JP6916176B2 - 音響振動のせん断モードおよび縦モードの反射を増強した共振器構造体 - Google Patents
音響振動のせん断モードおよび縦モードの反射を増強した共振器構造体 Download PDFInfo
- Publication number
- JP6916176B2 JP6916176B2 JP2018520475A JP2018520475A JP6916176B2 JP 6916176 B2 JP6916176 B2 JP 6916176B2 JP 2018520475 A JP2018520475 A JP 2018520475A JP 2018520475 A JP2018520475 A JP 2018520475A JP 6916176 B2 JP6916176 B2 JP 6916176B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- acoustic impedance
- acoustic
- electrode
- material layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 claims description 213
- 230000004044 response Effects 0.000 claims description 48
- 239000007787 solid Substances 0.000 claims description 39
- 238000002834 transmittance Methods 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 33
- 238000009826 distribution Methods 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 289
- 230000005540 biological transmission Effects 0.000 description 37
- 239000013545 self-assembled monolayer Substances 0.000 description 35
- 239000002094 self assembled monolayer Substances 0.000 description 30
- 229910004298 SiO 2 Inorganic materials 0.000 description 19
- 230000009870 specific binding Effects 0.000 description 16
- 239000012530 fluid Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 14
- 239000000126 substance Substances 0.000 description 14
- 230000000903 blocking effect Effects 0.000 description 12
- 230000006870 function Effects 0.000 description 12
- 239000007788 liquid Substances 0.000 description 12
- 239000004020 conductor Substances 0.000 description 11
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 10
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- 150000001282 organosilanes Chemical class 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000000231 atomic layer deposition Methods 0.000 description 8
- 230000000875 corresponding effect Effects 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 238000010030 laminating Methods 0.000 description 6
- 150000003573 thiols Chemical class 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000003475 lamination Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000872 buffer Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009871 nonspecific binding Effects 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 241000894007 species Species 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- GWOLZNVIRIHJHB-UHFFFAOYSA-N 11-mercaptoundecanoic acid Chemical compound OC(=O)CCCCCCCCCCS GWOLZNVIRIHJHB-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 102000004169 proteins and genes Human genes 0.000 description 3
- 108090000623 proteins and genes Proteins 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 241000700605 Viruses Species 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000027455 binding Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- IIRDTKBZINWQAW-UHFFFAOYSA-N hexaethylene glycol Chemical compound OCCOCCOCCOCCOCCOCCO IIRDTKBZINWQAW-UHFFFAOYSA-N 0.000 description 2
- 239000003446 ligand Substances 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002493 microarray Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- SLYCYWCVSGPDFR-UHFFFAOYSA-N octadecyltrimethoxysilane Chemical compound CCCCCCCCCCCCCCCCCC[Si](OC)(OC)OC SLYCYWCVSGPDFR-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000010970 precious metal Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- DCQBZYNUSLHVJC-UHFFFAOYSA-N 3-triethoxysilylpropane-1-thiol Chemical compound CCO[Si](OCC)(OCC)CCCS DCQBZYNUSLHVJC-UHFFFAOYSA-N 0.000 description 1
