CN118451653A - 谐振器以及谐振装置 - Google Patents

谐振器以及谐振装置 Download PDF

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Publication number
CN118451653A
CN118451653A CN202280081086.8A CN202280081086A CN118451653A CN 118451653 A CN118451653 A CN 118451653A CN 202280081086 A CN202280081086 A CN 202280081086A CN 118451653 A CN118451653 A CN 118451653A
Authority
CN
China
Prior art keywords
vibration
thickness
substrate
resonator according
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280081086.8A
Other languages
English (en)
Chinese (zh)
Inventor
樋口敬之
福光政和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN118451653A publication Critical patent/CN118451653A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202280081086.8A 2021-12-06 2022-07-28 谐振器以及谐振装置 Pending CN118451653A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021197531 2021-12-06
JP2021-197531 2021-12-06
PCT/JP2022/029124 WO2023105845A1 (ja) 2021-12-06 2022-07-28 共振子及び共振装置

Publications (1)

Publication Number Publication Date
CN118451653A true CN118451653A (zh) 2024-08-06

Family

ID=86730070

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280081086.8A Pending CN118451653A (zh) 2021-12-06 2022-07-28 谐振器以及谐振装置

Country Status (4)

Country Link
US (1) US20240305266A1 (https=)
JP (1) JP7685163B2 (https=)
CN (1) CN118451653A (https=)
WO (1) WO2023105845A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6402869B2 (ja) * 2014-10-22 2018-10-10 株式会社村田製作所 共振子及び共振装置
JP6814419B2 (ja) * 2017-07-05 2021-01-20 株式会社村田製作所 共振子及び共振装置
FI128436B (en) * 2018-02-08 2020-05-15 Tikitin Oy MEMS resonator
WO2020213210A1 (ja) * 2019-04-19 2020-10-22 株式会社村田製作所 共振子及び共振装置

Also Published As

Publication number Publication date
JP7685163B2 (ja) 2025-05-29
US20240305266A1 (en) 2024-09-12
JPWO2023105845A1 (https=) 2023-06-15
WO2023105845A1 (ja) 2023-06-15

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