JP2019031434A - 過渡液相、窒化アルミニウム製部品の常圧接合 - Google Patents
過渡液相、窒化アルミニウム製部品の常圧接合 Download PDFInfo
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- JP2019031434A JP2019031434A JP2018167838A JP2018167838A JP2019031434A JP 2019031434 A JP2019031434 A JP 2019031434A JP 2018167838 A JP2018167838 A JP 2018167838A JP 2018167838 A JP2018167838 A JP 2018167838A JP 2019031434 A JP2019031434 A JP 2019031434A
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 55
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- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims abstract description 15
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 51
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 48
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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- 239000010931 gold Substances 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
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- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
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- C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
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- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
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Abstract
Description
本願は、2012年2月29日出願の米国仮特許出願第61/605,157号の利益を主張するものであり、この文献を参照により本明細書に援用する。
本発明はマイクロエレクトロニクス製造に関し、より詳細には別個のセラミック部品の密封結合に関する。
Claims (33)
- セラミック部品を密封接合する方法であって、
アスペクト比の異なる、グリーン状態の少なくとも二つの窒化アルミニウム(AlN)粒子部品を選択する工程と、
存在するAlNの約1〜5重量%の濃度で第一希土類酸化物を含有する所定量の過渡液相促進添加剤を、前記接触領域付近に分散する工程と、
前記部品を、はめ合い接触状態で、実質的に包囲された雰囲気中に配置する工程と、
前記部品を共に約60〜300分間同時加熱して、前記接触領域に沿って過渡液相を生成する工程と、
前記実質的に包囲された雰囲気中に、蒸発量の前記第一希土類酸化物を生成させる工程であって、該蒸発量は約1.0気圧以下の分圧を有し、それにより、前記同時加熱中に、前記過渡液相がさらに蒸発することを実質的に非加圧下で抑制し、
前記部品を室温まで冷却する工程
とを含む、セラミック部品を密封接合する方法。 - 前記同時加熱中に前記領域同士を互いに押圧することを含む、請求項1に記載の方法。
- 前記押圧が、少なくとも0.75〜3.0g/cm3の圧力をかけることを含む、請求項2に記載の方法。
- 前記押圧が、
前記部品のうち第一の部品を他の部品の上に載置する工程と、
前記部品のうち前記第一の部品の上にAlN粒子の潤滑性薄層を散布する工程と、
前記層の上に錘を載置する工程と
を含む、請求項2に記載の方法。 - 前記雰囲気が全圧約1.0気圧以下である、請求項1に記載の方法。
- 前記第一希土類酸化物が、酸化イットリウム、酸化カルシウム、酸化マグネシウム、酸化アルミニウム、並びに遷移金属、アルカリ土類、ランタン及びアクチニウム希土系列の酸化物からなる群より選択される、請求項1に記載の方法。
- 前記窒化アルミニウム粒子が所定量の酸素を含有している、請求項1に記載の方法。
- 前記加熱する工程が、周辺温度を約1780℃〜1840℃まで昇温することを含む、請求項1に記載の方法。
- 前記接触領域間の直線方向への収縮の差分が約1〜5%である、請求項1に記載の方法。
- 窒化アルミニウム(AlN)の粒子を含み、第一の形状を有する第一部品であって、第一の接触領域を有する第一部品と、
窒化アルミニウム(AlN)の粒子を含み、第二の形状を有する第二部品であって、第二の接触領域を有する第二部品とを備え、
前記第一の形状が前記第二の形状と実質的に異なり、
さらに、前記接触領域に沿って延在し、前記第一の部品と第二の部品とを密封結合する溶着接合部を備え、
前記接合部の一部分は、
前記部品の一方における前記一部分以外の領域における第二の濃度よりも高い第一のY2O3濃度を有するアルミン酸イットリウム(Y−Al−O)領域の近傍にある、窒化アルミニウム(AlN)の粒子領域から実質的になる、製品。 - 第一セットの電気配線を有する第一の多層セラミック部品と、
第二セットの電気配線を有する第二の多層セラミック部品とを有し、
前記第一の部品は、第一配向で配向された複数の層を備え、
前記第二の部品は、前記第一配向とは異なる第二配向で配向された複数の層を備え、
