JP4884268B2 - アッシング方法 - Google Patents
アッシング方法 Download PDFInfo
- Publication number
- JP4884268B2 JP4884268B2 JP2007074592A JP2007074592A JP4884268B2 JP 4884268 B2 JP4884268 B2 JP 4884268B2 JP 2007074592 A JP2007074592 A JP 2007074592A JP 2007074592 A JP2007074592 A JP 2007074592A JP 4884268 B2 JP4884268 B2 JP 4884268B2
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- JP
- Japan
- Prior art keywords
- ashing
- substrate
- processed
- resist
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000004380 ashing Methods 0.000 title claims description 132
- 238000000034 method Methods 0.000 title claims description 40
- 239000000758 substrate Substances 0.000 claims description 99
- 238000012545 processing Methods 0.000 claims description 28
- 238000007781 pre-processing Methods 0.000 claims description 12
- 230000009477 glass transition Effects 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 48
- 229910052739 hydrogen Inorganic materials 0.000 description 32
- 239000001257 hydrogen Substances 0.000 description 31
- -1 oxygen radicals Chemical class 0.000 description 29
- 238000001020 plasma etching Methods 0.000 description 27
- 239000007789 gas Substances 0.000 description 21
- 238000010438 heat treatment Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 19
- 230000007246 mechanism Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 13
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 150000003254 radicals Chemical class 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 6
- 230000003028 elevating effect Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 4
- 238000002203 pretreatment Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 238000004993 emission spectroscopy Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001723 carbon free-radicals Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
- H01L21/31138—Etching organic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
Description
レジスト残渣の生成状況は目視観察で、○(レジスト残渣殆ど無し)、△(レジスト残渣若干有り)、×(レジスト残渣有り)の3段階に評価した。このテスト結果を表1に示す。
なお、本処理アッシングの条件は、従来の水素ラジカルによるレジスト除去と同様であ
るが、後述の実施例に示すように、レジスト除去の所要時間が短縮されることが確かめら
れている。
なお、本実施例の装置では、チャンバー側壁にチャンバー内の発光スペクトラムをモニターできる発光分光器を備えた終点検出装置(図示しない)が設けられている。
2 レジスト層
3 変質層
4 空洞
5 処理チャンバー
6 被処理基板
7 サセプタ
8 ヒーター
9 ヒーター電源
10 プラズマ発生機構
11 遮断弁
12 流量調節器
13 シャワーヘッド
14 流出孔
15 真空排気口
16 真空ポンプ
17 支持ピン
18 支持部材
19 昇降機構
20 温度センサ
21 温度計
22 支持アーム
23 加熱ランプ
24 回転台
25 透過窓
26 回転装置
27 電力制御装置
Claims (3)
- 反応ガスを用いたダウンフロー型プラズマアッシング装置の真空処理容器内においてパターンニングされたレジスト膜をマスクとして用いて低誘電率膜の一部をプラズマエッチングした後に、前記真空処理容器内において、前記レジスト膜を除去する、被処理基板のアッシング方法において、
前記被処理基板を80℃から150℃までの温度範囲内で保持し、前記レジスト膜の変形を防ぐ前処理アッシングを行い、
次に、前記被処理基板の温度を250℃以上に上昇させ本処理アッシングを行い前記レジスト膜を除去することを特徴とするアッシング方法。 - 前記前処理アッシングを行う際の前記被処理基板の上限温度が、前記レジスト膜のガラス転移温度+30℃であることを特徴とする請求項1に記載のアッシング方法。
- 前記前処理アッシングの時間が、20秒から40秒の範囲内にあることを特徴とする請求項1又は2に記載のアッシング方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007074592A JP4884268B2 (ja) | 2007-03-22 | 2007-03-22 | アッシング方法 |
US12/052,239 US7892986B2 (en) | 2007-03-22 | 2008-03-20 | Ashing method and apparatus therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007074592A JP4884268B2 (ja) | 2007-03-22 | 2007-03-22 | アッシング方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008235660A JP2008235660A (ja) | 2008-10-02 |
JP2008235660A5 JP2008235660A5 (ja) | 2010-02-18 |
JP4884268B2 true JP4884268B2 (ja) | 2012-02-29 |
Family
ID=39775196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007074592A Expired - Fee Related JP4884268B2 (ja) | 2007-03-22 | 2007-03-22 | アッシング方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7892986B2 (ja) |
JP (1) | JP4884268B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7802917B2 (en) * | 2005-08-05 | 2010-09-28 | Lam Research Corporation | Method and apparatus for chuck thermal calibration |
TWI445065B (zh) * | 2009-12-18 | 2014-07-11 | J E T Co Ltd | Substrate processing device |
JP2013033965A (ja) * | 2011-07-29 | 2013-02-14 | Semes Co Ltd | 基板処理装置、基板処理設備、及び基板処理方法 |
JP6165518B2 (ja) * | 2013-06-25 | 2017-07-19 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法および真空処理装置 |
JP6153095B2 (ja) * | 2014-12-19 | 2017-06-28 | 信越半導体株式会社 | エピタキシャルウェーハの製造方法 |
KR101928011B1 (ko) * | 2017-07-17 | 2018-12-11 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
US10804109B2 (en) * | 2017-10-03 | 2020-10-13 | Mattson Technology, Inc. | Surface treatment of silicon and carbon containing films by remote plasma with organic precursors |
CN109994375A (zh) * | 2018-01-03 | 2019-07-09 | 联华电子股份有限公司 | 去除图案化光致抗蚀剂的方法 |
JP2019192892A (ja) | 2018-04-18 | 2019-10-31 | 東京エレクトロン株式会社 | 処理システムおよび処理方法 |
CN114442443A (zh) | 2020-10-30 | 2022-05-06 | 江苏鲁汶仪器有限公司 | 一种光刻胶剥离方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0787192B2 (ja) | 1986-09-19 | 1995-09-20 | 東京応化工業株式会社 | プラズマ反応処理装置 |
JP3395490B2 (ja) * | 1995-11-30 | 2003-04-14 | ソニー株式会社 | レジスト・アッシング方法およびこれに用いるアッシング装置 |
JP3393399B2 (ja) * | 1996-09-24 | 2003-04-07 | アクセリス テクノロジーズ インコーポレーテッド | アッシング方法 |
JPH1167738A (ja) * | 1997-08-18 | 1999-03-09 | Oki Electric Ind Co Ltd | アッシング方法および装置 |
US6592771B1 (en) * | 1999-04-08 | 2003-07-15 | Sony Corporation | Vapor-phase processing method and apparatus therefor |
US6951823B2 (en) * | 2001-05-14 | 2005-10-04 | Axcelis Technologies, Inc. | Plasma ashing process |
JP2004103747A (ja) * | 2002-09-09 | 2004-04-02 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2006073612A (ja) * | 2004-08-31 | 2006-03-16 | Rohm Co Ltd | レジスト除去方法 |
-
2007
- 2007-03-22 JP JP2007074592A patent/JP4884268B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-20 US US12/052,239 patent/US7892986B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7892986B2 (en) | 2011-02-22 |
US20080233766A1 (en) | 2008-09-25 |
JP2008235660A (ja) | 2008-10-02 |
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