JP2020536389A - 有機前駆体を使用した遠隔のプラズマによる、シリコンと炭素とを含有する膜の表面処理 - Google Patents
有機前駆体を使用した遠隔のプラズマによる、シリコンと炭素とを含有する膜の表面処理 Download PDFInfo
- Publication number
- JP2020536389A JP2020536389A JP2020519129A JP2020519129A JP2020536389A JP 2020536389 A JP2020536389 A JP 2020536389A JP 2020519129 A JP2020519129 A JP 2020519129A JP 2020519129 A JP2020519129 A JP 2020519129A JP 2020536389 A JP2020536389 A JP 2020536389A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- surface treatment
- chamber
- treatment process
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004381 surface treatment Methods 0.000 title claims abstract description 98
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 title claims abstract description 7
- 239000012528 membrane Substances 0.000 title claims description 27
- 239000002243 precursor Substances 0.000 title description 21
- 238000000034 method Methods 0.000 claims abstract description 235
- 230000008569 process Effects 0.000 claims abstract description 158
- 229930195733 hydrocarbon Natural products 0.000 claims abstract description 69
- 150000002430 hydrocarbons Chemical class 0.000 claims abstract description 69
- 239000004215 Carbon black (E152) Substances 0.000 claims abstract description 66
- 239000000463 material Substances 0.000 claims abstract description 50
- 239000000203 mixture Substances 0.000 claims abstract description 48
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000010703 silicon Substances 0.000 claims abstract description 33
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 33
- 239000007789 gas Substances 0.000 claims description 70
- 238000000926 separation method Methods 0.000 claims description 44
- 150000002500 ions Chemical class 0.000 claims description 33
- 238000009616 inductively coupled plasma Methods 0.000 claims description 19
- 238000001914 filtration Methods 0.000 claims description 18
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 239000011261 inert gas Substances 0.000 claims description 14
- 125000006850 spacer group Chemical group 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 239000001307 helium Substances 0.000 claims description 8
- 229910052734 helium Inorganic materials 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- 238000010494 dissociation reaction Methods 0.000 claims description 6
- 230000005593 dissociations Effects 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 6
- 230000011987 methylation Effects 0.000 claims description 5
- 238000007069 methylation reaction Methods 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 238000002156 mixing Methods 0.000 claims description 4
- 239000003989 dielectric material Substances 0.000 abstract description 39
- 150000003254 radicals Chemical class 0.000 description 78
- 239000010408 film Substances 0.000 description 30
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 239000011148 porous material Substances 0.000 description 17
- -1 acyclic alkane Chemical class 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 14
- 239000010949 copper Substances 0.000 description 11
- 239000002245 particle Substances 0.000 description 11
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 10
- QEGNUYASOUJEHD-UHFFFAOYSA-N 1,1-dimethylcyclohexane Chemical compound CC1(C)CCCCC1 QEGNUYASOUJEHD-UHFFFAOYSA-N 0.000 description 8
- ODNRTOSCFYDTKF-UHFFFAOYSA-N 1,3,5-trimethylcyclohexane Chemical compound CC1CC(C)CC(C)C1 ODNRTOSCFYDTKF-UHFFFAOYSA-N 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 8
