JP2018535595A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2018535595A5 JP2018535595A5 JP2018520475A JP2018520475A JP2018535595A5 JP 2018535595 A5 JP2018535595 A5 JP 2018535595A5 JP 2018520475 A JP2018520475 A JP 2018520475A JP 2018520475 A JP2018520475 A JP 2018520475A JP 2018535595 A5 JP2018535595 A5 JP 2018535595A5
- Authority
- JP
- Japan
- Prior art keywords
- acoustic impedance
- material layer
- electrode
- solid
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 52
- 239000007787 solid Substances 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 16
- 238000002834 transmittance Methods 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 56
- 230000005540 biological transmission Effects 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000009870 specific binding Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562244284P | 2015-10-21 | 2015-10-21 | |
| US62/244,284 | 2015-10-21 | ||
| PCT/US2016/057653 WO2017070177A1 (en) | 2015-10-21 | 2016-10-19 | Resonator structure with enhanced reflection of shear and longitudinal modes of acoustic vibrations |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018535595A JP2018535595A (ja) | 2018-11-29 |
| JP2018535595A5 true JP2018535595A5 (https=) | 2021-04-08 |
| JP6916176B2 JP6916176B2 (ja) | 2021-08-11 |
Family
ID=57206457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018520475A Active JP6916176B2 (ja) | 2015-10-21 | 2016-10-19 | 音響振動のせん断モードおよび縦モードの反射を増強した共振器構造体 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10193524B2 (https=) |
| EP (1) | EP3365669B8 (https=) |
| JP (1) | JP6916176B2 (https=) |
| CN (1) | CN108463720B (https=) |
| WO (1) | WO2017070177A1 (https=) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11356071B2 (en) * | 2016-03-11 | 2022-06-07 | Akoustis, Inc. | Piezoelectric acoustic resonator with improved TCF manufactured with piezoelectric thin film transfer process |
| DE102017111448B4 (de) * | 2017-05-24 | 2022-02-10 | RF360 Europe GmbH | SAW-Vorrichtung mit unterdrückten Störmodensignalen |
| EP3762155B1 (en) | 2018-03-09 | 2023-12-13 | BFLY Operations, Inc. | Methods for fabricating ultrasound transducer devices |
| US11750169B2 (en) | 2018-07-17 | 2023-09-05 | Ii-Vi Delaware, Inc. | Electrode-defined unsuspended acoustic resonator |
| DE102019115589B4 (de) | 2018-07-17 | 2024-06-13 | Ii-Vi Delaware, Inc. | Elektrodenbegrenzter resonator |
| US12076973B2 (en) | 2018-07-17 | 2024-09-03 | Ii-Vi Delaware, Inc. | Bonded substrate including polycrystalline diamond film |
| JP2020053966A (ja) * | 2018-09-24 | 2020-04-02 | スカイワークス グローバル プライベート リミテッド | バルク弾性波デバイスにおける多層隆起フレーム |
| DE102018132920B4 (de) * | 2018-12-19 | 2020-08-06 | RF360 Europe GmbH | Elektroakustischer Resonator und Verfahren zu seiner Herstellung |
| CN109870504A (zh) * | 2019-01-16 | 2019-06-11 | 东南大学 | 一种用于液体检测的微流通道声波传感器 |
| WO2020203092A1 (ja) * | 2019-03-29 | 2020-10-08 | 株式会社村田製作所 | 弾性波装置 |
| TWI810698B (zh) * | 2019-06-12 | 2023-08-01 | 美商特拉華公司 | 電極界定未懸掛之聲波共振器 |
| CN114868015B (zh) * | 2019-12-19 | 2026-03-20 | Qorvo美国公司 | 用于质量传感的谐振器结构 |
