JP2020529124A5 - - Google Patents
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- Publication number
- JP2020529124A5 JP2020529124A5 JP2020503841A JP2020503841A JP2020529124A5 JP 2020529124 A5 JP2020529124 A5 JP 2020529124A5 JP 2020503841 A JP2020503841 A JP 2020503841A JP 2020503841 A JP2020503841 A JP 2020503841A JP 2020529124 A5 JP2020529124 A5 JP 2020529124A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- monolithic ceramic
- distribution plate
- gas distribution
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 84
- 238000009826 distribution Methods 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 23
- 238000003754 machining Methods 0.000 claims description 9
- 238000004891 communication Methods 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 238000005234 chemical deposition Methods 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/662,869 US20190032211A1 (en) | 2017-07-28 | 2017-07-28 | Monolithic ceramic gas distribution plate |
| US15/662,869 | 2017-07-28 | ||
| PCT/US2018/043843 WO2019023429A2 (en) | 2017-07-28 | 2018-07-26 | MONOLITHIC CERAMIC GAS DISTRIBUTION PLATE |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020529124A JP2020529124A (ja) | 2020-10-01 |
| JP2020529124A5 true JP2020529124A5 (https=) | 2021-08-26 |
| JP7292256B2 JP7292256B2 (ja) | 2023-06-16 |
Family
ID=65040888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020503841A Active JP7292256B2 (ja) | 2017-07-28 | 2018-07-26 | モノリシックセラミックガス分配プレート |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20190032211A1 (https=) |
| JP (1) | JP7292256B2 (https=) |
| KR (1) | KR102584684B1 (https=) |
| CN (1) | CN110998816B (https=) |
| TW (1) | TWI835740B (https=) |
| WO (1) | WO2019023429A2 (https=) |
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| US11121002B2 (en) | 2018-10-24 | 2021-09-14 | Applied Materials, Inc. | Systems and methods for etching metals and metal derivatives |
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| US10920319B2 (en) * | 2019-01-11 | 2021-02-16 | Applied Materials, Inc. | Ceramic showerheads with conductive electrodes |
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| CN111243933A (zh) * | 2020-02-18 | 2020-06-05 | 信利(仁寿)高端显示科技有限公司 | 一种干法刻蚀设备的上部电极及干法刻蚀设备 |
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| US20250316502A1 (en) * | 2024-04-05 | 2025-10-09 | Applied Materials, Inc. | Monolithic gas distribution assembly for process chambers |
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-
2017
- 2017-07-28 US US15/662,869 patent/US20190032211A1/en not_active Abandoned
-
2018
- 2018-07-26 WO PCT/US2018/043843 patent/WO2019023429A2/en not_active Ceased
- 2018-07-26 JP JP2020503841A patent/JP7292256B2/ja active Active
- 2018-07-26 KR KR1020207005901A patent/KR102584684B1/ko active Active
- 2018-07-26 CN CN201880050217.XA patent/CN110998816B/zh active Active
- 2018-07-26 TW TW107125831A patent/TWI835740B/zh active
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