JP2018522377A - 回路基板の製造方法 - Google Patents
回路基板の製造方法 Download PDFInfo
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- JP2018522377A JP2018522377A JP2017567369A JP2017567369A JP2018522377A JP 2018522377 A JP2018522377 A JP 2018522377A JP 2017567369 A JP2017567369 A JP 2017567369A JP 2017567369 A JP2017567369 A JP 2017567369A JP 2018522377 A JP2018522377 A JP 2018522377A
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
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- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
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- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
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- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
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- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
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- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
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- H10K50/81—Anodes
- H10K50/814—Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
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- H05K2201/01—Dielectrics
- H05K2201/0104—Properties and characteristics in general
- H05K2201/0108—Transparent
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/032—Materials
- H05K2201/0326—Inorganic, non-metallic conductor, e.g. indium-tin oxide [ITO]
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- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
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- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
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- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
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- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
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Abstract
Description
UV硬化型樹脂組成物の製造
重量平均分子量が10,100g/mol、酸価77mgKOH/g、アクリル反応基の比率が30mol%のアクリレート樹脂16g、ジペンタエリスリトールヘキサアクリレート7.5g、オキシム系光開始剤1g、Glide−410界面活性剤0.5gをPGMEA(Propylene Glycol Mnomethyl Ether Acetate)75gに溶解した後、0.1μmの大きさのフィルタで濾過して、UV硬化型樹脂組成物を製造した。
銅が2μmの厚さに蒸着されているPET(polyethylene terephthalate)フィルム上に、リバースオフセット印刷工程により線幅15μmのレジストインクパターンを形成した後、銅エッチング工程により厚さ2μm、線幅8μmの銅補助電極パターンを形成した。
露光量を150mJ/cm2に変更したことを除き、実施例1と同様に製造した。
露光量を200mJ/cm2に変更したことを除き、実施例1と同様に製造した。
実施例1において、UV硬化型樹脂組成物層を形成せず、厚さ2μm、線幅8μmの銅補助電極パターンが備えられたPETフィルム上に、直に厚さが100nmのITOを蒸着した。
銅が2μmの厚さに蒸着されているPET(polyethylene terephthalate)フィルム上に、リバースオフセット印刷工程により線幅15μmのレジストインクパターンを形成した後、銅エッチング工程により厚さ2μm、線幅8μmの銅補助電極パターンを形成した。
露光量を150mJ/cm2に変更したことを除き、比較例2と同様に製造した。
露光量を200mJ/cm2に変更したことを除き、比較例2と同様に製造した。
走査電子顕微鏡(SEM)測定
PETフィルム上に備えられた補助電極パターンの走査電子顕微鏡(SEM)イメージを図5に示した。
抵抗測定
実施例1〜3と比較例1〜4の補助電極パターンの上部にITO100nmを蒸着した後、Mitsubishi Chemical Corporation MCP−T600面抵抗測定器を用いて補助電極基板の面抵抗を測定した。
Claims (4)
- 透明基材上に、厚さが1μm以上の補助電極パターンを形成するステップと、
前記補助電極パターンが備えられた透明基材上に、UV硬化型樹脂組成物を塗布してUV硬化型樹脂層を形成するステップと、
前記UV硬化型樹脂層上に離型フィルムを積層するステップと、
前記離型フィルムの表面を圧着するステップと、
前記透明基材中の補助電極パターンが形成された面の反対面側から光を照射する露光ステップと、
露光後、前記UV硬化型樹脂層中の光が照射されない部分を現像してUV硬化型樹脂パターンを形成するステップと
を含み、
前記露光ステップの前または後に、
前記離型フィルムを除去するステップをさらに含むものである
回路基板の製造方法。 - 前記UV硬化型樹脂パターンを形成するステップの後に、
前記補助電極パターンおよびUV硬化型樹脂パターンが備えられた透明基材上に電極層を形成するステップをさらに含む、
請求項1に記載の回路基板の製造方法。 - 前記電極層上に有機物層および追加の電極層を順次に形成するステップをさらに含む、
請求項2に記載の回路基板の製造方法。 - 前記補助電極パターンの厚さと前記UV硬化型樹脂パターンの厚さとの差は、
200nm以下である、
請求項1から3のいずれか1項に記載の回路基板の製造方法。
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