IL285051A - Delivery of light into a vacuum chamber using an optical fiber - Google Patents
Delivery of light into a vacuum chamber using an optical fiberInfo
- Publication number
- IL285051A IL285051A IL285051A IL28505121A IL285051A IL 285051 A IL285051 A IL 285051A IL 285051 A IL285051 A IL 285051A IL 28505121 A IL28505121 A IL 28505121A IL 285051 A IL285051 A IL 285051A
- Authority
- IL
- Israel
- Prior art keywords
- delivery
- light
- optical fiber
- vacuum chamber
- vacuum
- Prior art date
Links
- 239000013307 optical fiber Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
- G01R31/2653—Contactless testing using electron beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
- G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2706—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters
- G02B6/2713—Optical coupling means with polarisation selective and adjusting means as bulk elements, i.e. free space arrangements external to a light guide, e.g. polarising beam splitters cascade of polarisation selective or adjusting operations
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/27—Optical coupling means with polarisation selective and adjusting means
- G02B6/2753—Optical coupling means with polarisation selective and adjusting means characterised by their function or use, i.e. of the complete device
- G02B6/276—Removing selected polarisation component of light, i.e. polarizers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
- G02B6/29362—Serial cascade of filters or filtering operations, e.g. for a large number of channels
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4248—Feed-through connections for the hermetical passage of fibres through a package wall
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/16—Vessels
- H01J2237/166—Sealing means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Power Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Automation & Control Theory (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Laser Beam Processing (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Laser Surgery Devices (AREA)
- Electric Cable Installation (AREA)
- Glass Compositions (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962806208P | 2019-02-15 | 2019-02-15 | |
US16/691,843 US11302590B2 (en) | 2019-02-15 | 2019-11-22 | Delivery of light into a vacuum chamber using an optical fiber |
PCT/US2019/063810 WO2020167361A1 (en) | 2019-02-15 | 2019-11-28 | Delivery of light into a vacuum chamber using an optical fiber |
Publications (3)
Publication Number | Publication Date |
---|---|
IL285051A true IL285051A (en) | 2021-09-30 |
IL285051B1 IL285051B1 (en) | 2023-04-01 |
IL285051B2 IL285051B2 (en) | 2023-08-01 |
Family
ID=72042255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL285051A IL285051B2 (en) | 2019-02-15 | 2021-07-22 | Delivery of light into a vacuum chamber using an optical fiber |
Country Status (10)
Country | Link |
---|---|
US (1) | US11302590B2 (en) |
EP (1) | EP3891539A4 (en) |
JP (2) | JP2022520956A (en) |
KR (1) | KR20210119544A (en) |
CN (1) | CN113396348A (en) |
DE (1) | DE112019006860T5 (en) |
IL (1) | IL285051B2 (en) |
SG (1) | SG11202108313VA (en) |
TW (1) | TWI827780B (en) |
WO (1) | WO2020167361A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11035899B2 (en) * | 2019-05-15 | 2021-06-15 | Globalfoundries Singapore Pte. Ltd. | System for detection of passive voltage contrast |
CN114616643A (en) * | 2019-10-24 | 2022-06-10 | Asml荷兰有限公司 | Charged particle inspection system and method using multi-wavelength charge controller |
TWI787970B (en) * | 2021-08-24 | 2022-12-21 | 佳必琪國際股份有限公司 | Extinction ratio testing system for optical transceiver module and extinction ratio testing method for optical transceiver module |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
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US4593970A (en) | 1983-05-25 | 1986-06-10 | Conax Buffalo Corporation | Fiber optic feedthrough module, and method of making same |
JPS61180492A (en) | 1985-02-05 | 1986-08-13 | Matsushita Electric Ind Co Ltd | Semiconductor laser device with optical fiber |
US4902967A (en) | 1989-05-18 | 1990-02-20 | The United States Of America As Represented By The Secretary Of The Navy | Scanning electron microscopy by photovoltage contrast imaging |
JP3709950B2 (en) * | 1996-04-25 | 2005-10-26 | 日本精工株式会社 | Sphere surface inspection device |