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 8
- QQONPFPTGQHPMA-UHFFFAOYSA-N Propene Chemical compound CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 8
- 230000007935 neutral effect Effects 0.000 description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 8
- 238000005538 encapsulation Methods 0.000 description 6
- 230000006698 induction Effects 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- 238000009832 plasma treatment Methods 0.000 description 6
- 229910008051 Si-OH Inorganic materials 0.000 description 5
- 229910006358 Si—OH Inorganic materials 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 4
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 4
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 4
- 239000005977 Ethylene Substances 0.000 description 4
- 150000001335 aliphatic alkanes Chemical class 0.000 description 4
- 150000001336 alkenes Chemical class 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 150000001924 cycloalkanes Chemical class 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 4
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000001294 propane Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000006884 silylation reaction Methods 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 229910052724 xenon Inorganic materials 0.000 description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000001311 chemical methods and process Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 125000000753 cycloalkyl group Chemical group 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- WCYWZMWISLQXQU-UHFFFAOYSA-N methyl Chemical compound [CH3] WCYWZMWISLQXQU-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/3003—Hydrogenation or deuterisation, e.g. using atomic hydrogen from a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/12—Gaseous compositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32422—Arrangement for selecting ions or species in the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32743—Means for moving the material to be treated for introducing the material into processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32899—Multiple chambers, e.g. cluster tools
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02167—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon carbide not containing oxygen, e.g. SiC, SiC:H or silicon carbonitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02252—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by plasma treatment, e.g. plasma oxidation of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
- H01L21/02315—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02321—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment introduction of substances into an already existing insulating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
- H01L21/0234—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31058—After-treatment of organic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/006—Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Formation Of Insulating Films (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
Description
本出願は、2017年10月3日に出願された“Surface Treatment of Silicon and Carbon Containing Films by Remote Plasma with Organic Precursors”という表題の米国仮出願番号第62/567295号明細書の優先権を主張する、2018年4月20日に出願された“Surface Treatment Of Silicon And Carbon Containing Films By Remote Plasma With Organic Precursors”という表題の米国特許出願番号第15/958635号明細書の優先権を主張するものであり、同明細書は、あらゆる目的で参照によって本明細書に組み込まれる。
本開示は、概して、半導体被加工物のような基板の表面処理に関する。
