JP2018500456A - 腐食抑制剤及び関連組成物並びに方法 - Google Patents
腐食抑制剤及び関連組成物並びに方法 Download PDFInfo
- Publication number
- JP2018500456A JP2018500456A JP2017519872A JP2017519872A JP2018500456A JP 2018500456 A JP2018500456 A JP 2018500456A JP 2017519872 A JP2017519872 A JP 2017519872A JP 2017519872 A JP2017519872 A JP 2017519872A JP 2018500456 A JP2018500456 A JP 2018500456A
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- JP
- Japan
- Prior art keywords
- sarcosinate
- polishing composition
- inhibitor
- chemical mechanical
- mechanical polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- 238000000034 method Methods 0.000 title claims abstract description 65
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- ULUAUXLGCMPNKK-UHFFFAOYSA-N Sulfobutanedioic acid Chemical class OC(=O)CC(C(O)=O)S(O)(=O)=O ULUAUXLGCMPNKK-UHFFFAOYSA-N 0.000 claims abstract description 14
- SUMDYPCJJOFFON-UHFFFAOYSA-N isethionic acid Chemical class OCCS(O)(=O)=O SUMDYPCJJOFFON-UHFFFAOYSA-N 0.000 claims abstract description 14
- YEPACHVPVZZBRT-UHFFFAOYSA-N 3-phenyl-2-sulfoprop-2-enoic acid Chemical class S(=O)(=O)(O)C(C(=O)O)=CC1=CC=CC=C1 YEPACHVPVZZBRT-UHFFFAOYSA-N 0.000 claims abstract description 13
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- BACYUWVYYTXETD-UHFFFAOYSA-N N-Lauroylsarcosine Chemical compound CCCCCCCCCCCC(=O)N(C)CC(O)=O BACYUWVYYTXETD-UHFFFAOYSA-N 0.000 claims description 16
- UEZVMMHDMIWARA-UHFFFAOYSA-M phosphonate Chemical compound [O-]P(=O)=O UEZVMMHDMIWARA-UHFFFAOYSA-M 0.000 claims description 16
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- TUNFSRHWOTWDNC-HKGQFRNVSA-N tetradecanoic acid Chemical compound CCCCCCCCCCCCC[14C](O)=O TUNFSRHWOTWDNC-HKGQFRNVSA-N 0.000 claims description 4
- JWGGSJFIGIGFSQ-UHFFFAOYSA-N N-dodecanoylglycine Chemical compound CCCCCCCCCCCC(=O)NCC(O)=O JWGGSJFIGIGFSQ-UHFFFAOYSA-N 0.000 claims description 3
- KVTFEOAKFFQCCX-UHFFFAOYSA-N N-hexadecanoylglycine Chemical compound CCCCCCCCCCCCCCCC(=O)NCC(O)=O KVTFEOAKFFQCCX-UHFFFAOYSA-N 0.000 claims description 3
- DYUGTPXLDJQBRB-UHFFFAOYSA-N N-myristoylglycine Chemical compound CCCCCCCCCCCCCC(=O)NCC(O)=O DYUGTPXLDJQBRB-UHFFFAOYSA-N 0.000 claims description 3
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- JEMLSRUODAIULV-UHFFFAOYSA-M potassium;2-[dodecanoyl(methyl)amino]acetate Chemical compound [K+].CCCCCCCCCCCC(=O)N(C)CC([O-])=O JEMLSRUODAIULV-UHFFFAOYSA-M 0.000 claims description 3
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- 239000004343 Calcium peroxide Substances 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical group OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- KDXKERNSBIXSRK-YFKPBYRVSA-N L-lysine Chemical compound NCCCC[C@H](N)C(O)=O KDXKERNSBIXSRK-YFKPBYRVSA-N 0.000 description 1
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- 239000004472 Lysine Substances 0.000 description 1
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- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
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- YDONNITUKPKTIG-UHFFFAOYSA-N [Nitrilotris(methylene)]trisphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CP(O)(O)=O YDONNITUKPKTIG-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
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- 125000005210 alkyl ammonium group Chemical group 0.000 description 1
- 150000008052 alkyl sulfonates Chemical class 0.000 description 1
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- 150000001408 amides Chemical class 0.000 description 1
- 125000004103 aminoalkyl group Chemical group 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
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- 230000003466 anti-cipated effect Effects 0.000 description 1
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- VTIIJXUACCWYHX-UHFFFAOYSA-L disodium;carboxylatooxy carbonate Chemical compound [Na+].[Na+].[O-]C(=O)OOC([O-])=O VTIIJXUACCWYHX-UHFFFAOYSA-L 0.000 description 1
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- DKPHLYCEFBDQKM-UHFFFAOYSA-H hexapotassium;1-phosphonato-n,n-bis(phosphonatomethyl)methanamine Chemical compound [K+].[K+].[K+].[K+].[K+].[K+].[O-]P([O-])(=O)CN(CP([O-])([O-])=O)CP([O-])([O-])=O DKPHLYCEFBDQKM-UHFFFAOYSA-H 0.000 description 1
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- 239000007943 implant Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- MGIYRDNGCNKGJU-UHFFFAOYSA-N isothiazolinone Chemical compound O=C1C=CSN1 MGIYRDNGCNKGJU-UHFFFAOYSA-N 0.000 description 1
- 238000013150 knee replacement Methods 0.000 description 1
- 125000000400 lauroyl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000005644 linolenyl group Chemical group 0.000 description 1
- 125000005645 linoleyl group Chemical group 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229960004995 magnesium peroxide Drugs 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002905 metal composite material Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229930014626 natural product Natural products 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229940046947 oleth-10 phosphate Drugs 0.000 description 1
- 229940093440 oleth-3-phosphate Drugs 0.000 description 1
- 125000001117 oleyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])/C([H])=C([H])\C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 230000000399 orthopedic effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000006174 pH buffer Substances 0.000 description 1
- 230000020477 pH reduction Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L persulfate group Chemical group S(=O)(=O)([O-])OOS(=O)(=O)[O-] JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001983 poloxamer Polymers 0.000 description 1
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000582 polyisocyanurate Polymers 0.000 description 1
- 239000011495 polyisocyanurate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229940005642 polystyrene sulfonic acid Drugs 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000002455 scale inhibitor Substances 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229940045872 sodium percarbonate Drugs 0.000 description 1
- LLKGTXLYJMUQJX-UHFFFAOYSA-M sodium;3-[2-carboxyethyl(dodecyl)amino]propanoate Chemical compound [Na+].CCCCCCCCCCCCN(CCC(O)=O)CCC([O-])=O LLKGTXLYJMUQJX-UHFFFAOYSA-M 0.000 description 1
- PNGBYKXZVCIZRN-UHFFFAOYSA-M sodium;hexadecane-1-sulfonate Chemical compound [Na+].CCCCCCCCCCCCCCCCS([O-])(=O)=O PNGBYKXZVCIZRN-UHFFFAOYSA-M 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 125000003696 stearoyl group Chemical group O=C([*])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- ZTWTYVWXUKTLCP-UHFFFAOYSA-N vinylphosphonic acid Chemical compound OP(O)(=O)C=C ZTWTYVWXUKTLCP-UHFFFAOYSA-N 0.000 description 1
- NLVXSWCKKBEXTG-UHFFFAOYSA-N vinylsulfonic acid Chemical compound OS(=O)(=O)C=C NLVXSWCKKBEXTG-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/08—Anti-corrosive paints
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/04—Heavy metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/04—Heavy metals
- C23F3/06—Heavy metals with acidic solutions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
Abstract
Description
本出願は、米国特許仮出願第62/066,484号(2014年10月21日出願)及び米国特許仮出願第62/198,013号(2015年7月28日出願)の利益を主張するものであり、これらは参照することにより組み入れられたものとする。
1つの態様では、発明は金属を含む基板の腐食抑制方法を提供する。方法は、両性界面活性剤、スルホナート、ホスホナート、カルボキシラート、アミノ酸誘導体、リン酸エステル、イセチオナート、スルファート、スルホスクシナート、スルホシンナマート、またはそれらの任意の組み合わせを含む水溶性組成物と基板を接触させることを備える。これらの各原料種の例が本明細書で提供されており、当業者には容易に理解されるであろう。いくつかの実施形態では、例えばコバルトを含む基板に関連する応用では抑制剤が約3〜約8.5のpHを有する水溶性組成物に含まれる。また、発明は以下の本明細書で更に記載したように、化学機械研磨組成物及び基板の研磨方法も提供する。
腐食抑制方法は、様々な金属に対して有用性を有し、多様な業界にわたり様々な用途に使用することができる。いくつかの実施形態では、腐食抑制方法は金属がコバルトまたはコバルト含有合金の場合に使用することができる。基板は腐食抑制が必要な任意の適切な基板とすることができる。例として、制限することを意図しているわけではないが、例えば、基板が集積回路または他の電子デバイスを具現する半導体ウエハーである場合、腐食抑制方法を本明細書で記載したような化学機械研磨で使用することができる。ウエハー、一般的には、例えば金属、金属酸化物、金属窒化物、金属複合材、金属合金、低誘電材料またはそれらの組み合わせを含む、または同からなる。
別の態様では、発明は(a)アニオン性粒子を含む研磨剤、(b)速度促進剤、(c)両性界面活性剤、スルホナート、ホスホナート、カルボキシラート、アミノ酸誘導体、リン酸エステル、イセチオナート、スルファート、スルホスクシナート、スルホシンナマート、またはそれらの任意の組み合わせ、(d)酸化剤、及び(e)水溶性担体を含む、同からなる、若しくは同から実質的になる化学機械研磨(CMP)組成物を提供する。
研磨組成物は研摩剤(すなわち、1つ以上の研磨剤)を含む。研摩剤は任意の任意の好適な研摩剤または粒子形態で研摩剤を組み合わせることができる。研磨粒子は、好ましい実施形態で望ましくはアニオン性である。例えば、研磨粒子はアルミナ粒子、シリカ粒子またはそれらの組み合わせとすることができる。いくつかの実施形態では、研磨粒子がアルファアルミナ粒子等のアルミナ粒子であり、またはそれらを含み、少なくとも一部のアルファアルミナ粒子が負電荷重合体または共重合体で被覆されている。より好ましくは、研磨粒子はコロイダルシリカ粒子(望ましくはアニオン性コロイダルシリカ粒子)等のシリカ粒子であり、または同シリカ粒子を含む。
好ましい実施形態に従って、腐食抑制剤(例えば、コバルトの場合または他の金属の場合)は1つ以上の両性界面活性剤、スルホナート、ホスホナート、カルボキシラート、アミノ酸誘導体(例えば、脂肪酸アミノ等のアミノ酸アミド)、リン酸エステル、イセチオナート、サルフェート、スルホサクシネート、スルホシンナマートまたはそれらの組み合わせである。いくつかの実施形態では、腐食抑制剤が親水性頭部基及び疎水性尾部を有し、表面を活性状態にすることから腐食抑制剤は界面活性剤とみなせる。
表1
研磨組成物は適切な速度促進剤を含むことができる。速度促進剤は研磨組成物による基板からの材料の除去速度を改善する物質または物質の組み合わせである。速度促進剤は、例えばカチオン性速度促進剤、両性イオン性速度促進剤、アニオン性速度促進剤またはそれらの任意な組み合わせである場合またはそれらを含む場合がある。いくつかの実施形態では、速度促進剤がアニオン性速度促進剤を含む、アニオン性速度促進剤からなる、またはアニオン性速度促進剤から実質的になる。例えば、いくつかの実施形態では、速度促進剤としてホスホン酸、N-複素環式化合物またはそれらの組み合わせが挙げられる。
いくつかの実施形態では研磨組成物は、限定はされないが、コバルト等の金属を酸化する酸化剤を含む。酸化剤は、研磨組成物のpHでコバルトを酸化するのに十分な大きさの酸化電位を有する任意の適切な酸化剤でありうる。好ましい実施形態では酸化剤が過酸化水素である。他の好適な酸化剤の例として、過硫酸塩(例えば、過硫酸アンモニウム)、第二鉄塩(例えば、硝酸第二鉄)、無機過酸化物、有機過酸化物およびそれらの組み合わせが挙げられる。無機過酸化物として、過炭酸ナトリウム、過酸化カルシウム及び過酸化マグネシウムが挙げられる。酸化剤は、上述した一つ以上の好適な酸化剤の例を含む、これらの例から実質的になる、またはこれらの例からなる。
研磨組成物は任意の好適な技術によって調製することができ、その多くが当業者に公知である。研磨組成物は回分または連続法で調製することができる。一般に、研磨組成物は任意の順序で成分を組み合わせことによって調製することができる。本明細書で使用されるとき、「成分」という用語は、個別の原料(例えば、研摩剤、速度促進剤、腐食抑制剤、酸化剤など)並びに原料(例えば、研摩剤、速度促進剤、腐食抑制剤、酸化剤など)の任意の組合せを含む。
別の態様では、(i)基板を提供する、(ii)研磨パッドを提供する、(iii)化学機械研磨組成物を提供する、(iv)基板と研磨パッド及び化学機械研磨組成物を接触させる、及び(v)基板に対して研磨パッド及び化学機械研磨組成物を動かして少なくとも基板の一部を摩滅させて、基板を研磨することを含む、またはこれらからなる、若しくはこれらから実質的になる基板の研磨方法を提供する。研磨組成物は、本明細書に記載したように、(a)アニオン性粒子を含む研磨剤、(b)速度促進剤、(c)両性界面活性剤、スルホナート、ホスホナート、カルボキシラート、アミノ酸誘導体(例えば、脂肪酸アミノ酸アミド)、リン酸エステル、イセチオナート、サルフェート、スルホサクシネート、スルホシンナマート、またはそれらの任意な組み合わせを含む腐食抑制剤、(d)酸化剤、及び (e)水溶性担体を含む、これらからなる、またはこれらから実質的になる。
この例は、活性環境条件下のもとでの抑制剤組成物の腐食抑制効力を示す。特に、抑制剤が存在しない対照溶液との比較で、コバルト(Co)基板の静的エッチ速度(SER)を様々なpHに亘って種々の抑制剤溶液に曝露した後に測定した。静的エッチングは、試験したpHレベルで水へのコバルト溶解の大きさ示す手法であり、高値は望ましくない。また、追加的腐食性が必要な場合、すなわちpH3以上で所望の活性環境条件を提供するために溶液に硫酸カリウム(K2SO4 )も含めた。
表2
表3
本実施例は実施例1の条件より低活性の環境条件下で抑制剤組成物の腐食抑制効力を示す。特に、SER実験は、硫酸カリウム塩がいずれの溶液にも含まれないこと以外は実施例1に記載したように実行した。
表4
本実施例は、活性条件下で種々のサルコシナート抑制剤組成物について腐食抑制効力の用量依存の役割を示す。
本実施例は、種々の腐食抑制剤を含む研磨組成物が効果的なコバルト除去速度を提供したことを示す。
本実施例は、種々の腐食抑制剤を含んだ研磨組成物が効果的なコバルト除去速度を提供したことを示す。
本実施例は、0.02mMの濃度で硫酸カリウム (K2SO4)塩を加えた以外は先に実施例1で記載した試験手順及び条件下での選択した抑制剤溶液のpH7でのエッチ速度を示す。抑制剤を含まない溶液または多様な濃度のBTAを含む溶液をN-ラウロイルサルコシナートを含む溶液と比較した。試験した抑制剤溶液を表5に示す。
表5
Claims (30)
- 金属を含む基板の腐食抑制方法であって、前記方法が
両性界面活性剤、スルホナート、ホスホナート、カルボキシラート、アミノ酸誘導体、リン酸エステル、イセチオナート、スルファート、スルホスクシナート、スルホシンナマートまたはそれらの任意の組み合わせを含む抑制剤を含む水溶性組成物と基板とを接触させることを含む、方法。 - 前記金属がコバルトである、請求項1に記載の方法。
- 前記金属がコバルトを含む合金である、請求項1に記載の方法。
- 前記基板が半導体ウエハーである、請求項1−3のいずれか一項に記載の方法。
- 前記抑制剤が約60g/mol〜約500g/molの分子量を有する、請求項1−4のいずれか一項に記載の方法。
- 前記アミノ酸誘導体がアミノ酸アミドである、請求項1−5のいずれか一項に記載の方法。
- 前記アミノ酸アミドは、N‐ココイルサルコシナート、N-ラウロイルサルコシナート、N-ステアロイルサルコシナート、N-オレオイルサルコシナート、N-ミリストイルサルコシナート、N-ラウロイルグリシン、N‐ミリストイルグリシン、N-パルミトイルグリシン、N-ラウロイルグルタメート、N‐ココイルグルタメート、カリウムN‐ココイルグルタメート、カリウムN‐ラウロイルサルコシナート、N-ラウロイルアラニナート、N-ミリストイルアラニナート、カリウムN‐ココイルアラニナート、N‐ココイルグルタメート、それらの任意な塩、またはそれらの任意な組み合わせである、請求項6に記載の方法。
- 前記抑制剤はアミノ酸誘導体であり、かつ該アミノ酸誘導体がサルコシン誘導体である、請求項1に記載の方法。
- 前記抑制剤は、N‐ココイルサルコシナート、N-ラウロイルサルコシナート、N-ステアロイルサルコシナート、N-オレオイルサルコシナート、N-ミリストイルサルコシナート、またはそれらの任意な組み合わせである、請求項8に記載の方法。
- 前記抑制剤はカルボキシラートであり、かつ該カルボキシラートがデカン酸、ドデカン酸、ミリスチン酸、パルミチン酸、それらの任意な塩、それらの任意な構造異性体、またはそれらの任意な組み合わせである、請求項1−4のいずれか一項に記載の方法。
- 前記抑制剤はホスホナートであり、かつ該ホスホナートがテトラデシルホスホン酸、ヘキサデシルホスホン酸、それらの任意な塩、それらの任意な構造異性体、またはそれらの任意な組み合わせである、請求項1−4のいずれか一項に記載の方法。
- 前記抑制剤はスルホナートであり、且つ該スルホナートが1‐ヘキサデカンスルホナート、オレフィンスルホナート、またはそれらの組み合わせである、請求項1−4のいずれか一項に記載の方法。
- 前記抑制剤はスルホナートであり、且つ該スルホナートが金属塩C14−17第二級アルキルスルホナートである、請求項1−4のいずれか一項に記載の方法。
- 前記抑制剤が約0.004〜約0.010重量%の量で存在する、請求項1−13のいずれか一項に記載の方法。
- (a)研磨剤
(b)速度促進剤
(c)両性界面活性剤、スルホナート、ホスホナート、カルボキシラート、アミノ酸誘導体、リン酸エステル、イセチオナート、スルファート、スルホスクシナート、スルホシンナマート、またはそれらの組み合わせを含む腐食抑制剤
(d)酸化剤、及び
(e)水溶性担体
を含む化学機械研磨組成物。 - 前記酸化剤はコバルトを酸化する化合物である、請求項15に記載の化学機械研磨組成物。
- 前記アミノ酸誘導体はアミノ酸アミドである、請求項15または16に記載の化学機械研磨組成物。
- 前記アミノ酸アミドは、N‐ココイルサルコシナート、N-ラウロイルサルコシナート、N-ステアロイルサルコシナート、N-オレオイルサルコシナート、N-ミリストイルサルコシナート、N-ラウロイルグリシン、N‐ミリストイルグリシン、N-パルミトイルグリシン、N-ラウロイルグルタメート、N‐ココイルグルタメート、カリウムN‐ココイルグルタメート、カリウムN‐ラウロイルサルコシナート、N-ラウロイルアラニナート、N-ミリストイルアラニナート、カリウムN‐ココイルアラニナート、N‐ココイルグルタメート、それらの任意な塩、またはそれらの任意な組み合わせである、請求項17に記載の化学機械研磨組成物。
- 前記抑制剤はアミノ酸誘導体であり、かつ該アミノ酸誘導体がサルコシン誘導体である、請求項15または16に記載の化学機械研磨組成物。
- 前記抑制剤は、N‐ココイルサルコシナート、N-ラウロイルサルコシナート、N-ステアロイルサルコシナート、N-オレオイルサルコシナート、N-ミリストイルサルコシナート、またはそれらの任意な組み合わせである、請求項19に記載の化学機械研磨組成物。
- 前記抑制剤はカルボキシラートであり、かつ該カルボキシラートがデカン酸、ドデカン酸、ミリスチン酸、パルミチン酸、それらの任意な塩、それらの任意な構造異性体、またはそれらの任意な組み合わせである、請求項15または16に記載の化学機械研磨組成物。
- 前記抑制剤はホスホナートであり、かつ該ホスホナートがテトラデシルホスホン酸、ヘキサデシルホスホン酸、それらの任意な塩、それらの任意な構造異性体、またはそれらの任意な組み合わせである、請求項15または16に記載の化学機械研磨組成物。
- 前記抑制剤はスルホナートであり、かつ該スルホナートが1‐ヘキサデカンスルホナート、オレフィンスルホナートまたはそれらの組み合わせである、請求項15または16に記載の化学機械研磨組成物。
- 前記抑制剤はスルホナートであり、かつ該スルホナートが金属塩C14−17第二級アルキルスルホナートである、請求項15または16に記載の化学機械研磨組成物。
- 前記抑制剤は約0.004重量%の〜約0.010重量%の量で存在する、請求項15−24のいずれか一項に化学機械研磨組成物。
- 前記アニオン性粒子はアルミナ粒子、シリカ粒子、またはそれらの組み合わせである、請求項15−25のいずれか一項に記載の化学機械研磨組成物。
- 前記研磨剤はシリカ粒子を含み、かつ該シリカ粒子がコロイダルシリカ粒子である、請求項26に記載の化学機械研磨組成物。
- 前記コロイダルシリカ粒子はアニオン性コロイダルシリカ粒子である、請求項27に記載の化学機械研磨組成物。
- 前記研磨剤はコロイダルシリカ粒子を含み、
前記抑制剤はN‐ココイルサルコシナート、N‐ラウロイルサルコシナート、N-ステアロイルサルコシナート、N-オレオイルサルコシナート、N-ミリストイルサルコシナート、またはそれらの任意な組み合わせを含み、及び
研磨組成物のpHは約3〜約8.5である、請求項15に記載の化学機械研磨組成物。 - (i) 基板を提供し、該基板がコバルト層を含み、
(ii) 研磨パッドを提供し、
(iii)請求項15−29のいずれか一項に記載の化学機械研磨組成物を提供し、
(iv)前記研磨パッド及び前記化学機械研磨組成物と前記基板を接触させる、及び
(v)前記基板に対して前記研磨パッドと前記化学機械研磨組成物を動かしてコバルト層の少なくとも一部を擦過させて前記基板を研磨することを備える基板の研磨方法。
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US10124464B2 (en) | 2018-11-13 |
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US20160107289A1 (en) | 2016-04-21 |
KR20170068584A (ko) | 2017-06-19 |
EP3209815B1 (en) | 2021-12-29 |
KR102477843B1 (ko) | 2022-12-16 |
TW201629269A (zh) | 2016-08-16 |
EP3209815A4 (en) | 2018-08-01 |
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