JP2022515882A - ディスプレイパネル及びその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 90
- 229910052751 metal Inorganic materials 0.000 claims abstract description 56
- 239000002184 metal Substances 0.000 claims abstract description 56
- 238000000034 method Methods 0.000 claims abstract description 31
- 239000010409 thin film Substances 0.000 claims abstract description 15
- 239000010408 film Substances 0.000 claims description 46
- 238000004549 pulsed laser deposition Methods 0.000 claims description 12
- 238000001741 metal-organic molecular beam epitaxy Methods 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 238000007740 vapor deposition Methods 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 239000012790 adhesive layer Substances 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 6
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 238000000313 electron-beam-induced deposition Methods 0.000 claims description 5
- 239000002042 Silver nanowire Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 abstract 1
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
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- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
Description
100 ディスプレイパネル
110 基板
120 マイクロLED
130 スイチング回路
140 上部電極
150 駆動回路部
160 下部電極
170 金属連結パターン
Claims (16)
- マイクロLEDディスプレイのためのディスプレイパネルの製造方法において、
基板、前記基板の上面に形成された複数のマイクロLED、前記基板の上面に形成されて前記マイクロLEDを制御するスイチング回路、前記スイチング回路の端部に対応して前記基板の上面一側に形成された複数の上部電極、前記基板の底面に形成された駆動回路部、及び前記駆動回路部に対応して前記基板の底面一側に形成された複数の下部電極を提供する段階と、
前記上部電極と前記下部電極を連結する連結スリットが形成された第1マスクを前記基板の上面、側面及び底面を経由するように形成する段階と、
前記第1マスクが形成された前記基板の外面に金属薄膜を形成する段階と、及び
前記第1マスクをとり除いて前記上部電極と前記下部電極を引き継ぐ金属連結パターンを前記基板に形成する段階と、を含むディスプレイパネルの製造方法。 - 前記金属薄膜を形成する段階以前に、前記基板のうちで前記第1マスクに対応する領域以外の領域をカバーする第2マスクを形成する段階をさらに含むことを特徴とする請求項1に記載のディスプレイパネルの製造方法。
- 前記第2マスクは前記第1マスクを形成する前、形成すると同時、または形成した以後に形成されることを特徴とする請求項2に記載のディスプレイパネルの製造方法。
- 前記第1マスクは感光性フィルムを利用して形成されることを特徴とする請求項1に記載のディスプレイパネルの製造方法。
- 前記感光性フィルムはDFR(Dry Film Photoresist)フィルムであることを特徴とする請求項4に記載のディスプレイパネルの製造方法。
- 前記第1マスクを形成する段階は、前記連結スリットに対応するように前記感光性フィルムをポジティブまたはネガティブで露光し、前記感光性フィルムから前記連結スリットに対応する部分をとり除いて前記連結スリットを形成し、前記連結スリットが形成された前記感光性フィルムを前記基板の上面、側面及び底面を経由するように付着することを特徴とする請求項4に記載のディスプレイパネルの製造方法。
- 前記第1マスクを形成する段階は、前記感光性フィルムを前記基板の上面、側面及び底面を経由するように付着し、前記連結スリットに対応するように前記感光性フィルムをポジティブまたはネガティブで露光し、前記感光性フィルムから前記連結スリットに対応する部分をとり除いて前記連結スリットを形成することを特徴とする請求項4に記載のディスプレイパネルの製造方法。
- 前記感光性フィルムは5~100μmの厚さで形成されることを特徴とする請求項4に記載のディスプレイパネルの製造方法。
- 前記金属薄膜はスパッタリング、化学気相蒸着、パルスレーザー蒸着(PLD;Pulsed Laser Deposition)、電子ビーム蒸着(E-beam evaporation)、熱蒸着(Thermal evaporation)、またはMOMBE(Metal-Organic Molecular Beam Epitaxy)によって形成されることを特徴とする請求項1に記載のディスプレイパネルの製造方法。
- 前記金属連結パターンに対応して前記基板の上面、側面及び底面を同時に覆う保護フィルムを付着する段階をさらに含むことを特徴とする請求項1に記載のディスプレイパネルの製造方法。
- 前記上部電極または前記下部電極のうちで少なくとも一つは、シルバーペースト、二硫化モリブデン(MoS2)、メタルメッシュまたはシルバーナノワイヤを利用して形成されることを特徴とする請求項1に記載のディスプレイパネルの製造方法。
- 基板、前記基板の上面に形成された複数のマイクロLED、前記基板の上面に形成されて前記マイクロLEDを制御するスイチング回路、前記スイチング回路の端部に対応して前記基板の上面一側に形成された複数の上部電極、前記基板の底面に形成された駆動回路部、及び前記駆動回路部に対応して前記基板の底面一側に形成された複数の下部電極を含むディスプレイパネルにおいて、
前記基板の側面を経由して前記上部電極と前記下部電極を引き継ぐ複数の金属連結パターンを含んで、
それぞれの前記金属連結パターンは前記上部電極それぞれに対応する第1端部及び前記下部電極それぞれに対応する第2端部を含むが、前記第1端部は前記上部電極の上面を覆って、前記第2端部は前記下部電極の底面を覆うことを特徴とするディスプレイパネル。 - 前記金属連結パターンの前記第1端部及び前記上部電極の間及び前記第2端部及び前記下部電極の間に接着層が存在しないことを特徴とする請求項12に記載のディスプレイパネル。
- 前記金属連結パターンはスパッタリング、化学気相蒸着、パルスレーザー蒸着(PLD;Pulsed Laser Deposition)、電子ビーム蒸着(E-beam evaporation)、熱蒸着(Thermal evaporation)またはMOMBE(Metal-Organic Molecular Beam Epitaxy)によって形成されることを特徴とする請求項12に記載のディスプレイパネル。
- 前記上部電極または前記下部電極のうちで少なくとも一つは、シルバーペースト、二硫化モリブデン(MoS2)、メタルメッシュまたはシルバーナノワイヤを利用して形成されることを特徴とする請求項12に記載のディスプレイパネル。
- 前記基板はTFTガラス基板であることを特徴とする請求項12に記載のディスプレイパネル。
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