JP2020166165A - 光導波路素子 - Google Patents
光導波路素子 Download PDFInfo
- Publication number
- JP2020166165A JP2020166165A JP2019067738A JP2019067738A JP2020166165A JP 2020166165 A JP2020166165 A JP 2020166165A JP 2019067738 A JP2019067738 A JP 2019067738A JP 2019067738 A JP2019067738 A JP 2019067738A JP 2020166165 A JP2020166165 A JP 2020166165A
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- substrate
- waveguide element
- groove portion
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 104
- 239000000758 substrate Substances 0.000 claims abstract description 91
- 239000010410 layer Substances 0.000 description 9
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000005693 optoelectronics Effects 0.000 description 4
- 238000003776 cleavage reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007017 scission Effects 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0305—Constructional arrangements
- G02F1/0316—Electrodes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/20—LiNbO3, LiTaO3
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
(1) 基板に光導波路を形成した光導波路素子において、該基板の外周に沿って、少なくとも該基板の一部に溝部分が形成されていることを特徴とする。
本発明の光導波路素子は、図1及び図3に示すように、基板1に光導波路(24,23)を形成した光導波路素子において、該基板1の外周10に沿って、少なくとも該基板の一部に溝部分3が形成されていることを特徴とする。
2 光導波路素子の主要部
23,24 光導波路(リッジ構造)
3,3’ 溝部分
31,32 凸部(基板)
E1〜E3 電極層
Claims (5)
- 基板に光導波路を形成した光導波路素子において、
該基板の外周に沿って、少なくとも該基板の一部に溝部分が形成されていることを特徴とする光導波路素子。 - 請求項1に記載の光導波路素子において、該光導波路は、基板表面に設けたリッジ構造で形成されていることを特徴とする光導波路素子。
- 請求項1又は2に記載の光導波路素子において、該溝部分よりも該基板の内側に位置すると共に、該溝部分を形成している該基板の凸部が、該基板内を伝搬する不要光を除去するための光導波路を兼ねていることを特徴とする光導波路素子。
- 請求項1乃至3のいずれかに記載の光導波路素子において、該溝部分よりも該基板の内側に位置すると共に、該溝部分を形成している該基板の凸部の少なくとも一部の表面に電極層が形成されていることを特徴とする光導波路素子。
- 請求項1乃至4のいずれかに記載の光導波路素子において、該基板の厚みは、20μm以下であることを特徴とする光導波路素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019067738A JP7346876B2 (ja) | 2019-03-29 | 2019-03-29 | 光導波路素子 |
CN201980094932.8A CN113646678B (zh) | 2019-03-29 | 2019-09-26 | 光波导元件 |
US17/600,054 US20220179248A1 (en) | 2019-03-29 | 2019-09-26 | Optical waveguide element |
PCT/JP2019/037729 WO2020202606A1 (ja) | 2019-03-29 | 2019-09-26 | 光導波路素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019067738A JP7346876B2 (ja) | 2019-03-29 | 2019-03-29 | 光導波路素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020166165A true JP2020166165A (ja) | 2020-10-08 |
JP7346876B2 JP7346876B2 (ja) | 2023-09-20 |
Family
ID=72668518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019067738A Active JP7346876B2 (ja) | 2019-03-29 | 2019-03-29 | 光導波路素子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20220179248A1 (ja) |
JP (1) | JP7346876B2 (ja) |
CN (1) | CN113646678B (ja) |
WO (1) | WO2020202606A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7428051B2 (ja) * | 2020-03-31 | 2024-02-06 | 住友大阪セメント株式会社 | 光導波路素子とそれを用いた光変調デバイス及び光送信装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002023123A (ja) * | 2000-07-11 | 2002-01-23 | Fujitsu Ltd | 非主要光を導波する光導波路を備える光回路 |
US20030194164A1 (en) * | 2001-03-30 | 2003-10-16 | Fujitsu Limited | Optical modulator |
JP2007148126A (ja) * | 2005-11-29 | 2007-06-14 | Hitachi Chem Co Ltd | 横断溝を有する個片部品及びその製造方法 |
JP2009048087A (ja) * | 2007-08-22 | 2009-03-05 | Anritsu Corp | 光変調器 |
JP2011135535A (ja) * | 2009-12-25 | 2011-07-07 | Ngk Insulators Ltd | 複合基板及びその製造方法 |
JP2017026906A (ja) * | 2015-07-24 | 2017-02-02 | 日本碍子株式会社 | 複合基板およびその製造方法 |
JP6299170B2 (ja) * | 2013-11-15 | 2018-03-28 | 住友大阪セメント株式会社 | 光導波路素子 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4963060B2 (ja) * | 2005-11-30 | 2012-06-27 | シャープ株式会社 | 窒化物系半導体レーザ素子及びその製造方法 |
CN101043121A (zh) * | 2006-03-22 | 2007-09-26 | 三洋电机株式会社 | 氮化物类半导体发光元件及其制造方法 |
JP5012624B2 (ja) * | 2008-03-31 | 2012-08-29 | 住友大阪セメント株式会社 | 光導波路素子 |
JP2010135586A (ja) * | 2008-12-05 | 2010-06-17 | Renesas Electronics Corp | 半導体レーザ素子及びその製造方法 |
JP2011249556A (ja) * | 2010-05-27 | 2011-12-08 | Panasonic Corp | 半導体レーザ装置及びその製造方法 |