- 108091003079 Bovine Serum Albumin Proteins 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- OBNDGIHQAIXEAO-UHFFFAOYSA-N [O].[Si] Chemical compound [O].[Si] OBNDGIHQAIXEAO-UHFFFAOYSA-N 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 239000000427 antigen Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005842 biochemical reaction Methods 0.000 description 1
- 230000008512 biological response Effects 0.000 description 1
- 229940098773 bovine serum albumin Drugs 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 125000003636 chemical group Chemical group 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229910001848 post-transition metal Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 210000002966 serum Anatomy 0.000 description 1
- 125000005372 silanol group Chemical group 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- CCIDWXHLGNEQSL-UHFFFAOYSA-N undecane-1-thiol Chemical compound CCCCCCCCCCCS CCIDWXHLGNEQSL-UHFFFAOYSA-N 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/0681—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure
- B06B1/0685—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure on the back only of piezoelectric elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
- G10K11/04—Acoustic filters ; Acoustic resonators
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/24—Methods or devices for transmitting, conducting or directing sound for conducting sound through solid bodies, e.g. wires
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/012—Phase angle
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Multimedia (AREA)
- Mechanical Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
本出願は、2015年10月21日に出願した仮特許出願番号62/244,284の権利を主張し、同仮特許出願番号の開示内容は参照によりその全体が本明細書に組み込まれる。
本開示は、共振器構造体、特に、音響振動のせん断モードおよび縦モードを反射する共振器構造体に関する。
本明細書に組み込まれその一部となっている添付図面は本開示のいくつかの側面を説明し、本文と共に本開示の原理を説明するのに役立つ。
Claims (11)
- ソリッドマウント共振器構造体(solidly mounted resonator structure)であって、
基板と;
前記基板上に配置され、順次配置された複数の差動音響インピーダンス層単位を含む音響反射構造体であって、ここで前記順次配置された複数の差動音響インピーダンス層単位の各差動音響インピーダンス層単位は、高音響インピーダンス材料層と接触した低音響インピーダンス材料層を含む、音響反射構造体と;
前記音響反射構造体の少なくとも一部を覆うように配置されている少なくとも1つの第1電極構造体と;
前記少なくとも1つの第1電極構造体を覆うように配置されている圧電材料層と;
前記圧電材料層の少なくとも一部を覆うように配置されている少なくとも1つの第2電極構造体と、
を含み、
ここで、前記圧電材料層の少なくとも一部は前記少なくとも1つの第1電極構造体と前記少なくとも1つの第2電極構造体との間に配置され、少なくとも1つの活性領域を形成し;
前記ソリッドマウント共振器構造体は、前記少なくとも1つの活性領域で縦成分とせん断成分とを含む音波を変換するように構成され、それによって前記圧電材料層は縦応答の第1および第2高調波共振を示し、かつ、せん断応答の第1、第2および第3高調波共振を示し;及び、
前記縦応答の前記第2高調波共振の最小透過率に対応する周波数が、前記せん断応答の前記第3高調波共振の最小透過率に対応する周波数と実質的に合致する、
ソリッドマウント共振器構造体。 - 前記縦応答の前記第2高調波共振の最小透過率に対応する前記周波数が、前記せん断応答の前記第3高調波共振の最小透過率に対応する前記周波数の約5%以内である、請求項1に記載のソリッドマウント共振器構造体。
- 前記音響反射構造体は第1、第2および第3の低音響インピーダンス材料層を含み、かつ、第1および第2の高音響インピーダンス材料層を含む、請求項1に記載のソリッドマウント共振器構造体。
- 前記圧電材料層は、前記基板の一面からの法線に対し大部分が非平行の配向分布を有するC軸を含む、六方晶構造の圧電材料を含む、請求項1に記載のソリッドマウント共振器構造体。
- 前記音波は縦波長λLを含み;
各差動音響インピーダンス層単位の前記低音響インピーダンス材料層は0.73λL〜0.82λLの範囲の厚さを有し;
各差動音響インピーダンス層単位の前記高音響インピーダンス材料層は0.13λL〜0.19λLの範囲の厚さを有する、請求項1に記載のソリッドマウント共振器構造体。 - 前記音響反射構造体は少なくとも2つの順次配置された差動音響インピーダンス層単位と、少なくとも1つの追加の低音響インピーダンス材料層とを含む、請求項5に記載のソリッドマウント共振器構造体。
- 各差動音響インピーダンス層単位において、前記高音響インピーダンス材料層は、前記低音響インピーダンス材料層の音響インピーダンスよりも少なくとも2.5倍大きい音響インピーダンスを含む、請求項1に記載のソリッドマウント共振器構造体。
- 前記基板は、裏面と前記音響反射構造体の間に配置されており、前記裏面は、裏面音響反射を減少または除去するように構成された粗表面を含む、請求項1に記載のソリッドマウント共振器構造体。
- 前記少なくとも1つの第1電極構造体は複数の第1電極構造体を含み;
前記少なくとも1つの第2電極構造体は複数の第2電極構造体を含み;
前記ソリッドマウント共振器構造体の第1の部分は、前記複数の第1電極構造体の1つの第1電極構造体と前記複数の第2電極構造体の1つの第2電極構造体との間に配置された第1の活性領域を含む、第1のソリッドマウントバルク音波共振器装置を含み;及び、
