JP2006121259A5 - - Google Patents

Download PDF

Info

Publication number
JP2006121259A5
JP2006121259A5 JP2004305211A JP2004305211A JP2006121259A5 JP 2006121259 A5 JP2006121259 A5 JP 2006121259A5 JP 2004305211 A JP2004305211 A JP 2004305211A JP 2004305211 A JP2004305211 A JP 2004305211A JP 2006121259 A5 JP2006121259 A5 JP 2006121259A5
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
reflective layer
layer
wave device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004305211A
Other languages
English (en)
Japanese (ja)
Other versions
JP4548088B2 (ja
JP2006121259A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004305211A priority Critical patent/JP4548088B2/ja
Priority claimed from JP2004305211A external-priority patent/JP4548088B2/ja
Publication of JP2006121259A publication Critical patent/JP2006121259A/ja
Publication of JP2006121259A5 publication Critical patent/JP2006121259A5/ja
Application granted granted Critical
Publication of JP4548088B2 publication Critical patent/JP4548088B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004305211A 2004-10-20 2004-10-20 弾性表面波装置 Expired - Fee Related JP4548088B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004305211A JP4548088B2 (ja) 2004-10-20 2004-10-20 弾性表面波装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004305211A JP4548088B2 (ja) 2004-10-20 2004-10-20 弾性表面波装置

Publications (3)

Publication Number Publication Date
JP2006121259A JP2006121259A (ja) 2006-05-11
JP2006121259A5 true JP2006121259A5 (https=) 2007-08-02
JP4548088B2 JP4548088B2 (ja) 2010-09-22

Family

ID=36538751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004305211A Expired - Fee Related JP4548088B2 (ja) 2004-10-20 2004-10-20 弾性表面波装置

Country Status (1)

Country Link
JP (1) JP4548088B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2099129A4 (en) 2006-12-27 2014-03-26 Murata Manufacturing Co Surface acoustic wave device
WO2012086441A1 (ja) * 2010-12-24 2012-06-28 株式会社村田製作所 弾性波装置及びその製造方法
DE102010056562B4 (de) 2010-12-30 2018-10-11 Snaptrack, Inc. Elektroakustisches Bauelement und Verfahren zur Herstellung des elektroakustischen Bauelements
DE102010056572B4 (de) 2010-12-30 2018-12-27 Snaptrack, Inc. Elektronisches Bauelement und Verfahren zur Herstellung des elektronischen Bauelements
JP5720797B2 (ja) 2011-10-24 2015-05-20 株式会社村田製作所 弾性表面波装置
KR102029503B1 (ko) * 2014-12-08 2019-11-08 삼성전기주식회사 체적 음향 공진기 및 필터
CN112953449B (zh) * 2021-03-04 2024-10-01 偲百创(深圳)科技有限公司 横向激励剪切模式的声学谐振器的制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61251310A (ja) * 1985-04-30 1986-11-08 Asahi Glass Co Ltd 超音波遅延線
JPH0324719U (https=) * 1990-07-12 1991-03-14
US5373268A (en) * 1993-02-01 1994-12-13 Motorola, Inc. Thin film resonator having stacked acoustic reflecting impedance matching layers and method
KR100316383B1 (ko) * 1998-10-30 2002-02-19 윤덕용 모노리딕직접회로위에박막또는후막단결정압전소자를집적한단일칩라디오구조및그제조방법
JP2004187204A (ja) * 2002-12-06 2004-07-02 Sony Corp 音響共振器および信号処理装置

Similar Documents

Publication Publication Date Title
JP2022044005A5 (ja) 電子デバイス、無線周波数モジュール及び無線周波数デバイス
CN108028637B (zh) 弹性波装置
JP2017200175A5 (ja) 電子部品と電子装置
JP2018535595A5 (https=)
JP6464735B2 (ja) 弾性波装置及びその製造方法
JP2010062723A5 (https=)
WO2003058813A1 (en) Surface acoustic wave device, electronic component using the device, and composite module
WO2009011148A1 (ja) 圧電薄膜共振素子及びこれを用いた回路部品
CN108028636A (zh) 弹性波装置
JPWO2009139108A1 (ja) 弾性境界波装置
WO2007125734A1 (ja) 弾性表面波装置
JP2006121259A5 (https=)
JP2004507960A5 (https=)
JP2007267108A (ja) 圧電薄膜共振子
JP2015144418A5 (ja) 可変周波数弾性表面波変換器とこれを用いた電子装置
JP2008098974A5 (https=)
JP2009005023A5 (https=)
CN205647460U (zh) 多层合金膜结构声表面波器件
Bjurström et al. Thin film Lamb wave resonant structures–The first approach
EP1667322A3 (en) Surface acoustic wave element and manufacturing method thereof
ATE527754T1 (de) Akustischer volumenwellenresonator und herstellungsverfahren dafür
EP1708289A3 (en) Piezoelectric film laminate and method of manufacturing the same, surface acoustic wave device, frequency filter, oscillator, electronic circuit, and electronic instrument
TW200501573A (en) Surface acoustic wave device
JP2005033775A5 (https=)
JP2008311853A5 (https=)