JP2021143417A - 可変温度調節装置を備えた金属−酸化物電子ビーム蒸発源 - Google Patents
可変温度調節装置を備えた金属−酸化物電子ビーム蒸発源 Download PDFInfo
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
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- Mechanical Engineering (AREA)
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- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
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- Clinical Laboratory Science (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
Description
110:るつぼ
120、121、122:加熱部
130:ポケット
140:制御部
150:検査部
Claims (5)
- 電子ビームが直接走査される金属酸化物からなる蒸着物質を保管するるつぼと、
前記るつぼの外側部に備えられ、前記るつぼをN個の領域に区分し、前記各N個の領域別に備えられるN個の加熱部と、
前記電子ビームが走査される領域と走査されていない領域の温度差を小さくするために、前記るつぼの上側領域は下側領域より高い温度を維持するように前記N個の加熱部を制御する制御部と、を含む、可変温度調節装置を備えた金属−酸化物電子ビーム蒸発源。 - 前記N個の加熱部は,
前記るつぼの外側部の上側に備えられて第1領域を加熱する第1加熱部と、
前記るつぼの外側部の下側に備えられて第2領域を加熱する第2加熱部と、
前記るつぼの下部面に備えられて第3領域を加熱する第3加熱部と、を含む、請求項1に記載の可変温度調節装置を備えた金属−酸化物電子ビーム蒸発源。 - 前記制御部は、
前記各N個の領域別の温度差が設定された温度以下となるように前記N個の加熱部を制御する請求項1に記載の可変温度調節装置を備えた金属−酸化物電子ビーム蒸発源。 - 前記電子ビームの走査により前記金属酸化物からなる蒸着物質の形状が変化することを検出する検査部をさらに含み、
前記制御部は、
前記金属酸化物からなる蒸着物質が変化する形状に応じて前記N個の領域別の温度が変わるように前記N個の加熱部を制御する請求項1に記載の可変温度調節装置を備えた金属−酸化物電子ビーム蒸発源。 - 前記るつぼの外側部を囲い、前記N個の加熱部及び前記制御部を内部に備えるポケットをさらに含む、請求項1に記載の可変温度調節装置を備えた金属−酸化物電子ビーム蒸発源。
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KR10-2020-0030215 | 2020-03-11 | ||
KR1020200030215A KR102319130B1 (ko) | 2020-03-11 | 2020-03-11 | 가변 온도조절 장치를 구비한 금속-산화물 전자빔 증발원 |
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JP7206244B2 JP7206244B2 (ja) | 2023-01-17 |
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JP (1) | JP7206244B2 (ja) |
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- 2020-03-11 KR KR1020200030215A patent/KR102319130B1/ko active IP Right Grant
- 2020-11-27 JP JP2020197378A patent/JP7206244B2/ja active Active
- 2020-11-27 CN CN202011355840.1A patent/CN113388816B/zh active Active
- 2020-11-27 US US17/105,743 patent/US11692260B2/en active Active
Patent Citations (6)
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JPS5970769A (ja) * | 1982-10-13 | 1984-04-21 | Nec Home Electronics Ltd | 蒸着方法 |
JPH0297666A (ja) * | 1988-10-05 | 1990-04-10 | Toshiba Corp | 金属蒸気発生装置 |
JPH09143694A (ja) * | 1995-11-14 | 1997-06-03 | Ishikawajima Harima Heavy Ind Co Ltd | 真空蒸着装置のルツボ加熱方法 |
JPH09143685A (ja) * | 1995-11-22 | 1997-06-03 | Ishikawajima Harima Heavy Ind Co Ltd | 連続真空蒸着装置用るつぼの割れ防止方法 |
JP2015067847A (ja) * | 2013-09-27 | 2015-04-13 | 株式会社日立ハイテクファインシステムズ | 真空蒸着装置 |
JP2020193368A (ja) * | 2019-05-28 | 2020-12-03 | キヤノントッキ株式会社 | 加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法 |
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US11692260B2 (en) | 2023-07-04 |
CN113388816B (zh) | 2023-06-20 |
CN113388816A (zh) | 2021-09-14 |
KR20210114729A (ko) | 2021-09-24 |
US20210285088A1 (en) | 2021-09-16 |
KR102319130B1 (ko) | 2021-10-29 |
JP7206244B2 (ja) | 2023-01-17 |
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