共振装置

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