炭素を含有する低誘電率(low−k)誘電体材料は、半導体デバイスの製造においてますます使用されるようになっている。例えば、SiOCNは、高度な半導体デバイスの基板工程(front-end-of-line:FEOL)用途におけるスペーサ材料として使用され得る。SiOCは、配線工程(back-end-of-line:BEOL)用途における相互接続誘電体として使用され得る。
本開示の実施形態の態様および利点は、部分的に以下の説明に記載されるか、または以下の説明から把握され得るか、もしくは実施形態の実施を通じて把握され得る。
本明細書には、当業者に向けられた実施形態の詳細な説明が記載されており、本明細書は、添付の図面を参照する。
以下では、複数の実施形態が詳細に参照され、これらの実施形態のうちの1つまたは複数の例が図面に図示されている。それぞれの例は、本開示を限定するものとして提供されているのではなく、実施形態を説明するものとして提供されている。実際に、当業者には、本開示の範囲または精神から逸脱することなく、これらの実施形態に種々の修正および変更を加えることができることが明らかであろう。例えば、或る1つの実施形態の一部として図示または説明されている特徴を、別の実施形態と共に使用して、さらに別の実施形態を生み出すことができる。したがって、本開示の態様は、そのような修正および変更を含むことが意図されている。
Claims (30)
- 被加工物を処理するための方法であって、
前記被加工物は、シリコンと炭素とを含有する膜材料とを含み、
当該方法は、前記シリコンと炭素とを含有する膜材料に対して有機ラジカルベースの表面処理プロセスを実施するステップを含み、
前記有機ラジカルベースの表面処理プロセスは、
第1のチャンバ内で1つまたは複数の種を生成するステップと、
1つまたは複数の有機ラジカルを含む混合物を生成するために、1つまたは複数の炭化水素分子を前記種と混合するステップと、
第2のチャンバ内で前記被加工物上の前記シリコンと炭素とを含有する層を前記混合物に曝すステップと、
を含む、
方法。 - 前記有機ラジカルベースの表面処理プロセスは、前記シリコンと炭素とを含有する膜材料上の少なくとも一部のメチル化を結果的に生じさせる、請求項1記載の方法。
- 前記シリコンと炭素とを含有する膜材料は、酸素を含む、請求項1記載の方法。
- 前記膜材料は、約1%〜約50%の多孔度を有する、請求項1記載の方法。
- 前記シリコンと炭素とを含有する膜材料は、窒素を含む、請求項1記載の方法。
- 前記シリコンと炭素とを含有する膜材料は、基板工程用途において形成されるスペーサ構造の少なくとも一部として使用される、請求項1記載の方法。
- 前記シリコンと炭素とを含有する膜材料は、配線工程用途において形成される相互接続構造の少なくとも一部として使用される、請求項1記載の方法。
- 前記1つまたは複数の炭化水素分子は、CnH2n+2の化学式を有し、
nは、1以上かつ10以下である、
請求項1記載の方法。 - 前記1つまたは複数の炭化水素分子は、CnH2nの化学式を有し、
nは、2以上かつ10以下である、
請求項1記載の方法。 - 前記1つまたは複数の炭化水素分子を、前記第1のチャンバ内で前記種と混合する、請求項1記載の方法。
- 前記1つまたは複数の炭化水素分子を、前記第1のチャンバ内で前記種と混合する、請求項1記載の方法。
- 当該方法は、
前記表面処理プロセスを実施した後、前記第1のチャンバ内でプラズマを生成するステップと、
前記第2のチャンバから前記被加工物を取り外すステップと、
を含む、請求項1記載の方法。 - 前記表面処理プロセスを実施した後、前記第1のチャンバ内でプラズマを生成するステップは、1つまたは複数の酸素ラジカルを生成するステップを含む、請求項12記載の方法。
- 前記1つまたは複数の有機ラジカルは、CH3ラジカルを含む、請求項1記載の方法。
- 当該方法は、前記第1のチャンバ内のプラズマから生成された1つまたは複数のラジカルを使用して、乾式ストリッププロセスを実施するステップを含む、請求項1記載の方法。
- 前記1つまたは複数の種を、誘導結合プラズマ源を使用して、前記第1のチャンバ内のプロセスガスからのプラズマ中で生成する、請求項1記載の方法。
- 前記プロセスガスは、不活性ガスである、請求項16記載の方法。
- 前記不活性ガスは、ヘリウムである、請求項17記載の方法。
- 前記プロセスガスは、水素ガスを含み、
前記種は、水素ラジカルを含む、
請求項16記載の方法。 - 前記種は、加熱されたフィラメントを使用して生成された1つまたは複数の水素ラジカルを含む、請求項1記載の方法。
- 前記1つまたは複数の有機ラジカルを、分子の熱分解を使用して、またはUVアシストによる分子解離を使用して生成する、請求項1記載の方法。
- 前記第1のチャンバを前記第2のチャンバから分離する分離グリッドを使用して、フィルタリングされた混合物を生成するために、プラズマによって生成された1つまたは複数のイオンをフィルタリングするステップを含む、請求項16記載の方法。
- 被加工物を処理するための方法であって、
前記被加工物は、シリコンと炭素とを含有する膜材料を含み、
当該方法は、有機ラジカルベースの表面処理プロセスによって前記被加工物を処理するステップを含み、
前記表面処理プロセスは、
プラズマ処理装置のプラズマチャンバ内で生成されたプラズマを使用して、プロセスガスから1つまたは複数の種を生成するステップと、
混合物を生成するために、1つまたは複数の炭化水素分子を前記種と混合するステップと、
前記プラズマチャンバから分離されている処理チャンバ内で前記被加工物を前記混合物に曝すステップと、
を含む、
方法。 - 前記プロセスガスは、不活性ガスである、請求項23記載の方法。
- 前記プロセスガスは、水素を含む、請求項23記載の方法。
- 当該方法は、有機ラジカルを用いた第2の表面処理プロセスによって前記被加工物を処理するステップを含む、請求項23記載の方法。
- 前記第2の表面処理プロセスは、
プラズマ処理装置のプラズマチャンバ内で生成されたプラズマを使用して、プロセスガスから1つまたは複数の種を生成するステップと、
混合物を生成するために、1つまたは複数の炭化水素分子を前記種と混合するステップと、
前記プラズマチャンバから分離されている処理チャンバ内で前記被加工物を前記混合物に曝すステップと、
を含む、請求項26記載の方法。 - 前記第2の表面処理プロセスの前記1つまたは複数の炭化水素分子は、前記表面処理プロセスの前記1つまたは複数の炭化水素分子とは異なる、請求項27記載の方法。
- 前記第2の表面処理プロセスのプラズマを、前記表面処理プロセスにおいて誘導結合プラズマ源に供給される電力とは異なる電力を使用して生成する、請求項27記載の方法。
- 前記第2の表面処理プロセスを、前記表面処理プロセスとは異なる圧力または異なる温度で実施する、請求項27記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762567295P | 2017-10-03 | 2017-10-03 | |
US62/567,295 | 2017-10-03 | ||
US15/958,635 | 2018-04-20 | ||
US15/958,635 US10804109B2 (en) | 2017-10-03 | 2018-04-20 | Surface treatment of silicon and carbon containing films by remote plasma with organic precursors |
PCT/US2018/051714 WO2019070404A1 (en) | 2017-10-03 | 2018-09-19 | SURFACE TREATMENT OF FILMS CONTAINING SILICON AND CARBON BY REMOTE PLASMA WITH ORGANIC PRECURSORS |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020536389A true JP2020536389A (ja) | 2020-12-10 |