JP2012078375A (ja) * | 2010-09-30 | 2012-04-19 | Sumitomo Osaka Cement Co Ltd | 光導波路素子 |
JP5891920B2 (ja) * | 2012-04-16 | 2016-03-23 | 三菱電機株式会社 | 変調器集積型レーザ素子 |
US9599843B2 (en) * | 2013-02-08 | 2017-03-21 | Sumitomo Osaka Cement Co., Ltd. | Optical modulator |
JP6960480B2 (ja) * | 2019-02-05 | 2021-11-05 | シャープ株式会社 | 半導体レーザ素子 |
-
2019
- 2019-03-29 JP JP2019067738A patent/JP7346876B2/ja active Active
- 2019-09-26 CN CN201980094932.8A patent/CN113646678B/zh active Active
- 2019-09-26 US US17/600,054 patent/US20220179248A1/en active Pending
- 2019-09-26 WO PCT/JP2019/037729 patent/WO2020202606A1/ja active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002023123A (ja) * | 2000-07-11 | 2002-01-23 | Fujitsu Ltd | 非主要光を導波する光導波路を備える光回路 |
US20030194164A1 (en) * | 2001-03-30 | 2003-10-16 | Fujitsu Limited | Optical modulator |
JP2007148126A (ja) * | 2005-11-29 | 2007-06-14 | Hitachi Chem Co Ltd | 横断溝を有する個片部品及びその製造方法 |
JP2009048087A (ja) * | 2007-08-22 | 2009-03-05 | Anritsu Corp | 光変調器 |
JP2011135535A (ja) * | 2009-12-25 | 2011-07-07 | Ngk Insulators Ltd | 複合基板及びその製造方法 |
JP6299170B2 (ja) * | 2013-11-15 | 2018-03-28 | 住友大阪セメント株式会社 | 光導波路素子 |
JP2017026906A (ja) * | 2015-07-24 | 2017-02-02 | 日本碍子株式会社 | 複合基板およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2020202606A1 (ja) | 2020-10-08 |
CN113646678A (zh) | 2021-11-12 |
CN113646678B (zh) | 2024-05-03 |
US20220179248A1 (en) | 2022-06-09 |
JP7346876B2 (ja) | 2023-09-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9298025B2 (en) | Electrode structure for an optical waveguide substrate | |
JP2002357797A (ja) | 光導波路デバイス、その製造方法および進行波形光変調器 | |
KR101313232B1 (ko) | 도파로 절단면 형성 방법 및 이를 채용하는 포토닉스 소자 | |
WO2020202606A1 (ja) | 光導波路素子 | |
CN102841481A (zh) | 光学器件以及光学器件的制造方法 | |
US20230152539A1 (en) | Optical waveguide element, and optical modulation device and optical transmission device using same | |
US11586061B2 (en) | Optical waveguide device, and optical modulation device and optical transmission device using same | |
JP2004341147A (ja) | 光導波路デバイスおよび進行波形光変調器 | |
CN112558217A (zh) | 一种电光器件及其制造方法 | |
JP2002139755A (ja) | 波長変換素子及びその製造方法 | |
JP2003270600A (ja) | 光変調器の製造方法 | |
CN112558333A (zh) | 一种电光器件及其制造方法 | |
WO2003079102A1 (fr) | Procede de fabrication de modulateur optique | |
WO2023162259A1 (ja) | 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 | |
WO2023188311A1 (ja) | 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置 | |
JP6107331B2 (ja) | 光導波路素子 | |
US20240231134A1 (en) | Optical waveguide element, and optical modulation device and optical transmission apparatus which use same | |
US20240134117A1 (en) | Optical waveguide element, and optical transmission apparatus and optical modulation device using same | |
KR101119515B1 (ko) | 평판형 광소자 및 그 제조방법 | |
CN221378428U (zh) | 光波导元件、使用光波导元件的光调制器件及光发送装置 | |
US20230314732A1 (en) | Optical waveguide element, and optical modulation device and optical transmission apparatus using same | |
JPH0756036A (ja) | 光導波路デバイス及びその製造方法 | |
CN118591747A (en) | Optical waveguide element, optical modulation device using the same, and optical transmission device | |
JP3275888B2 (ja) | 光導波路デバイス | |
JP2009192588A (ja) | Shg素子およびこの製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210823 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220607 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20220805 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221005 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221129 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230130 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230404 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230605 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230808 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230821 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7346876 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |