JP2023073317A5 - - Google Patents

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Publication number
JP2023073317A5
JP2023073317A5 JP2023043722A JP2023043722A JP2023073317A5 JP 2023073317 A5 JP2023073317 A5 JP 2023073317A5 JP 2023043722 A JP2023043722 A JP 2023043722A JP 2023043722 A JP2023043722 A JP 2023043722A JP 2023073317 A5 JP2023073317 A5 JP 2023073317A5
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JP
Japan
Prior art keywords
readable medium
vacuum pump
computer
gas
loadlock chamber
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JP2023043722A
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English (en)
Japanese (ja)
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JP2023073317A (ja
JP7608500B2 (ja
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Priority claimed from PCT/EP2019/068637 external-priority patent/WO2020016087A1/en
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Publication of JP2023073317A publication Critical patent/JP2023073317A/ja
Publication of JP2023073317A5 publication Critical patent/JP2023073317A5/ja
Priority to JP2024221528A priority Critical patent/JP2025041727A/ja
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Publication of JP7608500B2 publication Critical patent/JP7608500B2/ja
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JP2023043722A 2018-07-17 2023-03-20 粒子ビーム検査装置 Active JP7608500B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024221528A JP2025041727A (ja) 2018-07-17 2024-12-18 粒子ビーム検査装置

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201862699643P 2018-07-17 2018-07-17
US62/699,643 2018-07-17
US201962869986P 2019-07-02 2019-07-02
US62/869,986 2019-07-02
PCT/EP2019/068637 WO2020016087A1 (en) 2018-07-17 2019-07-11 Particle beam inspection apparatus
JP2020572986A JP7296410B2 (ja) 2018-07-17 2019-07-11 粒子ビーム検査装置

Related Parent Applications (1)

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JP2020572986A Division JP7296410B2 (ja) 2018-07-17 2019-07-11 粒子ビーム検査装置

Related Child Applications (1)

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JP2024221528A Division JP2025041727A (ja) 2018-07-17 2024-12-18 粒子ビーム検査装置

Publications (3)

Publication Number Publication Date
JP2023073317A JP2023073317A (ja) 2023-05-25
JP2023073317A5 true JP2023073317A5 (enExample) 2023-07-18
JP7608500B2 JP7608500B2 (ja) 2025-01-06

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ID=67297162

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2020572986A Active JP7296410B2 (ja) 2018-07-17 2019-07-11 粒子ビーム検査装置
JP2023043722A Active JP7608500B2 (ja) 2018-07-17 2023-03-20 粒子ビーム検査装置
JP2024221528A Pending JP2025041727A (ja) 2018-07-17 2024-12-18 粒子ビーム検査装置

Family Applications Before (1)

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JP2020572986A Active JP7296410B2 (ja) 2018-07-17 2019-07-11 粒子ビーム検査装置

Family Applications After (1)

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JP2024221528A Pending JP2025041727A (ja) 2018-07-17 2024-12-18 粒子ビーム検査装置

Country Status (6)

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US (4) US11430678B2 (enExample)
JP (3) JP7296410B2 (enExample)
KR (4) KR20250057069A (enExample)
CN (2) CN112424922A (enExample)
TW (5) TWI738028B (enExample)
WO (1) WO2020016087A1 (enExample)

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CN118922925A (zh) * 2022-03-11 2024-11-08 Asml荷兰有限公司 包括温度调节板的真空腔系统
US20250379075A1 (en) * 2022-08-05 2025-12-11 Asml Netherlands B.V. High-throughput load lock chamber
CN115020308B (zh) * 2022-08-08 2022-11-22 上海果纳半导体技术有限公司武汉分公司 晶圆传输装置、设备平台系统及其晶圆传输方法

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