JP6991324B2 JP6991324B2 (ja) | 2022-02-03 |
Family
ID=65896836
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020519129A Active JP6991324B2 (ja) | 2017-10-03 | 2018-09-19 | 有機前駆体を使用した遠隔のプラズマによる、シリコンと炭素とを含有する膜の表面処理 |
JP2020519055A Active JP6991323B2 (ja) | 2017-10-03 | 2018-09-19 | 有機ラジカルを使用した炭素含有膜の表面処理 |
JP2020519096A Active JP7021344B2 (ja) | 2017-10-03 | 2018-09-19 | 有機ラジカルを使用したシリコンまたはシリコンゲルマニウム表面の表面処理 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020519055A Active JP6991323B2 (ja) | 2017-10-03 | 2018-09-19 | 有機ラジカルを使用した炭素含有膜の表面処理 |
JP2020519096A Active JP7021344B2 (ja) | 2017-10-03 | 2018-09-19 | 有機ラジカルを使用したシリコンまたはシリコンゲルマニウム表面の表面処理 |
Country Status (6)
Country | Link |
---|---|
US (5) | US10269574B1 (ja) |
JP (3) | JP6991324B2 (ja) |
KR (3) | KR20200039815A (ja) |
CN (3) | CN111433896B (ja) |
TW (3) | TWI743396B (ja) |
WO (3) | WO2019070403A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019240930A1 (en) | 2018-06-11 | 2019-12-19 | Mattson Technology, Inc. | Generation of hydrogen reactive species for processing of workpieces |
US11495456B2 (en) | 2018-10-15 | 2022-11-08 | Beijing E-Town Semiconductor Technology, Co., Ltd | Ozone for selective hydrophilic surface treatment |
CN112335017A (zh) | 2018-11-16 | 2021-02-05 | 玛特森技术公司 | 腔室上光以通过减少化学成分改善刻蚀均匀性 |
US10403492B1 (en) * | 2018-12-11 | 2019-09-03 | Mattson Technology, Inc. | Integration of materials removal and surface treatment in semiconductor device fabrication |
WO2020131989A1 (en) | 2018-12-21 | 2020-06-25 | Mattson Technology, Inc. | Surface smoothing of workpieces |
KR102342124B1 (ko) * | 2019-02-14 | 2021-12-22 | 주식회사 히타치하이테크 | 반도체 제조 장치 |
WO2020223326A1 (en) * | 2019-04-30 | 2020-11-05 | Mattson Technology, Inc. | Selective deposition using methylation treatment |
CN110335802B (zh) * | 2019-07-11 | 2022-03-22 | 北京北方华创微电子装备有限公司 | 预清洗腔室及其过滤装置 |
US11189464B2 (en) * | 2019-07-17 | 2021-11-30 | Beijing E-town Semiconductor Technology Co., Ltd. | Variable mode plasma chamber utilizing tunable plasma potential |
CN110491760B (zh) * | 2019-08-23 | 2020-09-15 | 江苏鲁汶仪器有限公司 | 一种法拉第清洗装置及等离子体处理系统 |
CN112771649B (zh) * | 2019-08-28 | 2022-04-19 | 玛特森技术公司 | 用于使用氟自由基处理工件的方法 |
CN110349830B (zh) | 2019-09-09 | 2020-02-14 | 北京北方华创微电子装备有限公司 | 等离子体系统以及应用于等离子体系统的过滤装置 |
JP2023538031A (ja) * | 2020-08-20 | 2023-09-06 | アプライド マテリアルズ インコーポレイテッド | 窒化チタン膜の処理方法 |
CN113471046B (zh) * | 2020-12-14 | 2023-06-20 | 北京屹唐半导体科技股份有限公司 | 具有等离子体处理系统和热处理系统的工件处理装置 |
CN113488367A (zh) * | 2020-12-14 | 2021-10-08 | 北京屹唐半导体科技股份有限公司 | 具有等离子体处理系统和热处理系统的工件处理装置 |
EP4068000A1 (en) * | 2021-03-30 | 2022-10-05 | ASML Netherlands B.V. | Conditioning apparatus and method |
KR102585950B1 (ko) * | 2021-05-24 | 2023-10-05 | 성균관대학교산학협력단 | 그리드 및 기판의 전위 제어를 이용한 건식 식각 방법 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003332317A (ja) * | 2002-05-16 | 2003-11-21 | Japan Steel Works Ltd:The | プラズマを用いたレジスト剥離装置及び方法 |
JP2008277812A (ja) * | 2007-04-19 | 2008-11-13 | Applied Materials Inc | 水蒸気及び希釈ガスにより改善された水素アッシング |
JP2009158610A (ja) * | 2007-12-25 | 2009-07-16 | Taiyo Nippon Sanso Corp | 絶縁膜のダメージ回復処理方法 |
JP2011253832A (ja) * | 2008-07-24 | 2011-12-15 | Canon Anelva Corp | レジストトリミング方法及びトリミング装置 |
JP2012009899A (ja) * | 2007-02-15 | 2012-01-12 | Air Products & Chemicals Inc | 誘電体膜の材料特性を高めるための活性化学的方法 |
JP2013157351A (ja) * | 2012-01-26 | 2013-08-15 | Tokyo Electron Ltd | プラズマ処理方法及びプラズマ処理装置 |
JP2016042576A (ja) * | 2014-08-14 | 2016-03-31 | エア プロダクツ アンド ケミカルズ インコーポレイテッドAir Products And Chemicals Incorporated | 多孔質低誘電率膜上に細孔封止層を設けるための方法及び組成物 |
US20160111288A1 (en) * | 2014-10-17 | 2016-04-21 | Lam Research Corporation | Low-k damage repair and pore sealing agents with photosensitive end groups |
US20160276134A1 (en) * | 2015-03-17 | 2016-09-22 | Applied Materials, Inc. | Ion-ion plasma atomic layer etch process and reactor |
Family Cites Families (74)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5275798A (en) * | 1986-07-11 | 1994-01-04 | Kyocera Corporation | Method for producing diamond films |
US4885067A (en) * | 1987-08-31 | 1989-12-05 | Santa Barbara Research Center | In-situ generation of volatile compounds for chemical vapor deposition |
US5811022A (en) | 1994-11-15 | 1998-09-22 | Mattson Technology, Inc. | Inductive plasma reactor |
JPH09190979A (ja) * | 1996-01-10 | 1997-07-22 | Nec Corp | 選択シリコンエピタキシャル成長方法及び成長装置 |
DE19744060C2 (de) * | 1997-10-06 | 1999-08-12 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zur Oberflächenbehandlung von Substraten |
EP0948080A1 (fr) * | 1998-03-31 | 1999-10-06 | Koninklijke Philips Electronics N.V. | Appareil électronique portable muni d'une antenne |
US6028015A (en) | 1999-03-29 | 2000-02-22 | Lsi Logic Corporation | Process for treating damaged surfaces of low dielectric constant organo silicon oxide insulation material to inhibit moisture absorption |
JP3365554B2 (ja) * | 2000-02-07 | 2003-01-14 | キヤノン販売株式会社 | 半導体装置の製造方法 |
JP4644964B2 (ja) * | 2001-04-04 | 2011-03-09 | ソニー株式会社 | 多結晶性半導体薄膜の形成方法、及び半導体装置の製造方法 |
US6989108B2 (en) | 2001-08-30 | 2006-01-24 | Micron Technology, Inc. | Etchant gas composition |
US7541200B1 (en) | 2002-01-24 | 2009-06-02 | Novellus Systems, Inc. | Treatment of low k films with a silylating agent for damage repair |
JP4863182B2 (ja) * | 2002-01-31 | 2012-01-25 | 東ソー株式会社 | 有機シラン化合物を含んでなる絶縁膜用材料、その製造方法および半導体デバイス |
JP4034227B2 (ja) * | 2002-05-08 | 2008-01-16 | Necエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP5117755B2 (ja) * | 2002-05-08 | 2013-01-16 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US20040086434A1 (en) * | 2002-11-04 | 2004-05-06 | Gadgil Pradad N. | Apparatus and method for treating objects with radicals generated from plasma |
US7711675B2 (en) * | 2002-07-22 | 2010-05-04 | Microsoft Corporation | Database simulation of data types |
US6677251B1 (en) | 2002-07-29 | 2004-01-13 | Taiwan Semiconductor Manufacturing Co., Ltd | Method for forming a hydrophilic surface on low-k dielectric insulating layers for improved adhesion |
US20040154743A1 (en) * | 2002-11-29 | 2004-08-12 | Savas Stephen E. | Apparatus and method for low temperature stripping of photoresist and residues |
WO2004074932A2 (en) | 2003-02-14 | 2004-09-02 | Applied Materials, Inc. | Method and apparatus for cleaning of native oxides with hydroge-containing radicals |
US7256134B2 (en) * | 2003-08-01 | 2007-08-14 | Applied Materials, Inc. | Selective etching of carbon-doped low-k dielectrics |
WO2005029550A2 (en) * | 2003-09-16 | 2005-03-31 | The Trustees Of Columbia University In The City Of New York | Method and system for producing crystalline thin films with a uniform crystalline orientation |
JP2005093688A (ja) * | 2003-09-17 | 2005-04-07 | Jsr Corp | 半導体装置および半導体装置の製造方法 |
JP2005268312A (ja) * | 2004-03-16 | 2005-09-29 | Semiconductor Leading Edge Technologies Inc | レジスト除去方法及びそれを用いて製造した半導体装置 |
JP4470557B2 (ja) | 2004-03-31 | 2010-06-02 | 日本電気株式会社 | 携帯電話機 |
US20050233555A1 (en) * | 2004-04-19 | 2005-10-20 | Nagarajan Rajagopalan | Adhesion improvement for low k dielectrics to conductive materials |
US7539329B2 (en) * | 2004-07-01 | 2009-05-26 | Hewlett-Packard Development Company, L.P. | Method and apparatus for enhancing the usability of an electronic device having an integrated fingerprint sensor |
US20060081273A1 (en) * | 2004-10-20 | 2006-04-20 | Mcdermott Wayne T | Dense fluid compositions and processes using same for article treatment and residue removal |
CA2575479C (en) * | 2005-03-25 | 2012-05-22 | Institut National De La Recherche Scientifique | Methods and apparatuses for purifying carbon filamentary structures |
US7642195B2 (en) | 2005-09-26 | 2010-01-05 | Applied Materials, Inc. | Hydrogen treatment to improve photoresist adhesion and rework consistency |
US7901743B2 (en) | 2005-09-30 | 2011-03-08 | Tokyo Electron Limited | Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system |
US7695567B2 (en) | 2006-02-10 | 2010-04-13 | Applied Materials, Inc. | Water vapor passivation of a wall facing a plasma |
CN101378850A (zh) * | 2006-02-21 | 2009-03-04 | 应用材料股份有限公司 | 加强用于介电膜层的远程等离子体源清洁 |
US20080026140A1 (en) * | 2006-07-25 | 2008-01-31 | Clark E Bradley | Graffiti furniture |
JP4884268B2 (ja) * | 2007-03-22 | 2012-02-29 | 東京エレクトロン株式会社 | アッシング方法 |
JP4823952B2 (ja) | 2007-03-26 | 2011-11-24 | 三菱電機株式会社 | 半導体装置の製造方法 |
KR100777043B1 (ko) | 2007-05-22 | 2007-11-16 | 주식회사 테스 | 비정질 탄소막 형성 방법 및 이를 이용한 반도체 소자의제조 방법 |
US7838426B2 (en) * | 2007-08-20 | 2010-11-23 | Lam Research Corporation | Mask trimming |
US20090084501A1 (en) * | 2007-09-27 | 2009-04-02 | Tokyo Electron Limited | Processing system for producing a negative ion plasma |
TWI591158B (zh) * | 2008-03-07 | 2017-07-11 | 恩特葛瑞斯股份有限公司 | 非選擇性氧化物蝕刻濕清潔組合物及使用方法 |
US8805844B2 (en) * | 2008-08-04 | 2014-08-12 | Liveperson, Inc. | Expert search |
KR101357181B1 (ko) * | 2008-10-14 | 2014-01-29 | 어플라이드 머티어리얼스, 인코포레이티드 | 플라즈마-강화 화학적 기상 증착(pecvd)에 의해 등각성 비정질 탄소막을 증착하기 위한 방법 |
JP4799623B2 (ja) * | 2009-01-19 | 2011-10-26 | 株式会社東芝 | カーボンナノチューブ成長方法 |
DE102009023379B4 (de) * | 2009-05-29 | 2014-08-21 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Erzeugen einer hydrophoben Oberfläche empfindlicher Dielektrika mit kleinem ε von Mikrostrukturbauelementen durch eine in-situ-Plasmabehandlung |
US8501145B2 (en) | 2009-07-12 | 2013-08-06 | Mahmood Ghoanneviss | Method for growing carbon nanowalls |
US8617993B2 (en) * | 2010-02-01 | 2013-12-31 | Lam Research Corporation | Method of reducing pattern collapse in high aspect ratio nanostructures |
NO345393B1 (no) * | 2010-03-12 | 2021-01-18 | Optoplan As | Roterende ledd/svivelanordning |
JP6133218B2 (ja) * | 2011-03-07 | 2017-05-24 | インテグリス・インコーポレーテッド | 化学機械平坦化パッドコンディショナー |
US9653327B2 (en) | 2011-05-12 | 2017-05-16 | Applied Materials, Inc. | Methods of removing a material layer from a substrate using water vapor treatment |
US8741775B2 (en) * | 2011-07-20 | 2014-06-03 | Applied Materials, Inc. | Method of patterning a low-K dielectric film |
US8771536B2 (en) | 2011-08-01 | 2014-07-08 | Applied Materials, Inc. | Dry-etch for silicon-and-carbon-containing films |
JP5989119B2 (ja) | 2011-08-19 | 2016-09-07 | マットソン テクノロジー インコーポレイテッドMattson Technology, Inc. | プラズマリアクタ及びプラズマを生成する方法 |
US8575041B2 (en) * | 2011-09-15 | 2013-11-05 | Globalfoundries Inc. | Repair of damaged surface areas of sensitive low-K dielectrics of microstructure devices after plasma processing by in situ treatment |
KR101321424B1 (ko) | 2011-11-22 | 2013-10-22 | 김일욱 | 반도체 소자의 표면 처리 및 박막 성장 방법, 그리고 이를 구현하는 표면 처리 및 박막 성장 장치 |
KR101331566B1 (ko) * | 2012-03-28 | 2013-11-21 | 한국과학기술연구원 | 나노결정다이아몬드 박막 및 그 제조방법 |
JPWO2013153777A1 (ja) | 2012-04-11 | 2015-12-17 | 東京エレクトロン株式会社 | 半導体装置の製造方法、半導体装置、半導体製造装置 |
KR101897062B1 (ko) * | 2012-05-31 | 2018-09-12 | 엘지이노텍 주식회사 | 탄화규소 에피 웨이퍼 및 이의 제조 방법 |
WO2014013941A1 (ja) | 2012-07-18 | 2014-01-23 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
US20140099794A1 (en) * | 2012-09-21 | 2014-04-10 | Applied Materials, Inc. | Radical chemistry modulation and control using multiple flow pathways |
US8821987B2 (en) | 2012-12-17 | 2014-09-02 | Intermolecular, Inc. | Combinatorial processing using a remote plasma source |
US10006121B2 (en) * | 2013-03-14 | 2018-06-26 | Eugene Technology Co., Ltd. | Method and apparatus for manufacturing three-dimensional-structure memory device |
WO2014146937A2 (en) * | 2013-03-22 | 2014-09-25 | Vlyte Innovations Limited | An electrophoretic device having a transparent light state |
US20140342569A1 (en) * | 2013-05-16 | 2014-11-20 | Applied Materials, Inc. | Near surface etch selectivity enhancement |
US20150239759A1 (en) * | 2014-02-25 | 2015-08-27 | Energy Onvector, LLC | Microbubble Generator for Enhanced Plasma Treatment of Liquid |
US9190290B2 (en) * | 2014-03-31 | 2015-11-17 | Applied Materials, Inc. | Halogen-free gas-phase silicon etch |
US9469912B2 (en) | 2014-04-21 | 2016-10-18 | Lam Research Corporation | Pretreatment method for photoresist wafer processing |
US9412581B2 (en) * | 2014-07-16 | 2016-08-09 | Applied Materials, Inc. | Low-K dielectric gapfill by flowable deposition |
US20160042916A1 (en) * | 2014-08-06 | 2016-02-11 | Applied Materials, Inc. | Post-chamber abatement using upstream plasma sources |
US9735009B2 (en) | 2014-09-15 | 2017-08-15 | Applied Materials, Inc. | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel |
CN105762109B (zh) * | 2014-12-19 | 2019-01-25 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构的形成方法 |
US9881805B2 (en) * | 2015-03-02 | 2018-01-30 | Applied Materials, Inc. | Silicon selective removal |
US10280512B2 (en) * | 2015-07-27 | 2019-05-07 | Varian Semiconductor Equipment Associates, Inc. | Apparatus and method for carbon film deposition profile control |
JP2017050304A (ja) | 2015-08-31 | 2017-03-09 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
KR102148833B1 (ko) | 2016-02-26 | 2020-08-28 | 베이징 이타운 세미컨덕터 테크놀로지 컴퍼니 리미티드 | 주입형 포토레지스트 스트리핑 공정 |
US9837270B1 (en) | 2016-12-16 | 2017-12-05 | Lam Research Corporation | Densification of silicon carbide film using remote plasma treatment |
-
2018
- 2018-04-20 US US15/958,601 patent/US10269574B1/en active Active
- 2018-04-20 US US15/958,635 patent/US10804109B2/en active Active
- 2018-04-20 US US15/958,560 patent/US10354883B2/en active Active
- 2018-09-19 WO PCT/US2018/051706 patent/WO2019070403A1/en active Application Filing
- 2018-09-19 KR KR1020207009811A patent/KR20200039815A/ko not_active Application Discontinuation
- 2018-09-19 KR KR1020207009762A patent/KR20200039017A/ko not_active Application Discontinuation
- 2018-09-19 WO PCT/US2018/051699 patent/WO2019070402A1/en active Application Filing
- 2018-09-19 JP JP2020519129A patent/JP6991324B2/ja active Active
- 2018-09-19 WO PCT/US2018/051714 patent/WO2019070404A1/en active Application Filing
- 2018-09-19 JP JP2020519055A patent/JP6991323B2/ja active Active
- 2018-09-19 CN CN201880078077.7A patent/CN111433896B/zh active Active
- 2018-09-19 CN CN201880078107.4A patent/CN111433893B/zh active Active
- 2018-09-19 KR KR1020207009697A patent/KR20200039809A/ko not_active Application Discontinuation
- 2018-09-19 CN CN201880078060.1A patent/CN111433895B/zh active Active
- 2018-09-19 JP JP2020519096A patent/JP7021344B2/ja active Active
- 2018-09-26 TW TW107133841A patent/TWI743396B/zh active
- 2018-09-26 TW TW107133840A patent/TW201933431A/zh unknown
- 2018-09-26 TW TW107133839A patent/TWI715872B/zh active
-
2019
- 2019-03-19 US US16/357,800 patent/US10910228B2/en active Active
- 2019-06-18 US US16/444,146 patent/US11062910B2/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003332317A (ja) * | 2002-05-16 | 2003-11-21 | Japan Steel Works Ltd:The | プラズマを用いたレジスト剥離装置及び方法 |
JP2012009899A (ja) * | 2007-02-15 | 2012-01-12 | Air Products & Chemicals Inc | 誘電体膜の材料特性を高めるための活性化学的方法 |
JP2008277812A (ja) * | 2007-04-19 | 2008-11-13 | Applied Materials Inc | 水蒸気及び希釈ガスにより改善された水素アッシング |
JP2009158610A (ja) * | 2007-12-25 | 2009-07-16 | Taiyo Nippon Sanso Corp | 絶縁膜のダメージ回復処理方法 |
JP2011253832A (ja) * | 2008-07-24 | 2011-12-15 | Canon Anelva Corp | レジストトリミング方法及びトリミング装置 |
JP2013157351A (ja) * | 2012-01-26 | 2013-08-15 | Tokyo Electron Ltd | プラズマ処理方法及びプラズマ処理装置 |
JP2016042576A (ja) * | 2014-08-14 | 2016-03-31 | エア プロダクツ アンド ケミカルズ インコーポレイテッドAir Products And Chemicals Incorporated | 多孔質低誘電率膜上に細孔封止層を設けるための方法及び組成物 |
US20160111288A1 (en) * | 2014-10-17 | 2016-04-21 | Lam Research Corporation | Low-k damage repair and pore sealing agents with photosensitive end groups |
US20160276134A1 (en) * | 2015-03-17 | 2016-09-22 | Applied Materials, Inc. | Ion-ion plasma atomic layer etch process and reactor |
Also Published As
Publication number | Publication date |
---|---|
CN111433896A (zh) | 2020-07-17 |
US10910228B2 (en) | 2021-02-02 |
JP2020536387A (ja) | 2020-12-10 |
KR20200039815A (ko) | 2020-04-16 |
CN111433893B (zh) | 2024-04-02 |
WO2019070402A1 (en) | 2019-04-11 |
WO2019070403A1 (en) | 2019-04-11 |
TW201933431A (zh) | 2019-08-16 |
CN111433893A (zh) | 2020-07-17 |
CN111433895A (zh) | 2020-07-17 |
JP7021344B2 (ja) | 2022-02-16 |
US11062910B2 (en) | 2021-07-13 |
JP6991323B2 (ja) | 2022-01-12 |
US10804109B2 (en) | 2020-10-13 |
JP6991324B2 (ja) | 2022-02-03 |
US20190103279A1 (en) | 2019-04-04 |
US20190103270A1 (en) | 2019-04-04 |
KR20200039809A (ko) | 2020-04-16 |
TWI715872B (zh) | 2021-01-11 |
TW201915211A (zh) | 2019-04-16 |
TW201928105A (zh) | 2019-07-16 |
US10269574B1 (en) | 2019-04-23 |
US20190304793A1 (en) | 2019-10-03 |
TWI743396B (zh) | 2021-10-21 |
KR20200039017A (ko) | 2020-04-14 |
US10354883B2 (en) | 2019-07-16 |
CN111433896B (zh) | 2023-04-21 |
JP2020536385A (ja) | 2020-12-10 |
US20190214262A1 (en) | 2019-07-11 |
US20190103280A1 (en) | 2019-04-04 |
WO2019070404A1 (en) | 2019-04-11 |
CN111433895B (zh) | 2023-04-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6991324B2 (ja) | 有機前駆体を使用した遠隔のプラズマによる、シリコンと炭素とを含有する膜の表面処理 | |
TWI623976B (zh) | 保形膜之電漿活化沈積 | |
WO2020123122A1 (en) | Integration of materials removal and surface treatment in semiconductor device fabrication | |
TW202003799A (zh) | 利用以鹵烷生成之反應性物種的工件處理 | |
US11495456B2 (en) | Ozone for selective hydrophilic surface treatment | |
JP7311628B2 (ja) | メチル化処理を使用した選択的な堆積 | |
US11164727B2 (en) | Processing of workpieces using hydrogen radicals and ozone gas |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200527 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210728 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210816 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211007 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20211129 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211207 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6991324 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |