JPWO2021206050A5 - - Google Patents

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Publication number
JPWO2021206050A5
JPWO2021206050A5 JP2022514061A JP2022514061A JPWO2021206050A5 JP WO2021206050 A5 JPWO2021206050 A5 JP WO2021206050A5 JP 2022514061 A JP2022514061 A JP 2022514061A JP 2022514061 A JP2022514061 A JP 2022514061A JP WO2021206050 A5 JPWO2021206050 A5 JP WO2021206050A5
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JP
Japan
Prior art keywords
layer
piezoelectric
region
laminate
support substrate
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JP2022514061A
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English (en)
Japanese (ja)
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JP7459936B2 (ja
JPWO2021206050A1 (https=
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Priority claimed from PCT/JP2021/014486 external-priority patent/WO2021206050A1/ja
Publication of JPWO2021206050A1 publication Critical patent/JPWO2021206050A1/ja
Publication of JPWO2021206050A5 publication Critical patent/JPWO2021206050A5/ja
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Publication of JP7459936B2 publication Critical patent/JP7459936B2/ja
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JP2022514061A 2020-04-10 2021-04-05 圧電デバイス Active JP7459936B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020071025 2020-04-10
JP2020071025 2020-04-10
PCT/JP2021/014486 WO2021206050A1 (ja) 2020-04-10 2021-04-05 圧電デバイス

Publications (3)

Publication Number Publication Date
JPWO2021206050A1 JPWO2021206050A1 (https=) 2021-10-14
JPWO2021206050A5 true JPWO2021206050A5 (https=) 2022-10-24
JP7459936B2 JP7459936B2 (ja) 2024-04-02

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ID=78023270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022514061A Active JP7459936B2 (ja) 2020-04-10 2021-04-05 圧電デバイス

Country Status (4)

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US (1) US20230027753A1 (https=)
JP (1) JP7459936B2 (https=)
CN (1) CN115349226B (https=)
WO (1) WO2021206050A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116722838B (zh) * 2023-06-29 2024-08-02 北京超材信息科技有限公司 声表面波滤波器及组、多工器及射频模组
CN120675527A (zh) * 2024-09-25 2025-09-19 华为技术有限公司 压电器件及其制备方法、电子设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5807715B2 (ja) * 2012-03-23 2015-11-10 株式会社村田製作所 弾性波フィルタ素子及びその製造方法
JP6288110B2 (ja) * 2013-12-27 2018-03-07 株式会社村田製作所 弾性波装置
KR101929333B1 (ko) * 2015-06-25 2018-12-14 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
KR102369436B1 (ko) * 2017-04-19 2022-03-03 삼성전기주식회사 체적 음향 공진기
JP2019179961A (ja) * 2018-03-30 2019-10-17 株式会社村田製作所 弾性波装置

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