JP2018521219A - 薄膜バッテリの製造におけるリチウム堆積プロセスで使用されるマスキングデバイス、リチウム堆積プロセスのために構成された装置、薄膜バッテリの電極を製造するための方法、及び薄膜バッテリ - Google Patents
薄膜バッテリの製造におけるリチウム堆積プロセスで使用されるマスキングデバイス、リチウム堆積プロセスのために構成された装置、薄膜バッテリの電極を製造するための方法、及び薄膜バッテリ Download PDFInfo
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- H—ELECTRICITY
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- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/139—Processes of manufacture
- H01M4/1395—Processes of manufacture of electrodes based on metals, Si or alloys
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/058—Construction or manufacture
- H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0423—Physical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0423—Physical vapour deposition
- H01M4/0426—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
- H01M4/381—Alkaline or alkaline earth metals elements
- H01M4/382—Lithium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/38—Selection of substances as active materials, active masses, active liquids of elements or alloys
- H01M4/40—Alloys based on alkali metals
- H01M4/405—Alloys based on lithium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/40—Printed batteries, e.g. thin film batteries
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Secondary Cells (AREA)
- Physical Vapour Deposition (AREA)
Abstract
【選択図】図1
Description
Claims (15)
- 薄膜バッテリの製造におけるリチウム堆積プロセスで使用されるマスキングデバイスであって、
金属又は金属合金から作られたマスク部分、及び
前記マスク部分内の1以上の開口部を備え、前記1以上の開口部が、堆積材料の粒子が前記マスク部分を通過することを可能にするように構成され、前記1以上の開口部の各開口部のサイズが、少なくとも0.5cm2である、マスキングデバイス。 - 前記1以上の開口部の各開口部の前記サイズが、0.5cm2から50cm2までの範囲内にある、請求項1に記載のマスキングデバイス。
- 前記マスキングデバイスが、複数の薄膜バッテリの電極の形成のために構成されている、請求項1又は2の記載のマスキングデバイス。
- 前記マスク部分に設けられた絶縁体を更に含む、請求項1から3のいずれか一項に記載のマスキングデバイス。
- 前記絶縁体が、セラミック材料とポリテトラフルオロエチレンのうちの少なくとも一方を含む、請求項4に記載のマスキングデバイス。
- 前記マスク部分が、第1の側と第2の側を有し、前記第1の側が前記リチウム堆積プロセス中に基板と対面するように構成され、前記第2の側が、前記リチウム堆積プロセス中に堆積源と対面するように構成され、前記絶縁体が、前記マスク部分の少なくとも前記第1の側に設けられている、請求項4又は5に記載のマスキングデバイス。
- 前記絶縁体が、前記マスク部分内の前記1以上の開口部に対応する1以上の絶縁体開口部を有する、請求項4から6のいずれか一項に記載のマスキングデバイス。
- 前記1以上の絶縁体開口部のうちの各開口部が、前記マスク部分内の前記1以上の開口部の前記サイズと等しいか又はそれを上回るサイズを有する、請求項7に記載のマスキングデバイス。
- 前記マスク部分と前記絶縁体が、分離した物として設けられる、請求項4から8のいずれか一項に記載のマスキングデバイス。
- 前記マスク部分が、前記絶縁体上の被覆として設けられる、請求項4から8のいずれか一項に記載のマスキングデバイス。
- 前記マスク部分の前記金属又は前記金属合金が、ステンレス鋼、モリブデン、アルミニウム、鉄、クロム、及びそれらの任意の組み合わせから成る群から選択されている、請求項1から10のいずれか一項に記載のマスキングデバイス。
- リチウム堆積プロセスのために構成された装置であって、
1以上の堆積源、及び
請求項1から11のいずれか一項に記載のマスキングデバイスを1以上備える、装置。 - リチウム堆積プロセスにおいて薄膜バッテリの電極を製造するための方法であって、
基板に対して請求項1から11のいずれか一項に記載のマスキングデバイスを配置すること、及び
前記マスク部分内の前記1以上の開口部を通して前記基板上にリチウム又はリチウム合金を堆積させて、前記薄膜バッテリの前記電極を形成することを含む、方法。 - 前記リチウム堆積プロセスが、スパッタリング又は加熱蒸散を使用して実行される、請求項13に記載の方法。
- 請求項13又は14に記載の方法を使用して製造された電極を含む、薄膜バッテリ。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/IB2015/000695 WO2016185234A1 (en) | 2015-05-15 | 2015-05-15 | Masking device for use in a lithium deposition process in the manufacturing of thin film batteries, apparatus configured for a lithium deposition process, method for manufacturing electrodes of thin film batteries, and thin film battery |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2018521219A true JP2018521219A (ja) | 2018-08-02 |
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Family Applications (1)
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JP2017559532A Pending JP2018521219A (ja) | 2015-05-15 | 2015-05-15 | 薄膜バッテリの製造におけるリチウム堆積プロセスで使用されるマスキングデバイス、リチウム堆積プロセスのために構成された装置、薄膜バッテリの電極を製造するための方法、及び薄膜バッテリ |
Country Status (6)
Country | Link |
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US (1) | US20180351164A1 (ja) |
JP (1) | JP2018521219A (ja) |
KR (1) | KR102000769B1 (ja) |
CN (1) | CN107615557A (ja) |
TW (1) | TW201711265A (ja) |
WO (1) | WO2016185234A1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10276411B2 (en) | 2017-08-18 | 2019-04-30 | Applied Materials, Inc. | High pressure and high temperature anneal chamber |
SG11202008268RA (en) | 2018-03-19 | 2020-10-29 | Applied Materials Inc | Methods for depositing coatings on aerospace components |
WO2019209401A1 (en) | 2018-04-27 | 2019-10-31 | Applied Materials, Inc. | Protection of components from corrosion |
KR20230051717A (ko) * | 2018-07-09 | 2023-04-18 | 다이니폰 인사츠 가부시키가이샤 | 증착 마스크의 제조 방법 및 증착 마스크 장치의 제조 방법 |
US11009339B2 (en) | 2018-08-23 | 2021-05-18 | Applied Materials, Inc. | Measurement of thickness of thermal barrier coatings using 3D imaging and surface subtraction methods for objects with complex geometries |
CN111276749B (zh) * | 2018-12-04 | 2021-01-26 | 有研工程技术研究院有限公司 | 一种射频磁控溅射法制备高性能全固态薄膜锂电池的方法 |
CN113795908A (zh) | 2019-04-08 | 2021-12-14 | 应用材料公司 | 用于修改光刻胶轮廓和调整临界尺寸的方法 |
US11629402B2 (en) | 2019-04-16 | 2023-04-18 | Applied Materials, Inc. | Atomic layer deposition on optical structures |
EP3969633A4 (en) | 2019-04-16 | 2023-12-06 | Applied Materials, Inc. | METHOD FOR THIN FILM DEPOSITION IN TRENCHES |
WO2020219332A1 (en) | 2019-04-26 | 2020-10-29 | Applied Materials, Inc. | Methods of protecting aerospace components against corrosion and oxidation |
KR20220009991A (ko) | 2019-05-16 | 2022-01-25 | 드래곤플라이 에너지 코퍼레이션 | 전기화학 전지의 건조 분말 코팅 층들을 위한 시스템들 및 방법들 |
US11794382B2 (en) | 2019-05-16 | 2023-10-24 | Applied Materials, Inc. | Methods for depositing anti-coking protective coatings on aerospace components |
US11697879B2 (en) | 2019-06-14 | 2023-07-11 | Applied Materials, Inc. | Methods for depositing sacrificial coatings on aerospace components |
US11466364B2 (en) | 2019-09-06 | 2022-10-11 | Applied Materials, Inc. | Methods for forming protective coatings containing crystallized aluminum oxide |
US11519066B2 (en) | 2020-05-21 | 2022-12-06 | Applied Materials, Inc. | Nitride protective coatings on aerospace components and methods for making the same |
WO2022005696A1 (en) | 2020-07-03 | 2022-01-06 | Applied Materials, Inc. | Methods for refurbishing aerospace components |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007103130A (ja) * | 2005-10-03 | 2007-04-19 | Geomatec Co Ltd | 薄膜固体二次電池および薄膜固体二次電池の製造方法 |
JP2012122084A (ja) * | 2010-12-06 | 2012-06-28 | Sumitomo Electric Ind Ltd | 薄型電池の製造方法 |
JP2012167303A (ja) * | 2011-02-10 | 2012-09-06 | Toyota Motor Corp | 薄膜固体電池製造用スパッタ装置及び薄膜固体電池の製造方法 |
JP2014019891A (ja) * | 2012-07-17 | 2014-02-03 | Ulvac Japan Ltd | 誘電体膜の形成方法、薄膜二次電池の製造方法、及び、誘電体膜の形成装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6982132B1 (en) * | 1997-10-15 | 2006-01-03 | Trustees Of Tufts College | Rechargeable thin film battery and method for making the same |
JP3933342B2 (ja) * | 1999-04-05 | 2007-06-20 | 東洋アルミニウム株式会社 | 二次電池の集電体用金属箔および二次電池用集電体 |
US6558836B1 (en) * | 2001-02-08 | 2003-05-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Structure of thin-film lithium microbatteries |
KR100437768B1 (ko) * | 2001-09-13 | 2004-06-30 | 엘지전자 주식회사 | 박막증착장치 |
US20050079418A1 (en) * | 2003-10-14 | 2005-04-14 | 3M Innovative Properties Company | In-line deposition processes for thin film battery fabrication |
KR101139147B1 (ko) * | 2009-09-11 | 2012-04-26 | 파나소닉 주식회사 | 전자 부품 실장체 및 그 제조 방법 및 인터포저 |
KR101131555B1 (ko) * | 2009-10-22 | 2012-04-04 | 지에스나노텍 주식회사 | 박막 전지 제조용 패턴 마스크, 박막 전지 및 그 제조 방법 |
KR101260025B1 (ko) * | 2011-06-30 | 2013-05-09 | 지에스나노텍 주식회사 | 박막전지용 양극 형성 방법 및 그 방법으로 제조된 박막전지 |
US8927068B2 (en) * | 2011-07-12 | 2015-01-06 | Applied Materials, Inc. | Methods to fabricate variations in porosity of lithium ion battery electrode films |
-
2015
- 2015-05-15 CN CN201580079884.7A patent/CN107615557A/zh active Pending
- 2015-05-15 US US15/570,988 patent/US20180351164A1/en not_active Abandoned
- 2015-05-15 KR KR1020177036291A patent/KR102000769B1/ko active IP Right Grant
- 2015-05-15 JP JP2017559532A patent/JP2018521219A/ja active Pending
- 2015-05-15 WO PCT/IB2015/000695 patent/WO2016185234A1/en active Application Filing
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- 2016-04-20 TW TW105112261A patent/TW201711265A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007103130A (ja) * | 2005-10-03 | 2007-04-19 | Geomatec Co Ltd | 薄膜固体二次電池および薄膜固体二次電池の製造方法 |
JP2012122084A (ja) * | 2010-12-06 | 2012-06-28 | Sumitomo Electric Ind Ltd | 薄型電池の製造方法 |
JP2012167303A (ja) * | 2011-02-10 | 2012-09-06 | Toyota Motor Corp | 薄膜固体電池製造用スパッタ装置及び薄膜固体電池の製造方法 |
JP2014019891A (ja) * | 2012-07-17 | 2014-02-03 | Ulvac Japan Ltd | 誘電体膜の形成方法、薄膜二次電池の製造方法、及び、誘電体膜の形成装置 |
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US20180351164A1 (en) | 2018-12-06 |
WO2016185234A1 (en) | 2016-11-24 |
KR102000769B1 (ko) | 2019-07-16 |
CN107615557A (zh) | 2018-01-19 |
TW201711265A (zh) | 2017-03-16 |
KR20180008719A (ko) | 2018-01-24 |
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