JP2019505776A - 試験システム - Google Patents

試験システム Download PDF

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Publication number
JP2019505776A
JP2019505776A JP2018531514A JP2018531514A JP2019505776A JP 2019505776 A JP2019505776 A JP 2019505776A JP 2018531514 A JP2018531514 A JP 2018531514A JP 2018531514 A JP2018531514 A JP 2018531514A JP 2019505776 A JP2019505776 A JP 2019505776A
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JP
Japan
Prior art keywords
radiation
probe
signal
test system
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018531514A
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English (en)
Japanese (ja)
Other versions
JP2019505776A5 (enExample
Inventor
エドワード コール，ブライアン
エドワード コール，ブライアン
サリバン，ダリアス
チャンドラー，サイモン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TeraView Ltd
Original Assignee
TeraView Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TeraView Ltd filed Critical TeraView Ltd
Publication of JP2019505776A publication Critical patent/JP2019505776A/ja
Publication of JP2019505776A5 publication Critical patent/JP2019505776A5/ja
Priority to JP2021128013A priority Critical patent/JP2021170040A/ja
Priority to JP2024029454A priority patent/JP2024051131A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31728—Optical aspects, e.g. opto-electronics used for testing, optical signal transmission for testing electronic circuits, electro-optic components to be tested in combination with electronic circuits, measuring light emission of digital circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP2018531514A 2015-12-18 2016-12-16 試験システム Pending JP2019505776A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021128013A JP2021170040A (ja) 2015-12-18 2021-08-04 試験システム
JP2024029454A JP2024051131A (ja) 2015-12-18 2024-02-29 試験システム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1522432.2A GB2545496B (en) 2015-12-18 2015-12-18 A Test System
GB1522432.2 2015-12-18
PCT/GB2016/053976 WO2017103619A1 (en) 2015-12-18 2016-12-16 A test system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021128013A Division JP2021170040A (ja) 2015-12-18 2021-08-04 試験システム

Publications (2)

Publication Number Publication Date
JP2019505776A true JP2019505776A (ja) 2019-02-28
JP2019505776A5 JP2019505776A5 (enExample) 2020-01-30

Family

ID=55311263

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2018531514A Pending JP2019505776A (ja) 2015-12-18 2016-12-16 試験システム
JP2021128013A Pending JP2021170040A (ja) 2015-12-18 2021-08-04 試験システム
JP2024029454A Pending JP2024051131A (ja) 2015-12-18 2024-02-29 試験システム

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2021128013A Pending JP2021170040A (ja) 2015-12-18 2021-08-04 試験システム
JP2024029454A Pending JP2024051131A (ja) 2015-12-18 2024-02-29 試験システム

Country Status (8)

Country Link
US (3) US11366158B2 (enExample)
EP (1) EP3391065B1 (enExample)
JP (3) JP2019505776A (enExample)
KR (1) KR20180096717A (enExample)
CN (1) CN108474821B (enExample)
GB (1) GB2545496B (enExample)
TW (3) TWI794151B (enExample)
WO (1) WO2017103619A1 (enExample)

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US10473719B2 (en) * 2017-10-12 2019-11-12 Keysight Technologies, Inc. System and method for separating and measuring two signals simultaneously present on a signal line
US10910786B2 (en) * 2018-07-23 2021-02-02 University Of Maryland, College Park Laser cavity optical alignment
US11454665B2 (en) * 2018-07-26 2022-09-27 Texas Instruments Incorporated Integrated circuit spike check test point identification apparatus and method
US11061099B2 (en) * 2018-09-18 2021-07-13 Keysight Technologies, Inc. Systems and methods for calibrating a wafer inspection apparatus
US11454799B2 (en) * 2019-01-29 2022-09-27 Formfactor, Inc. Microscopes with objective assembly crash detection and methods of utiliizing the same
CN113742034B (zh) * 2020-05-29 2025-01-14 北京沃东天骏信息技术有限公司 事件处理方法与装置、计算机可读存储介质、电子设备
US11598789B2 (en) * 2021-01-27 2023-03-07 Formfactor, Inc. Probe systems configured to test a device under test and methods of operating the probe systems
CN113567829B (zh) * 2021-06-18 2024-08-27 合肥联宝信息技术有限公司 一种电路板的测试方法及装置
TWI785801B (zh) * 2021-09-15 2022-12-01 英業達股份有限公司 測試輻射敏感度之方法及系統
CN116233638B (zh) * 2021-12-02 2025-11-11 电连技术股份有限公司 电子接触件射频测试装置
CN114460446B (zh) * 2022-03-02 2024-06-14 本源量子计算科技（合肥）股份有限公司 一种量子芯片检测系统及检测方法
CN114942376B (zh) * 2022-05-20 2025-03-11 国汽智控(北京)科技有限公司 电路板信号检测装置及检测方法
TWI850888B (zh) * 2022-12-02 2024-08-01 國立高雄科技大學 量測輔助系統及方法
CN117388544B (zh) * 2023-12-12 2024-03-15 扬州奕丞科技有限公司 一种半导体检测用探针台

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JPH1038980A (ja) * 1996-07-29 1998-02-13 Nec Corp 回路基板プロービング装置及び方法
JPH11304419A (ja) * 1998-04-17 1999-11-05 Advantest Corp 試料検査装置の調整方法
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Also Published As

Publication number Publication date
GB2545496B (en) 2020-06-03
CN108474821A (zh) 2018-08-31
TWI871934B (zh) 2025-02-01
KR20180096717A (ko) 2018-08-29
US11366158B2 (en) 2022-06-21
EP3391065B1 (en) 2024-04-10
US11921154B2 (en) 2024-03-05
US20240192270A1 (en) 2024-06-13
US12392820B2 (en) 2025-08-19
TW202426954A (zh) 2024-07-01
JP2021170040A (ja) 2021-10-28
US20220268833A1 (en) 2022-08-25
GB2545496A (en) 2017-06-21
TW201800769A (zh) 2018-01-01
TWI794151B (zh) 2023-03-01
WO2017103619A1 (en) 2017-06-22
US20180364301A1 (en) 2018-12-20
GB201522432D0 (en) 2016-02-03
EP3391065A1 (en) 2018-10-24
TWI838948B (zh) 2024-04-11
TW202309542A (zh) 2023-03-01
CN108474821B (zh) 2024-10-29
JP2024051131A (ja) 2024-04-10

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