US5937115A (en) | 1997-02-12 | 1999-08-10 | Foster-Miller, Inc. | Switchable optical components/structures and methods for the fabrication thereof |
TWI282909B (en) | 1999-12-23 | 2007-06-21 | Asml Netherlands Bv | Lithographic apparatus and a method for manufacturing a device |
US6788724B2 (en) | 2001-07-06 | 2004-09-07 | Intel Corporation | Hermetically sealed external cavity laser system and method |
GB0119176D0 (en) | 2001-08-06 | 2001-09-26 | Ocuity Ltd | Optical switching apparatus |
US6744502B2 (en) | 2001-09-28 | 2004-06-01 | Pe Corporation (Ny) | Shaped illumination geometry and intensity using a diffractive optical element |
US7327922B2 (en) | 2001-10-09 | 2008-02-05 | Crystal Fibre A/S | Hermetically sealed optical fibre with voids or holes, method of its production, and its use |
US7436867B2 (en) | 2002-11-27 | 2008-10-14 | Intel Corporation | Hermetically sealed external cavity laser system and method |
US7612321B2 (en) | 2004-10-12 | 2009-11-03 | Dcg Systems, Inc. | Optical coupling apparatus for a dual column charged particle beam tool for imaging and forming silicide in a localized manner |
US7884024B2 (en) | 2005-02-24 | 2011-02-08 | Dcg Systems, Inc. | Apparatus and method for optical interference fringe based integrated circuit processing |
JP2010096554A (en) * | 2008-10-15 | 2010-04-30 | Hitachi High-Technologies Corp | Heightening of sensitivity of method for detecting defect |
CN101483307A (en) | 2009-02-03 | 2009-07-15 | 江西师范大学 | Polarization related outputting multiple wavelength and passive mode locking optical fiber laser |
JP2011127529A (en) * | 2009-12-18 | 2011-06-30 | National Institutes Of Natural Sciences | Solid-state laser device for engine ignition by semiconductor laser excitation |
CN201946871U (en) | 2010-12-10 | 2011-08-24 | 杭州恒川科技有限公司 | Switchable multi-wavelength fiber laser and device based on polarization-maintaining fiber grating |
EP2699831A4 (en) * | 2011-04-18 | 2016-02-17 | Afl Telecommunications Llc | Tube seal |
KR101294145B1 (en) * | 2011-11-04 | 2013-08-16 | (주)마이크로모션텍 | Spatial phase shifting interferometer using multiwavelength |
JP6111617B2 (en) * | 2012-07-03 | 2017-04-12 | 株式会社リコー | Laser radar equipment |
CN103575662B (en) * | 2012-08-09 | 2016-05-04 | 北京智朗芯光科技有限公司 | optical measuring system |
JP2015102341A (en) * | 2013-11-21 | 2015-06-04 | 横河電機株式会社 | Laser device |
JP2015125424A (en) * | 2013-12-27 | 2015-07-06 | キヤノン株式会社 | Optical device, lithography device and manufacturing method of article |
DE102014004619A1 (en) | 2014-03-29 | 2015-10-01 | Gea Bock Gmbh | Control for refrigeration system, as well as refrigeration system and corresponding control method |
US9711950B2 (en) | 2015-05-13 | 2017-07-18 | Trumpf Laser Gmbh | Dense wavelength beam combining with variable feedback control |
JP2018098307A (en) * | 2016-12-09 | 2018-06-21 | 株式会社フジクラ | Fiber laser device |
WO2019039584A1 (en) * | 2017-08-24 | 2019-02-28 | 国立大学法人名古屋大学 | Light generating device, and carbon isotope analyzing device and carbon isotope analyzing method employing same |
US11035899B2 (en) * | 2019-05-15 | 2021-06-15 | Globalfoundries Singapore Pte. Ltd. | System for detection of passive voltage contrast |
-
2019
- 2019-11-22 US US16/691,843 patent/US11302590B2/en active Active
- 2019-11-28 JP JP2021547437A patent/JP2022520956A/en active Pending
- 2019-11-28 WO PCT/US2019/063810 patent/WO2020167361A1/en unknown
- 2019-11-28 DE DE112019006860.1T patent/DE112019006860T5/en active Pending
- 2019-11-28 KR KR1020217029660A patent/KR20210119544A/en unknown
- 2019-11-28 CN CN201980091237.6A patent/CN113396348A/en active Pending
- 2019-11-28 SG SG11202108313VA patent/SG11202108313VA/en unknown
- 2019-11-28 EP EP19915483.2A patent/EP3891539A4/en active Pending
-
2020
- 2020-01-08 TW TW109100540A patent/TWI827780B/en active
-
2021
- 2021-07-22 IL IL285051A patent/IL285051B2/en unknown
-
2023
- 2023-11-24 JP JP2023198809A patent/JP2024026162A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US11302590B2 (en) | 2022-04-12 |
US20200266116A1 (en) | 2020-08-20 |
WO2020167361A1 (en) | 2020-08-20 |
KR20210119544A (en) | 2021-10-05 |
SG11202108313VA (en) | 2021-08-30 |
DE112019006860T5 (en) | 2021-11-25 |
IL285051B2 (en) | 2023-08-01 |
JP2022520956A (en) | 2022-04-04 |
JP2024026162A (en) | 2024-02-28 |
IL285051B1 (en) | 2023-04-01 |
EP3891539A1 (en) | 2021-10-13 |
EP3891539A4 (en) | 2023-01-04 |
CN113396348A (en) | 2021-09-14 |
TWI827780B (en) | 2024-01-01 |
TW202043754A (en) | 2020-12-01 |
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