前記ソリッドマウント共振器構造体の第2の部分は、前記複数の第1電極構造体のもう1つの第1電極構造体と前記複数の第2電極構造体のもう1つの第2電極構造体との間に配置された第2の活性領域を含む、第2のソリッドマウントバルク音波共振器装置を含む、
請求項1に記載のソリッドマウント共振器構造体。 - 請求項9に記載の前記ソリッドマウント共振器構造体から得られるソリッドマウントバルク音波共振チップ。
- 請求項10に記載の前記ソリッドマウントバルク音波共振チップを組み込んだセンサーまたはマイクロ流体装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562244284P | 2015-10-21 | 2015-10-21 | |
US62/244,284 | 2015-10-21 | ||
PCT/US2016/057653 WO2017070177A1 (en) | 2015-10-21 | 2016-10-19 | Resonator structure with enhanced reflection of shear and longitudinal modes of acoustic vibrations |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2018535595A JP2018535595A (ja) | 2018-11-29 |
JP2018535595A5 JP2018535595A5 (ja) | 2021-04-08 |
JP6916176B2 true JP6916176B2 (ja) | 2021-08-11 |
Family
ID=57206457
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018520475A Active JP6916176B2 (ja) | 2015-10-21 | 2016-10-19 | 音響振動のせん断モードおよび縦モードの反射を増強した共振器構造体 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10193524B2 (ja) |
EP (1) | EP3365669B8 (ja) |
JP (1) | JP6916176B2 (ja) |
CN (1) | CN108463720B (ja) |
WO (1) | WO2017070177A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017111448B4 (de) * | 2017-05-24 | 2022-02-10 | RF360 Europe GmbH | SAW-Vorrichtung mit unterdrückten Störmodensignalen |
TW201938834A (zh) | 2018-03-09 | 2019-10-01 | 美商蝴蝶網路公司 | 超音波換能器裝置以及用於製造超音波換能器裝置的方法 |
DE102019115589A1 (de) | 2018-07-17 | 2020-01-23 | Ii-Vi Delaware, Inc. | Elektrodenbegrenzter resonator |
US11750169B2 (en) | 2018-07-17 | 2023-09-05 | Ii-Vi Delaware, Inc. | Electrode-defined unsuspended acoustic resonator |
DE102018132920B4 (de) * | 2018-12-19 | 2020-08-06 | RF360 Europe GmbH | Elektroakustischer Resonator und Verfahren zu seiner Herstellung |
CN109870504A (zh) * | 2019-01-16 | 2019-06-11 | 东南大学 | 一种用于液体检测的微流通道声波传感器 |
TWI810698B (zh) * | 2019-06-12 | 2023-08-01 | 美商特拉華公司 | 電極界定未懸掛之聲波共振器 |
CN111351848B (zh) * | 2020-03-19 | 2020-10-16 | 山东科技大学 | 一种传感器的制备方法、传感器以及传感器的检测方法 |
CN112350680A (zh) * | 2020-10-20 | 2021-02-09 | 中芯集成电路(宁波)有限公司 | 一种薄膜声波谐振器及其制造方法 |
CN112953449A (zh) * | 2021-03-04 | 2021-06-11 | 偲百创(深圳)科技有限公司 | 横向激励剪切模式的声学谐振器的制造方法 |
WO2023189103A1 (ja) * | 2022-03-28 | 2023-10-05 | 日本碍子株式会社 | 複合基板、弾性表面波素子および複合基板の製造方法 |
CN116346080A (zh) * | 2023-02-15 | 2023-06-27 | 上海馨欧集成微电有限公司 | 一种声表面波滤波器 |
CN117097283B (zh) * | 2023-10-13 | 2024-01-30 | 广州市艾佛光通科技有限公司 | 一种固态装配型谐振器制作方法及固态装配型谐振器 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4640756A (en) * | 1983-10-25 | 1987-02-03 | The United States Of America As Represented By The United States Department Of Energy | Method of making a piezoelectric shear wave resonator |
DE10124349A1 (de) * | 2001-05-18 | 2002-12-05 | Infineon Technologies Ag | Piezoelektrische Resonatorvorrichtung mit Verstimmungsschichtfolge |
WO2003012988A2 (de) * | 2001-07-30 | 2003-02-13 | Infineon Technologies Ag | Piezoelektrische resonatorvorrichtung mit akustischem reflektor |
DE10251876B4 (de) * | 2002-11-07 | 2008-08-21 | Infineon Technologies Ag | BAW-Resonator mit akustischem Reflektor und Filterschaltung |
JP4321754B2 (ja) * | 2003-07-31 | 2009-08-26 | Tdk株式会社 | 圧電共振器およびそれを用いたフィルタ |
US6946928B2 (en) * | 2003-10-30 | 2005-09-20 | Agilent Technologies, Inc. | Thin-film acoustically-coupled transformer |
DE102004035812A1 (de) * | 2004-07-23 | 2006-03-16 | Epcos Ag | Mit akustischen Volumenwellen arbeitender Resonator |
DE102005043034A1 (de) * | 2005-09-09 | 2007-03-15 | Siemens Ag | Vorrichtung und Verfahren zur Bewegung einer Flüssigkeit |
