JP2021506719A - 接合セラミック及びその製造方法 - Google Patents
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Abstract
Description
グレーンの大きさが約10μmであり、厚さが2mmである炭化ケイ素2枚の接合面を研磨し、研磨面が向かい合うように積層し、2000℃の温度と10kg/cm2の荷重で10時間維持した。
グレーンの大きさが3mmであり、厚さが2mmである炭化ケイ素2枚の接合面を研磨し、研磨面が向かい合うように積層し、2000℃の温度と10kg/cm2の荷重で10時間維持した。
Claims (14)
- 第1セラミック基材と、
第2セラミック基材と、を含み、
前記第1セラミック基材及び前記第2セラミック基材は、接着層なしに接合されたものであり、
前記第1セラミック基材と前記第2セラミック基材の接合面に沿って形成された0.01μm〜50μmの大きさの気孔を含む、
接合セラミック。 - 前記第1セラミック基材及び前記第2セラミック基材にわたって位置するグレーンを含む、請求項1に記載の接合セラミック。
- 前記第1セラミック基材及び前記第2セラミック基材にわたって位置するグレーンの大きさは、0.1μm〜100μmである、請求項1に記載の接合セラミック。
- 前記第1セラミック基材及び第2セラミック基材は、それぞれ炭化ケイ素(SiC)、窒化ケイ素(SiN4)、酸化アルミニウム(Al2O3)、窒化アルミニウム(AlN)、酸化ジルコニウム(ZrO2)、酸化ケイ素(SiO2)、ZTA(Zirconia Toughened Alumina)、酸化マグネシウム(MgO)、菫青石、ムライト及びコーディエライトからなる群から選択された少なくとも1つを含む、請求項1に記載の接合セラミック。
- 前記第1セラミック基材及び前記第2セラミック基材は、同一物質であり、
異種物質フリーである、請求項1に記載の接合セラミック。 - 複数のセラミック基材をさらに含み、
前記複数のセラミック基材は、前記第1セラミック基材又は第2セラミック基材上に接着層なしに積層されて接合されたものである、請求項1に記載の接合セラミック。 - 前記第1セラミック基材及び第2セラミック基材は、それぞれ1mm〜100mmの厚さを有する、請求項1に記載の接合セラミック。
- 前記接合セラミック全体の厚さは2mm〜200mmである、請求項1に記載の接合セラミック。
- バルク(bulk)の単一セラミック基材対比70%以上の強度を有する、請求項1に記載の接合セラミック。
- 第1セラミック基材の一面及び第2セラミック基材の一面を研磨するステップと、
前記研磨した第1セラミック基材の一面及び前記研磨した第2セラミック基材の一面に接するように接合するステップと、
を含む、接合セラミックの製造方法。 - 前記接合するステップにおいて、前記第1セラミック基材及び前記第2セラミック基材にわたって位置するグレーンが形成される、請求項10に記載の接合セラミックの製造方法。
- 前記第1セラミック基材と前記第2セラミック基材にわたって形成されるグレーンの大きさは、0.1μm〜100μmである、請求項11に記載の接合セラミックの製造方法。
- 前記接合するステップは、
前記第1セラミック基材の溶融温度の60%〜90%の温度範囲と前記第2セラミック基材の溶融温度の60%〜90%の温度範囲の重複温度範囲内で行われ、
0.1kg/cm2〜100kg/cm2の圧力条件で行われる、請求項10に記載の接合セラミックの製造方法。 - 請求項1に記載の接合セラミック、又は請求項10に記載の接合セラミックの製造方法によって製造された接合セラミックは、
航空宇宙産業の反射鏡、透視窓及び半導体産業のウェハー固定用真空チャックからなる群から選択された少なくとも1つに適用される、接合セラミックを含む部品。
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KR1020170175077A KR102069423B1 (ko) | 2017-12-19 | 2017-12-19 | 접합 세라믹 및 이의 제조방법 |
KR10-2017-0175077 | 2017-12-19 | ||
PCT/KR2018/014501 WO2019124778A1 (ko) | 2017-12-19 | 2018-11-23 | 접합 세라믹 및 이의 제조방법 |
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US (1) | US11390566B2 (ja) |
JP (1) | JP2021506719A (ja) |
KR (1) | KR102069423B1 (ja) |
CN (1) | CN111448174B (ja) |
WO (1) | WO2019124778A1 (ja) |
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CN100381401C (zh) * | 2003-06-13 | 2008-04-16 | 株式会社德山 | 氮化铝接合体及其制造方法 |
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KR101233129B1 (ko) * | 2007-03-14 | 2013-02-15 | 생-고벵 아브라시프 | 연마지석 제품 및 그의 제조방법 |
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JP2016069207A (ja) * | 2014-09-29 | 2016-05-09 | 京セラ株式会社 | セラミック流路体およびこれを備える熱交換器 |
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KR101960264B1 (ko) * | 2017-03-10 | 2019-03-20 | 서울시립대학교 산학협력단 | 잔류응력이 없는 탄화규소 접합체 및 그 제조방법 |
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CN111448174B (zh) | 2021-06-18 |
US20200331812A1 (en) | 2020-10-22 |
WO2019124778A1 (ko) | 2019-06-27 |
CN111448174A (zh) | 2020-07-24 |
KR20190073863A (ko) | 2019-06-27 |
KR102069423B1 (ko) | 2020-01-22 |
US11390566B2 (en) | 2022-07-19 |
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