JP2022520956A - 真空チャンバ内への光ファイバ使用光送給 - Google Patents
真空チャンバ内への光ファイバ使用光送給 Download PDFInfo
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- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
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- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
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- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency
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- Computer Vision & Pattern Recognition (AREA)
- Automation & Control Theory (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Laser Beam Processing (AREA)
- Laser Surgery Devices (AREA)
- Electric Cable Installation (AREA)
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- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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Abstract
Description
本願では、2019年2月15日付米国仮特許出願第62/806208号に基づく優先権を主張し、参照によりその開示内容を本願に繰り入れる。
Claims (19)
- 真空チャンバと、
前記真空チャンバ内に配置されておりウェハを固持しうるよう構成されているステージと、
前記真空チャンバ外に配置されたレーザ光源と、
前記レーザ光源により生成された光の波長全てを、前記真空チャンバの壁を通じその真空チャンバ内へと伝達する光ファイバと、
消色兼偏向ユニットと、
を備える装置。 - 請求項1に記載の装置であって、更に、前記ステージに電子ビームを差し向ける電子ビーム源を備える装置。
- 請求項1に記載の装置であって、前記光ファイバにより伝達される光の波長が200nm~2000nmである装置。
- 請求項1に記載の装置であって、前記レーザ光源が複数個のレーザ及び複数個のダイクロイックミラーを有する装置。
- 請求項1に記載の装置であって、前記レーザ光源が、更に、複数個のレーザ、偏向依存性ビームスプリッタ及び複数枚の半波長板を有する装置。
- 請求項1に記載の装置であって、前記光ファイバがマルチモードファイバである装置。
- 請求項1に記載の装置であって、前記光ファイバがシングルモードファイバである装置。
- 請求項1に記載の装置であって、更に、前記真空チャンバ内に配置されており前記光ファイバから前記光を受け取る波長板を備える装置。
- 請求項8に記載の装置であって、前記波長板が半波長板又は1/4波長板である装置。
- 請求項1に記載の装置であって、前記消色兼偏向ユニットが、
前記真空チャンバ内に配置されており前記光ファイバから前記光を受け取る旋回鏡であり、その光ファイバからの光を前記ステージに差し向けるよう構成されている旋回鏡と、
前記真空チャンバ内に配置された少なくとも1個の消色レンズであり、前記光ファイバから受け取った光を平行光化し及び/又はその光による像を前記ウェハ上に形成するよう構成されている消色レンズと、
を有する装置。 - 請求項1に記載の装置であって、前記消色兼偏向ユニットが湾曲鏡を有し、その湾曲鏡が球面鏡又は放物面鏡である装置。
- 請求項1に記載の装置であって、前記レーザ光源からの光が複数通りの波長を有する装置。
- 請求項1に記載の装置であって、更に、前記光ファイバを取り巻くフランジを備え、そのフランジが前記真空チャンバの壁内に配置されており、そのフランジが、
前記光ファイバの周りに配置された外部材と、
前記光ファイバ・前記外部材間に配置されたポリマ層であり、径方向圧縮されてハーメチックシールを形成するポリマ層と、
を有する装置。 - 請求項13に記載の装置であって、前記光ファイバ・前記外部材間の前記ハーメチックシールが、更に、金属対金属シールを用いるものである装置。
- 請求項1に記載の装置であって、更に、前記光ファイバを取り巻くフランジを備え、そのフランジが前記真空チャンバの壁内に配置されており、そのフランジがエラストマシールであり、そのエラストマシールが径方向圧縮されてハーメチックシールを形成する装置。
- レーザ光源からの光を光ファイバ経由で真空チャンバに差し向けることで、その光ファイバによって、そのレーザ光源により生成された光の波長全てを、その真空チャンバの壁を通じその真空チャンバ内へと伝達させ、
前記真空チャンバ内の消色兼偏向ユニットにその光を差し向け、
前記真空チャンバ内に配置されたステージ上で固持されているウェハにその光を差し向ける方法。 - 請求項16に記載の方法であって、更に、前記真空チャンバ内の電子ビームを前記ウェハに差し向ける方法。
- 請求項16に記載の方法であって、前記光の波長が200nm~2000nmである方法。
- 請求項16に記載の方法であって、前記消色兼偏向ユニットが旋回鏡又は湾曲鏡を有する方法。
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JP2023198809A JP2024026162A (ja) | 2019-02-15 | 2023-11-24 | 真空チャンバ内への光ファイバ使用光送給 |
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US201962806208P | 2019-02-15 | 2019-02-15 | |
US62/806,208 | 2019-02-15 | ||
US16/691,843 US11302590B2 (en) | 2019-02-15 | 2019-11-22 | Delivery of light into a vacuum chamber using an optical fiber |
US16/691,843 | 2019-11-22 | ||
PCT/US2019/063810 WO2020167361A1 (en) | 2019-02-15 | 2019-11-28 | Delivery of light into a vacuum chamber using an optical fiber |
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JP2023198809A Pending JP2024026162A (ja) | 2019-02-15 | 2023-11-24 | 真空チャンバ内への光ファイバ使用光送給 |
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Country | Link |
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US (1) | US11302590B2 (ja) |
EP (1) | EP3891539A4 (ja) |
JP (2) | JP2022520956A (ja) |
KR (1) | KR20210119544A (ja) |
CN (1) | CN113396348A (ja) |
DE (1) | DE112019006860T5 (ja) |
IL (1) | IL285051B2 (ja) |
SG (1) | SG11202108313VA (ja) |
TW (1) | TWI827780B (ja) |
WO (1) | WO2020167361A1 (ja) |
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US11035899B2 (en) * | 2019-05-15 | 2021-06-15 | Globalfoundries Singapore Pte. Ltd. | System for detection of passive voltage contrast |
TWI787970B (zh) * | 2021-08-24 | 2022-12-21 | 佳必琪國際股份有限公司 | 光收發模組之消光比測試系統及光收發模組之消光比測試方法 |
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TWI827780B (zh) | 2024-01-01 |
US20200266116A1 (en) | 2020-08-20 |
JP2024026162A (ja) | 2024-02-28 |
IL285051A (en) | 2021-09-30 |
IL285051B2 (en) | 2023-08-01 |
EP3891539A1 (en) | 2021-10-13 |
CN113396348A (zh) | 2021-09-14 |
SG11202108313VA (en) | 2021-08-30 |
IL285051B1 (en) | 2023-04-01 |
WO2020167361A1 (en) | 2020-08-20 |
EP3891539A4 (en) | 2023-01-04 |
TW202043754A (zh) | 2020-12-01 |
US11302590B2 (en) | 2022-04-12 |
DE112019006860T5 (de) | 2021-11-25 |
KR20210119544A (ko) | 2021-10-05 |
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