US8089195B2 (en) * | 2007-12-17 | 2012-01-03 | Resonance Semiconductor Corporation | Integrated acoustic bandgap devices for energy confinement and methods of fabricating same |
CN101965232B (zh) * | 2008-01-09 | 2014-04-23 | 海浪科技有限公司 | 多频带声学换能器阵列 |
CN101277099A (zh) * | 2008-03-12 | 2008-10-01 | 浙江大学 | 适用于fbar的金属布拉格声波反射层结构 |
CN101246162A (zh) * | 2008-03-12 | 2008-08-20 | 浙江大学 | 利用压电薄膜体声波器件的抗体检测生物芯片 |
US9735338B2 (en) * | 2009-01-26 | 2017-08-15 | Cymatics Laboratories Corp. | Protected resonator |
FI123640B (fi) * | 2010-04-23 | 2013-08-30 | Teknologian Tutkimuskeskus Vtt | Laajakaistainen akustisesti kytketty ohutkalvo-BAW-suodin |
US8810108B2 (en) * | 2010-09-09 | 2014-08-19 | Georgia Tech Research Corporation | Multi-mode bulk-acoustic-wave resonators |
WO2012054758A2 (en) | 2010-10-20 | 2012-04-26 | Rapid Diagnostek, Inc. | Apparatus and method for measuring binding kinetics with a resonating sensor |
WO2012086441A1 (ja) * | 2010-12-24 | 2012-06-28 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
JP5905677B2 (ja) * | 2011-08-02 | 2016-04-20 | 太陽誘電株式会社 | 圧電薄膜共振器およびその製造方法 |
FI124732B (en) * | 2011-11-11 | 2014-12-31 | Teknologian Tutkimuskeskus Vtt | Laterally connected bulk wave filter with improved passband characteristics |
US9219517B2 (en) * | 2013-10-02 | 2015-12-22 | Triquint Semiconductor, Inc. | Temperature compensated bulk acoustic wave devices using over-moded acoustic reflector layers |
-
2016
- 2016-10-19 US US15/297,508 patent/US10193524B2/en active Active
- 2016-10-19 CN CN201680075266.XA patent/CN108463720B/zh active Active
- 2016-10-19 WO PCT/US2016/057653 patent/WO2017070177A1/en active Application Filing
- 2016-10-19 EP EP16787698.6A patent/EP3365669B8/en active Active
- 2016-10-19 JP JP2018520475A patent/JP6916176B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
EP3365669A1 (en) | 2018-08-29 |
CN108463720A (zh) | 2018-08-28 |
WO2017070177A1 (en) | 2017-04-27 |
EP3365669B8 (en) | 2024-03-13 |
US10193524B2 (en) | 2019-01-29 |
EP3365669B1 (en) | 2023-08-23 |
US20170117872A1 (en) | 2017-04-27 |
JP2018535595A (ja) | 2018-11-29 |
CN108463720B (zh) | 2021-03-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6916176B2 (ja) | 音響振動のせん断モードおよび縦モードの反射を増強した共振器構造体 | |
JP6912463B2 (ja) | バルク音波(baw)共振器と基板を貫通する流体ビアを有するセンサー装置 | |
US11695384B2 (en) | Acoustic resonator device with controlled placement of functionalization material | |
US10352904B2 (en) | Acoustic resonator devices and methods providing patterned functionalization areas | |
US10326425B2 (en) | Acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response | |
JP6898344B2 (ja) | 増加した動的測定範囲を有するbawセンサー流体装置 | |
JP6882280B2 (ja) | 音響共振器装置、ならびに気密性および表面機能化を提供する製造方法 | |
US10458982B2 (en) | Fluidic device including BAW resonators along opposing channel surfaces | |
US11353428B2 (en) | BAW sensor device with peel-resistant wall structure | |
US10812045B2 (en) | BAW sensor with enhanced surface area active region | |
US11940415B2 (en) | Fluidic device with fluid port orthogonal to functionalized active region |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191018 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200722 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200825 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20201120 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20210225 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210615 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210715 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6916176 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |