JP2022545091A5 - - Google Patents
Info
- Publication number
- JP2022545091A5 JP2022545091A5 JP2022511079A JP2022511079A JP2022545091A5 JP 2022545091 A5 JP2022545091 A5 JP 2022545091A5 JP 2022511079 A JP2022511079 A JP 2022511079A JP 2022511079 A JP2022511079 A JP 2022511079A JP 2022545091 A5 JP2022545091 A5 JP 2022545091A5
- Authority
- JP
- Japan
- Prior art keywords
- copper
- layer
- conductive
- multilayer substrate
- iron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19192196.4 | 2019-08-19 | ||
| EP19192196 | 2019-08-19 | ||
| PCT/EP2020/073186 WO2021032776A1 (en) | 2019-08-19 | 2020-08-19 | Method of preparing a high density interconnect printed circuit board including microvias filled with copper |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022545091A JP2022545091A (ja) | 2022-10-25 |
| JP2022545091A5 true JP2022545091A5 (https=) | 2023-08-29 |
Family
ID=67659208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022511079A Pending JP2022545091A (ja) | 2019-08-19 | 2020-08-19 | 銅で充填されたマイクロビアを含む高密度相互接続プリント回路基板の製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US12245383B2 (https=) |
| EP (1) | EP4018791A1 (https=) |
| JP (1) | JP2022545091A (https=) |
| KR (2) | KR102875198B1 (https=) |
| CN (1) | CN114303447A (https=) |
| TW (1) | TWI886142B (https=) |
| WO (1) | WO2021032776A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI816388B (zh) * | 2021-05-17 | 2023-09-21 | 美商麥克達米德恩索龍股份有限公司 | 在印刷電路板或其它基板上填充穿孔的單步電解法 |
| KR20230067984A (ko) | 2021-11-10 | 2023-05-17 | (주)티에스이 | 극미세 비아를 포함하는 다층 회로 기판의 제조 방법 및 이에 의해 제조된 다층 회로 기판 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4344387C2 (de) | 1993-12-24 | 1996-09-05 | Atotech Deutschland Gmbh | Verfahren zur elektrolytischen Abscheidung von Kupfer und Anordnung zur Durchführung des Verfahrens |
| DE19545231A1 (de) * | 1995-11-21 | 1997-05-22 | Atotech Deutschland Gmbh | Verfahren zur elektrolytischen Abscheidung von Metallschichten |
| EP1921902B1 (en) * | 1996-12-19 | 2011-03-02 | Ibiden Co., Ltd. | Multilayered printed circuit board |
| JPH10190224A (ja) * | 1996-12-27 | 1998-07-21 | Ibiden Co Ltd | 多層プリント配線板およびその製造方法 |
| MY144503A (en) * | 1998-09-14 | 2011-09-30 | Ibiden Co Ltd | Printed circuit board and method for its production |
| JP2001267726A (ja) * | 2000-03-22 | 2001-09-28 | Toyota Autom Loom Works Ltd | 配線基板の電解メッキ方法及び配線基板の電解メッキ装置 |
| TW561805B (en) * | 2001-05-16 | 2003-11-11 | Unimicron Technology Corp | Fabrication method of micro-via |
| DE102004005300A1 (de) * | 2004-01-29 | 2005-09-08 | Atotech Deutschland Gmbh | Verfahren zum Behandeln von Trägermaterial zur Herstellung von Schltungsträgern und Anwendung des Verfahrens |
| KR100867038B1 (ko) * | 2005-03-02 | 2008-11-04 | 삼성전기주식회사 | 커패시터 내장형 인쇄회로기판 및 그 제조방법 |
| US7765691B2 (en) * | 2005-12-28 | 2010-08-03 | Intel Corporation | Method and apparatus for a printed circuit board using laser assisted metallization and patterning of a substrate |
| DE502007005345D1 (de) | 2006-03-30 | 2010-11-25 | Atotech Deutschland Gmbh | Elektrolytisches verfahren zum füllen von löchern und vertiefungen mit metallen |
| US20080053688A1 (en) * | 2006-09-01 | 2008-03-06 | Samsung Electro-Mechanics Co., Ltd. | Printed circuit board and method of manufacturing the same |
| KR100843367B1 (ko) * | 2007-03-06 | 2008-07-03 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
| KR100969439B1 (ko) * | 2008-05-07 | 2010-07-14 | 삼성전기주식회사 | 랜드리스 비아를 갖는 인쇄회로기판의 제조방법 |
| JP5447935B2 (ja) * | 2008-10-28 | 2014-03-19 | 日立化成株式会社 | 三層配線基板およびその製造方法 |
| CN101790288B (zh) * | 2009-01-22 | 2012-08-29 | 上海美维科技有限公司 | 一种印制电路板的制造方法 |
| US20100206737A1 (en) | 2009-02-17 | 2010-08-19 | Preisser Robert F | Process for electrodeposition of copper chip to chip, chip to wafer and wafer to wafer interconnects in through-silicon vias (tsv) |
| CN101711095A (zh) * | 2009-04-16 | 2010-05-19 | 深圳市精诚达电路有限公司 | Hdi挠性电路板镀铜填孔工艺 |
| TWI400025B (zh) * | 2009-12-29 | 2013-06-21 | Subtron Technology Co Ltd | 線路基板及其製作方法 |
| EP2518187A1 (en) * | 2011-04-26 | 2012-10-31 | Atotech Deutschland GmbH | Aqueous acidic bath for electrolytic deposition of copper |
| JP2013030605A (ja) * | 2011-07-28 | 2013-02-07 | Fujikura Ltd | 貫通孔を有する構造体の製造方法、及びプリント配線板の製造方法 |
| CN103179806B (zh) * | 2011-12-21 | 2019-05-28 | 奥特斯有限公司 | 组合的通孔镀覆和孔填充的方法 |
| JP2013153051A (ja) * | 2012-01-25 | 2013-08-08 | Tokuyama Corp | メタライズドセラミックスビア基板及びその製造方法 |
| KR101332079B1 (ko) * | 2012-03-29 | 2013-11-22 | 삼성전기주식회사 | 다층 인쇄회로기판 제조 방법 및 이에 따라 제조된 다층 인쇄회로기판 |
| EP2645830B1 (en) * | 2012-03-29 | 2014-10-08 | Atotech Deutschland GmbH | Method for manufacture of fine line circuitry |
| JP2014154800A (ja) * | 2013-02-13 | 2014-08-25 | Shinko Electric Ind Co Ltd | 配線基板及びその製造方法 |
| CN104066281B (zh) * | 2014-07-04 | 2017-10-27 | 华进半导体封装先导技术研发中心有限公司 | 奇数层基板的制造方法和奇数层基板 |
| TWI618821B (zh) * | 2017-04-21 | 2018-03-21 | 萬億股份有限公司 | 製造印刷電路板線路的方法 |
-
2020
- 2020-08-19 KR KR1020227008837A patent/KR102875198B1/ko active Active
- 2020-08-19 US US17/636,502 patent/US12245383B2/en active Active
- 2020-08-19 JP JP2022511079A patent/JP2022545091A/ja active Pending
- 2020-08-19 CN CN202080057843.9A patent/CN114303447A/zh active Pending
- 2020-08-19 WO PCT/EP2020/073186 patent/WO2021032776A1/en not_active Ceased
- 2020-08-19 TW TW109128287A patent/TWI886142B/zh active
- 2020-08-19 EP EP20756872.6A patent/EP4018791A1/en active Pending
- 2020-08-19 KR KR1020257034248A patent/KR20250151620A/ko active Pending
-
2024
- 2024-06-18 US US18/746,837 patent/US12439528B2/en active Active
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