| CN111351848B (zh) * | 2020-03-19 | 2020-10-16 | 山东科技大学 | 一种传感器的制备方法、传感器以及传感器的检测方法 |
| EP4200981A1 (en) * | 2020-09-14 | 2023-06-28 | Huawei Technologies Co., Ltd. | Solidly mounted bulk acoustic wave resonator with frequency tuning by mass loading in acoustic reflector and method of manufacturing thereof |
| DE102021209875A1 (de) | 2020-09-18 | 2022-03-24 | Skyworks Global Pte. Ltd. | Akustische volumenwellenvorrichtung mit erhöhter rahmenstruktur |
| CN112350680B (zh) * | 2020-10-20 | 2024-12-10 | 中芯集成电路（宁波）有限公司 | 一种薄膜声波谐振器及其制造方法 |
| WO2022168498A1 (ja) * | 2021-02-05 | 2022-08-11 | 日本碍子株式会社 | 複合基板、弾性表面波素子および複合基板の製造方法 |
| CN112953447B (zh) * | 2021-02-09 | 2023-08-11 | 偲百创(深圳)科技有限公司 | 谐振器及电子设备 |
| CN112910433B (zh) * | 2021-03-04 | 2025-09-16 | 偲百创(深圳)科技有限公司 | 横向激励剪切模式的声学谐振器 |
| CN112953449B (zh) * | 2021-03-04 | 2024-10-01 | 偲百创(深圳)科技有限公司 | 横向激励剪切模式的声学谐振器的制造方法 |
| CN114285390B (zh) * | 2021-03-15 | 2025-11-18 | 偲百创(深圳)科技有限公司 | 厚度方向激励剪切模式的声学谐振器 |
| CN216414272U (zh) * | 2021-11-29 | 2022-04-29 | 瑞声科技（南京）有限公司 | 一种压电薄膜声学谐振器 |
| JP2023139785A (ja) * | 2022-03-22 | 2023-10-04 | リバーエレテック株式会社 | 弾性波素子及びそれを用いた原子発振器 |
| CN118891824A (zh) * | 2022-03-28 | 2024-11-01 | 日本碍子株式会社 | 复合基板、弹性表面波元件以及复合基板的制造方法 |
| CN116346080B (zh) * | 2023-02-15 | 2024-07-12 | 上海馨欧集成微电有限公司 | 一种声表面波滤波器 |
| CN117097283B (zh) * | 2023-10-13 | 2024-01-30 | 广州市艾佛光通科技有限公司 | 一种固态装配型谐振器制作方法及固态装配型谐振器 |
| CN119298871B (zh) * | 2024-01-31 | 2025-11-07 | 上海馨欧集成微电有限公司 | 一种高频声波谐振器及通信设备 |
| CN118980744A (zh) * | 2024-08-28 | 2024-11-19 | 集美大学 | 一种基于AIScN压电薄膜的异质声学结构的表面声波氢气传感器 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4640756A (en) * | 1983-10-25 | 1987-02-03 | The United States Of America As Represented By The United States Department Of Energy | Method of making a piezoelectric shear wave resonator |
| DE10124349A1 (de) | 2001-05-18 | 2002-12-05 | Infineon Technologies Ag | Piezoelektrische Resonatorvorrichtung mit Verstimmungsschichtfolge |
| JP4037825B2 (ja) * | 2001-07-30 | 2008-01-23 | インフィネオン テクノロジーズ アクチエンゲゼルシャフト | 音響反射器を備える圧電性共振器装置 |
| DE10251876B4 (de) * | 2002-11-07 | 2008-08-21 | Infineon Technologies Ag | BAW-Resonator mit akustischem Reflektor und Filterschaltung |
| JP4321754B2 (ja) * | 2003-07-31 | 2009-08-26 | Ｔｄｋ株式会社 | 圧電共振器およびそれを用いたフィルタ |
| US6946928B2 (en) * | 2003-10-30 | 2005-09-20 | Agilent Technologies, Inc. | Thin-film acoustically-coupled transformer |
| DE102004035812A1 (de) * | 2004-07-23 | 2006-03-16 | Epcos Ag | Mit akustischen Volumenwellen arbeitender Resonator |
| DE102005043034A1 (de) * | 2005-09-09 | 2007-03-15 | Siemens Ag | Vorrichtung und Verfahren zur Bewegung einer Flüssigkeit |
| US8089195B2 (en) | 2007-12-17 | 2012-01-03 | Resonance Semiconductor Corporation | Integrated acoustic bandgap devices for energy confinement and methods of fabricating same |
| WO2009088307A1 (en) * | 2008-01-09 | 2009-07-16 | Angelsen Bjoern A J | Multiple frequency band acoustic transducer arrays |
| CN101246162A (zh) * | 2008-03-12 | 2008-08-20 | 浙江大学 | 利用压电薄膜体声波器件的抗体检测生物芯片 |
| CN101277099A (zh) * | 2008-03-12 | 2008-10-01 | 浙江大学 | 适用于fbar的金属布拉格声波反射层结构 |
| US9735338B2 (en) * | 2009-01-26 | 2017-08-15 | Cymatics Laboratories Corp. | Protected resonator |
| FI123640B (fi) * | 2010-04-23 | 2013-08-30 | Teknologian Tutkimuskeskus Vtt | Laajakaistainen akustisesti kytketty ohutkalvo-BAW-suodin |
| US8810108B2 (en) | 2010-09-09 | 2014-08-19 | Georgia Tech Research Corporation | Multi-mode bulk-acoustic-wave resonators |
| CN103403538B (zh) | 2010-10-20 | 2016-06-01 | 快速诊断技术公司 | 利用共振传感器测量结合动力的装置和方法 |
| WO2012086441A1 (ja) * | 2010-12-24 | 2012-06-28 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
| JP5905677B2 (ja) * | 2011-08-02 | 2016-04-20 | 太陽誘電株式会社 | 圧電薄膜共振器およびその製造方法 |
| FI124732B (en) * | 2011-11-11 | 2014-12-31 | Teknologian Tutkimuskeskus Vtt | Lateral connected bulk wave filter with improved passband characteristics |
| US9219517B2 (en) | 2013-10-02 | 2015-12-22 | Triquint Semiconductor, Inc. | Temperature compensated bulk acoustic wave devices using over-moded acoustic reflector layers |
-
2016
- 2016-10-19 JP JP2018520475A patent/JP6916176B2/ja active Active
- 2016-10-19 EP EP16787698.6A patent/EP3365669B8/en active Active
- 2016-10-19 US US15/297,508 patent/US10193524B2/en active Active
- 2016-10-19 WO PCT/US2016/057653 patent/WO2017070177A1/en not_active Ceased
- 2016-10-19 CN CN201680075266.XA patent/CN108463720B/zh active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2018535595A5 (https=) | ||
| JP6065421B2 (ja) | 超音波プローブおよび超音波検査装置 | |
| JP6916176B2 (ja) | 音響振動のせん断モードおよび縦モードの反射を増強した共振器構造体 | |
| CN109314503B (zh) | 弹性波装置及其制造方法 | |
| US9508916B2 (en) | Ultrasonic transducer device, probe head, ultrasonic probe, electronic machine and ultrasonic diagnostic apparatus | |
| JP6417849B2 (ja) | 圧電共振器、及び圧電共振器の製造方法 | |
| US10326425B2 (en) | Acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response | |
| US10209224B2 (en) | Probe and object information acquisition apparatus using the same | |
| US10352904B2 (en) | Acoustic resonator devices and methods providing patterned functionalization areas | |
| CN1283547C (zh) | 减少声能横向传播的微加工的超声换能器和方法 | |
| US10330642B2 (en) | BAW sensor device with peel-resistant wall structure | |
| CN100566152C (zh) | 具有抑制体声波滤波器中通带波纹的装置的体声波谐振器 | |
| JPWO2020174640A1 (ja) | ソナー、超音波振動子 | |
| US20130255388A1 (en) | Probe and object information acquisition apparatus using the same | |
| US7716986B2 (en) | Acoustic wave sensing device integrated with micro-channels and method for the same | |
| US20230415198A1 (en) | Piezoelectric ultrasonic transducer and system | |
| WO2007086180A1 (ja) | 超音波探触子 | |
| Yaacob et al. | Modeling of circular piezoelectric micro ultrasonic transducer using CuAl10Ni5Fe4 on ZnO film for sonar applications | |
| US6774729B2 (en) | Composite-material vibrating device | |
| CN203071889U (zh) | 一种压电谐振器 | |
| JP6288235B2 (ja) | 超音波プローブおよび超音波検査装置 | |
| JP3937920B2 (ja) | 複合材料振動装置の製造方法 | |
| JP2017216728A5 (https=) | ||
| WO2025091157A1 (zh) | 显示面板及其制作方法、显示装置 | |
| JP2004048708A (ja) | 複合材料振動装置の特性調整方法及び複合材料振動装置 |