前記第一の部品と第二の部品とは、該部品間の導電性接点を含む結合ゾーンに沿って結合されている、同時加熱された多層セラミック装置。 - 前記第一の部品は、前記第一セットの配線と電気的に連通している、第一群の複数の導電性導体パッドを有し、
前記第二の部品は、前記第二セットの配線と電気的に連通している、第二群の複数の導電性導体パッドを有し、
前記第一群は、前記部品を互いに結合すると、前記第二群に導電性接触するように配置及び配向されている、請求項11に記載の装置。 - 前記第一配向が実質的に平坦である、請求項12に記載の装置。
- 前記第二配向が実質的に同心的な円筒形である、請求項13に記載の装置。
- 前記第一配向が前記第二配向に対して実質的に垂直である、請求項14に記載の装置。
- 前記第一の部品が、前記ゾーンに配置された第一表面区画を有し、
前記第二の部品が、前記ゾーンに配置された第二表面区画を有し、
前記装置はさらに、前記両区画に接触する実質的にセラミックによって溶着された構造体を備え、
前記各表面区画及び前記連結構造体は、窒化アルミニウムを含有する材料を含む、請求項12に記載の装置。 - 前記溶着された構造体は、前記区画間に一体的セラミック溶着部を形成する、請求項16に記載の装置。
- 前記材料が、酸化イットリウムを含有する焼結助剤を含む、請求項16に記載の装置。
- 前記配線及びパッドがタングステンを含む、請求項12に記載の装置。
- 前記装置が、電子制御されたサセプタとして操作される構成である、請求項12に記載の装置。
- 前記配線の第一サブセットが加熱エレメントとして作用し、
前記配線の第二サブセットが熱センサへの電気的相互接続として作用し、
前記配線の第三サブセットが電気的シールドとして作用する、
請求項20に記載の装置。 - 前記配線の第一サブセットの複数の部分が第一配向を有し、
前記配線の第二サブセットの複数の部分が第二配向を有し、
前記第一配向は前記第二配向に対して実質的に直角であり、
それにより、前記配線の第一サブセットから前記配線の第二サブセットへと誘導的に通過する電磁雑音が最小限となる、請求項20に記載の装置。 - 前記サセプタが、
頂面領域を含み、
該領域は、互いに重複しない複数の領域に再分割され、
前記第一サブセットが、前記領域に対応して配置される前記配線の別個のグループを含む、請求項21に記載の装置。 - 前記配線の各サブセットが、前記第一の部品の別個の領域に配置されている、請求項21に記載の装置。
- 前記第一の部品が、冷却流体を搬送するように構成された複数の隣接する層を貫通して延在する少なくとも一つの導管を備える、請求項22に記載の装置。
- 外側タングステン層を有する前記第一の部品と、
内部を通る冷却流体搬送通路を有するように形成されたタングステンブロックとをさらに備え、
前記ブロックは、前記外側層にろう付けされている、請求項21に記載の装置。 - 前記第一の部品とは別個に、前記ブロックにろう付けされているヒートシンクをさらに備える、請求項25に記載の装置。
- 前記ヒートシンクが銅を含む、請求項27に記載の装置。
- サセプタプレートである前記第一の部品と、
中空のサセプタ台座である前記第二の部品と、
前記台座の中央腔に挿入され、前記第一セットの配線と電気的に連通している第一群の複数の導電性導体パッドに接触する金属化ポストとをさらに備える、請求項11に記載の装置。 - サセプタプレートである前記第一の部品と、
中空のサセプタ台座である前記第二の部品と、
前記台座の内側表面に形成され、前記第一セットの配線と電気的に連通している第一群の複数の導電性導体パッドに接触する金属化配線とをさらに備える、請求項11に記載の装置。 - 第一多層セラミック部品を第二多層セラミック部品に電気的に連通して結合する方法であって、該方法は、
第一群の導電性パッドを有する第一多層セラミックサブアセンブリを形成する工程と、
第二群の導電性パッドを有する第二多層セラミックサブアセンブリを形成する工程とを含み、
前記第一サブアセンブリは、第一配向で配向された複数の層を備え、
前記第二サブアセンブリは、前記第一配向とは異なる第二配向で配向された複数の層を備え、
該方法はさらに、
導電性粒子含有スラリー材料の第一パッチを、前記第一群上に形成する工程と、
セラミック粒子含有スラリー材料の第二パッチを、前記第一群を取り囲むように施す工程と、
前記第一群と第二群との間の導電性接点を含む前記第一サブアセンブリと第二サブアセンブリとをはめ合う工程と、
前記第二パッチを焼結した結果として生成されるセラミック溶着部によって前記第一サブアセンブリを第二サブアセンブリに結合する温度で、前記サブアセンブリを焼結する工程と
を含む、第一多層セラミック部品を第二多層セラミック部品に電気的に連通して結合する方法。 - 非乾燥状態で前記スラリー材料を結合剤除去及び焼結する工程をさらに含む、請求項31に記載の方法。
- 前記第一及び第二サブアセンブリが、予備的結合剤除去及び予備的焼結を含む方法によって形成される、請求項31に記載の方法。
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EP (1) | EP2834839A4 (ja) |
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KR20150035498A (ko) | 2015-04-06 |
TWI634618B (zh) | 2018-09-01 |
US20130319762A1 (en) | 2013-12-05 |
WO2013130918A1 (en) | 2013-09-06 |
TW201344840A (zh) | 2013-11-01 |
JP2015514661A (ja) | 2015-05-21 |
JP6896238B2 (ja) | 2021-06-30 |
US9340462B2 (en) | 2016-05-17 |
EP2834839A4 (en) | 2016-03-30 |
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EP2834839A1 (en) | 2015-02-11 |
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