JP2019524620A5 - - Google Patents
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- Publication number
- JP2019524620A5 JP2019524620A5 JP2018569161A JP2018569161A JP2019524620A5 JP 2019524620 A5 JP2019524620 A5 JP 2019524620A5 JP 2018569161 A JP2018569161 A JP 2018569161A JP 2018569161 A JP2018569161 A JP 2018569161A JP 2019524620 A5 JP2019524620 A5 JP 2019524620A5
- Authority
- JP
- Japan
- Prior art keywords
- mbar
- annealing
- temperature
- silicon
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 239000013078 crystal Substances 0.000 claims 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims 4
- 238000000137 annealing Methods 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910021389 graphene Inorganic materials 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000009751 slip forming Methods 0.000 claims 2
- 238000000859 sublimation Methods 0.000 claims 2
- 230000008022 sublimation Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL417804A PL417804A1 (pl) | 2016-07-02 | 2016-07-02 | Metoda syntezy wysokiej jakości grafenu na powierzchni węglika krzemu |
| PLP.417804 | 2016-07-02 | ||
| PCT/IB2017/053969 WO2018007918A1 (en) | 2016-07-02 | 2017-06-30 | Method for preparation of high-quality graphene on the surface of silicon carbide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019524620A JP2019524620A (ja) | 2019-09-05 |
| JP2019524620A5 true JP2019524620A5 (enExample) | 2020-08-13 |
Family
ID=59772660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018569161A Pending JP2019524620A (ja) | 2016-07-02 | 2017-06-30 | シリコンカーバイドの表面に高品質グラフェンを調製するための方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20190226115A1 (enExample) |
| EP (1) | EP3478634B1 (enExample) |
| JP (1) | JP2019524620A (enExample) |
| KR (1) | KR20190024909A (enExample) |
| ES (1) | ES2901235T3 (enExample) |
| PL (2) | PL417804A1 (enExample) |
| WO (1) | WO2018007918A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| PL241895B1 (pl) * | 2019-09-23 | 2022-12-19 | Univ Jagiellonski | Sposób otrzymywania powierzchniowego kompozytu węglikowo- grafenowego o kontrolowanej morfologii powierzchni |
| CN112919456B (zh) * | 2021-02-23 | 2023-09-22 | 南京大学 | 一种具有均一层厚的平整石墨烯生长方法及单层或双层石墨烯薄膜 |
| CN115849352B (zh) * | 2023-02-27 | 2023-05-16 | 太原理工大学 | 一种高效制备叠层石墨烯的方法 |
| CN117303355A (zh) * | 2023-10-16 | 2023-12-29 | 浙江大学杭州国际科创中心 | 一种利用循环加热制备石墨烯的方法 |
| CN120174461B (zh) * | 2025-04-07 | 2025-11-18 | 山东大学 | 一种在碳化硅衬底上外延均匀石墨烯的方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8142754B2 (en) * | 2010-03-12 | 2012-03-27 | The Regents Of The University Of California | Method for synthesis of high quality graphene |
| JP5644175B2 (ja) * | 2010-04-27 | 2014-12-24 | 和人 山内 | ＳｉＣ基板へのグラフェン成膜方法 |
| WO2012036608A1 (en) | 2010-09-16 | 2012-03-22 | Rositza Yakimova | Process for growth of graphene |
| KR101984697B1 (ko) | 2012-12-21 | 2019-05-31 | 삼성전자주식회사 | 그래핀 구조체, 이를 포함한 그래핀 소자 및 그 제조 방법 |
-
2016
- 2016-07-02 PL PL417804A patent/PL417804A1/pl unknown
-
2017
- 2017-06-30 US US16/314,313 patent/US20190226115A1/en not_active Abandoned
- 2017-06-30 WO PCT/IB2017/053969 patent/WO2018007918A1/en not_active Ceased
- 2017-06-30 KR KR1020187037935A patent/KR20190024909A/ko not_active Ceased
- 2017-06-30 EP EP17761570.5A patent/EP3478634B1/en active Active
- 2017-06-30 PL PL17761570T patent/PL3478634T3/pl unknown
- 2017-06-30 ES ES17761570T patent/ES2901235T3/es active Active
- 2017-06-30 JP JP2018569161A patent/JP2019524620A/ja active Pending
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