JP2016056088A5 - - Google Patents
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- Publication number
- JP2016056088A5 JP2016056088A5 JP2015176543A JP2015176543A JP2016056088A5 JP 2016056088 A5 JP2016056088 A5 JP 2016056088A5 JP 2015176543 A JP2015176543 A JP 2015176543A JP 2015176543 A JP2015176543 A JP 2015176543A JP 2016056088 A5 JP2016056088 A5 JP 2016056088A5
- Authority
- JP
- Japan
- Prior art keywords
- sic
- growth
- substrate
- crystal
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims 19
- 239000000758 substrate Substances 0.000 claims 16
- 239000002019 doping agent Substances 0.000 claims 11
- 239000000463 material Substances 0.000 claims 9
- 238000000034 method Methods 0.000 claims 7
- 229910052720 vanadium Inorganic materials 0.000 claims 7
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 6
- 229910052757 nitrogen Inorganic materials 0.000 claims 3
- 239000012808 vapor phase Substances 0.000 claims 3
- 239000007789 gas Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000012528 membrane Substances 0.000 claims 2
- 239000011148 porous material Substances 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014217956.4 | 2014-09-09 | ||
| DE102014217956.4A DE102014217956B4 (de) | 2014-09-09 | 2014-09-09 | Herstellungsverfahren für einen Vanadium-dotierten SiC-Volumeneinkristall und Vanadium-dotiertes SiC-Substrat |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016056088A JP2016056088A (ja) | 2016-04-21 |
| JP2016056088A5 true JP2016056088A5 (enExample) | 2018-06-07 |
| JP6760721B2 JP6760721B2 (ja) | 2020-09-23 |
Family
ID=55358474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015176543A Active JP6760721B2 (ja) | 2014-09-09 | 2015-09-08 | バナジウムでドープしたＳｉＣ塊状単結晶の製造方法及びバナジウムでドープしたＳｉＣ基板 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9732438B2 (enExample) |
| JP (1) | JP6760721B2 (enExample) |
| DE (1) | DE102014217956B4 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180265970A1 (en) * | 2017-03-14 | 2018-09-20 | Eastman Kodak Company | Porous gas-bearing backer |
| EP3382068B1 (en) | 2017-03-29 | 2022-05-18 | SiCrystal GmbH | Silicon carbide substrate and method of growing sic single crystal boules |
| KR102381395B1 (ko) * | 2017-09-18 | 2022-04-01 | 한국전기연구원 | 절연 또는 반절연 ６Ｈ-ＳｉＣ 기판에 구현된 ＳｉＣ 반도체 소자 및 그 제조 방법 |
| JP7258273B2 (ja) | 2018-09-06 | 2023-04-17 | 株式会社レゾナック | ＳｉＣ単結晶の製造方法及び被覆部材 |
| KR102276450B1 (ko) | 2019-10-29 | 2021-07-12 | 에스케이씨 주식회사 | 탄화규소 잉곳의 제조방법, 탄화규소 웨이퍼의 제조방법 및 이의 성장 시스템 |
| TWI723650B (zh) * | 2019-11-26 | 2021-04-01 | 國家中山科學研究院 | 一種均勻碳化矽晶體製備裝置 |
| US11072871B2 (en) | 2019-12-20 | 2021-07-27 | National Chung-Shan Institute Of Science And Technology | Preparation apparatus for silicon carbide crystals comprising a circular cylinder, a doping tablet, and a plate |
| DE102020104226A1 (de) | 2020-02-18 | 2021-08-19 | Friedrich-Alexander-Universität Erlangen-Nürnberg | Verfahren zur Herstellung eines Einkristalls in einem Wachstumstiegel |
| DE102020117661A1 (de) * | 2020-07-03 | 2022-01-20 | Friedrich-Alexander-Universität Erlangen-Nürnberg | Kristallzüchtungsanlage zur Herstellung eines Einkristalls |
| TWI794908B (zh) * | 2020-07-27 | 2023-03-01 | 環球晶圓股份有限公司 | 碳化矽晶圓及其製備方法 |
| US20220251725A1 (en) * | 2021-02-09 | 2022-08-11 | National Chung Shan Institute Of Science And Technology | Method of growing on-axis silicon carbide single crystal by regulating silicon carbide source material in size |
| US20230167580A1 (en) * | 2021-07-09 | 2023-06-01 | Pallidus, Inc. | SiC P-TYPE, AND LOW RESISTIVITY, CRYSTALS, BOULES, WAFERS AND DEVICES, AND METHODS OF MAKING THE SAME |
| WO2024095640A1 (ja) * | 2022-10-31 | 2024-05-10 | 住友電気工業株式会社 | 炭化珪素基板、エピタキシャル基板、半導体装置の製造方法および炭化珪素基板の製造方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0788274B2 (ja) * | 1985-09-18 | 1995-09-27 | 三洋電機株式会社 | ＳｉＣ単結晶の成長方法 |
| JP2868328B2 (ja) * | 1991-03-01 | 1999-03-10 | 新日本製鐵株式会社 | 大口径炭化珪素単結晶インゴットの作製方法および種結晶用炭化珪素単結晶 |
| JPH0710697A (ja) * | 1993-06-28 | 1995-01-13 | Nisshin Steel Co Ltd | 炭化ケイ素単結晶の製造装置 |
| US5611955A (en) | 1993-10-18 | 1997-03-18 | Northrop Grumman Corp. | High resistivity silicon carbide substrates for high power microwave devices |
| US6396080B2 (en) | 1999-05-18 | 2002-05-28 | Cree, Inc | Semi-insulating silicon carbide without vanadium domination |
| JP2005008472A (ja) * | 2003-06-18 | 2005-01-13 | Nippon Steel Corp | 高品質４ｈ型炭化珪素単結晶、および単結晶ウェハ |
| JP5068423B2 (ja) | 2004-10-13 | 2012-11-07 | 新日本製鐵株式会社 | 炭化珪素単結晶インゴット、炭化珪素単結晶ウェハ及びその製造方法 |
| US7608524B2 (en) | 2005-04-19 | 2009-10-27 | Ii-Vi Incorporated | Method of and system for forming SiC crystals having spatially uniform doping impurities |
| DE102008063129B4 (de) | 2008-12-24 | 2013-05-16 | Sicrystal Ag | Herstellungsverfahren für einen codotierten SiC-Volumeneinkristall und hochohmiges SiC-Substrat |
| DE102008063124B4 (de) | 2008-12-24 | 2013-05-16 | Sicrystal Ag | Herstellungsverfahren für einen gleichmäßig dotierten SiC-Volumeneinkristall und gleichmäßig dotiertes SiC-Substrat |
| US10294584B2 (en) | 2009-03-26 | 2019-05-21 | Ii-Vi Incorporated | SiC single crystal sublimation growth method and apparatus |
| JP2011102205A (ja) * | 2009-11-10 | 2011-05-26 | Sumitomo Osaka Cement Co Ltd | α型炭化ケイ素粉体の粒径制御方法及び炭化ケイ素単結晶 |
| US8377806B2 (en) * | 2010-04-28 | 2013-02-19 | Cree, Inc. | Method for controlled growth of silicon carbide and structures produced by same |
| EP2612958A4 (en) * | 2010-09-02 | 2014-01-22 | Bridgestone Corp | METHOD FOR PRODUCING A SILICON CARBIDE INK CRYSTAL, SILICON CARBIDE INK CRYSTAL AND SILICON CARBIDE MONTERRY SUBSTRATE |
| EP2664695B1 (en) * | 2012-05-16 | 2015-07-15 | SiCrystal AG | Physical vapor transport growth system for simultaneously growing more than one SiC single crystal, and method of growing |
-
2014
- 2014-09-09 DE DE102014217956.4A patent/DE102014217956B4/de active Active
-
2015
- 2015-09-08 JP JP2015176543A patent/JP6760721B2/ja active Active
- 2015-09-09 US US14/848,560 patent/US9732438B2/en active Active
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