JP2018172284A - 半導体基板および半導体基板の製造方法 - Google Patents
半導体基板および半導体基板の製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 131
- 239000004065 semiconductor Substances 0.000 title claims abstract description 110
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000013078 crystal Substances 0.000 claims abstract description 54
- 150000004767 nitrides Chemical class 0.000 claims abstract description 38
- 239000012535 impurity Substances 0.000 claims abstract description 28
- 125000004429 atom Chemical group 0.000 claims description 61
- 125000004432 carbon atom Chemical group C* 0.000 claims description 44
- 229910052799 carbon Inorganic materials 0.000 claims description 33
- 239000000203 mixture Substances 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 23
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 11
- 229910002704 AlGaN Inorganic materials 0.000 abstract description 7
- 239000010410 layer Substances 0.000 description 430
- 229910002601 GaN Inorganic materials 0.000 description 24
- 230000000052 comparative effect Effects 0.000 description 24
- 239000000872 buffer Substances 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
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- 239000012159 carrier gas Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000171 gas-source molecular beam epitaxy Methods 0.000 description 1
- 235000015220 hamburgers Nutrition 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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- 230000002093 peripheral effect Effects 0.000 description 1
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Abstract
Description
[先行技術文献]
[特許文献]
[特許文献1]特開2011−238685号公報
[特許文献2]国際公開WO2011/102045号
[非特許文献]
[非特許文献1]”High quality GaN grown on Si(111) by gas source molecular beam epitaxy with ammonia”, S. A. Nikishin et. al., Applied Physics letter, Vol.75, 2073(1999)
下地基板102として面方位が(111)の4インチSi基板(厚さ625μm、p型ドープ)を用い、Si基板上に緩衝層104としてAlN層を150nmの厚さで形成した。当該AlN層上に、第1層112としてAlN層を5nmの厚さで形成し、第2層114としてAl0.15Ga0.85N層を16nmの厚さで形成し、第1単位層116とした。第1単位層116を75層形成して第1超格子層110とした後、接続層120として、AlN層を70nmの厚さで形成した。さらに、第3層132としてAlN層を5nmの厚さで形成し、第4層134としてAl0.1Ga0.9N層を16nmの厚さで形成し、第2単位層136とした。第2単位層136を75層形成して第2超格子層130とした後、デバイス基層142として、GaN層を800nmの厚さで形成し、さらに活性層144として、Al0.2Ga0.8N層を20nmの厚さで形成した。なお、第1超格子層110を形成する際の反応温度を変えて複数種類の半導体基板100を作成した。これにより、炭素原子濃度を、1×1018、5×1018、7×1018、1×1019、6×1019(単位はcm−3)の5水準で変化させた複数の半導体基板100を作成した。第1超格子層110の平均格子定数は、0.316187nmであり、第2超格子層130の平均格子定数は、0.316480nmである。接続層120の平均格子定数は0.311200nmである。
比較例として、以下の比較例1〜3を作成した。
[比較例1]:接続層120を設けず、第4層134のAl組成を0.15として第1超格子層110の平均格子定数と第2超格子層130の平均格子定数を同じとし、その他は実施例1と同じにしたもの
[比較例2]:第4層134のAl組成を0.15として第1超格子層110の平均格子定数と第2超格子層130の平均格子定数を同じとし、その他は実施例1と同じにしたもの
[比較例3]:接続層120を設けず、その他は実施例1と同じにしたもの
実施例2の半導体基板は、接続層120の厚さ方向における組成を、第1超格子層110から第2超格子層130に向かってAlNからAl0.3Ga0.7Nまで連続的に変化させた以外は、実施例1と同様に形成した。なお、炭素原子濃度は、1×1019、6×1019(単位はcm−3)の2水準とした。図6は、実施例2の半導体基板の炭素原子濃度に対する反り量と耐電圧を示したグラフである。実施例1との比較がわかりやすいよう、図7を示す。図7は、実施例1および2並びに比較例1から3の半導体基板の炭素原子濃度に対する反り量を示したグラフである。実施例2の半導体基板は、比較例1〜3は勿論、実施例1の半導体基板より反り量が低く抑えられていることがわかる。
実施例3の半導体基板は、第1超格子層110における第1単位層116の層数nと第2超格子層130における第2単位層136の層数mを変えた例を示す。炭素原子濃度を1×1019(cm−3)に固定し、層数nと層数mを変化させたこと以外は、実施例1と同様に半導体基板を形成した。層数nおよび層数mは、n/m=75/75、100/50、1/149の3水準とした。図8は、実施例3の半導体基板の反り量と耐電圧を示したグラフである。層数nと層数mとを変化させることで、反り量が制御できることがわかる。
実施例4の半導体基板は、下地基板102としてサファイア基板を用いた場合を示す。下地基板102としてサファイア基板を用い、炭素原子濃度を1×1019(cm−3)に固定し、層数nと層数mを変化させたこと以外は、実施例1と同様に半導体基板を形成した。層数nおよび層数mは、n/m=75/75、50/100の2水準とした。図9は、実施例4の半導体基板の反り量を示したグラフである。下地基板102がサファイア基板の場合であっても、第1超格子層110および第2超格子層130における単位層の層数nおよび層数mを変化することで、反り量を制御できることがわかる。
実施例5は、第4層134であるAlGaN層のAl組成を、0.15から0.10の範囲で変化させた半導体基板の例を示す。炭素原子濃度は、1×1019(cm−3)で固定し、その他は実施例1と同じとした。Al組成は、0.15、0.14、0.13、0.12、0.11、0.10の6水準とした。Al組成の水準が0.10および0.15の場合は、各々、実施例1および比較例2の炭素原子濃度が1×1019(cm−3)の場合に対応するので、Al組成の水準が0.10および0.15の場合の半導体基板として、各々、実施例1および比較例2の炭素原子濃度が1×1019(cm−3)の場合の半導体基板を用いた。Al組成が0.15、0.14、0.13、0.12、0.11および0.10の場合の第2超格子層130の平均格子定数は、各々、0.316187、0.316245、0.316304,0.316363,0.316421および0.316480(単位はnm)である。第1超格子層110の平均格子定数が0.316187nmであることから、Al組成が0.15、0.14、0.13、0.12、0.11および0.10の場合の平均格子定数差(第2超格子層130の平均格子定数−第1超格子層110の平均格子定数)は、各々、0.000000、0.000059、0.000117、0.000176、0.000235および0.000293(単位はnm)である。
Claims (12)
- 下地基板と、単一の第1超格子層と、単一の接続層と、第2超格子層と、窒化物半導体結晶層とを有し、
前記下地基板、前記第1超格子層、前記接続層、前記第2超格子層および前記窒化物半導体結晶層が、前記下地基板、前記第1超格子層、前記接続層、前記第2超格子層、前記窒化物半導体結晶層の順に位置し、
前記第1超格子層が、第1層および第2層からなる第1単位層を複数有し、
前記第2超格子層が、第3層および第4層からなる第2単位層を複数有し、
前記第1層が、Alx1Ga1−x1N(0<x1≦1)からなり、
前記第2層が、Aly1Ga1−y1N(0≦y1<1、x1>y1)からなり、
前記第3層が、Alx2Ga1−x2N(0<x2≦1)からなり、
前記第4層が、Aly2Ga1−y2N(0≦y2<1、x2>y2)からなり、
前記第1超格子層の平均格子定数と前記第2超格子層の平均格子定数とが異なり、
前記第1超格子層および前記第2超格子層から選択された1以上の層に、耐電圧を向上する不純物原子が、7×1018[atoms/cm3]を超える密度で含まれ、
前記不純物原子が、炭素である
半導体基板。 - 前記不純物原子が、C原子、Fe原子、Mn原子、Mg原子、V原子、Cr原子、Be原子およびB原子からなる群から選択された1種以上の原子である
請求項1に記載の半導体基板。 - 前記不純物原子が、C原子またはFe原子である
請求項2に記載の半導体基板。 - 前記接続層が、前記第1超格子層および前記第2超格子層に接する結晶層である
請求項1から請求項3の何れか一項に記載の半導体基板。 - 前記接続層が、AlzGa1−zN(0≦z≦1)からなる
請求項1から請求項4の何れか一項に記載の半導体基板。 - 前記接続層の厚さが、前記第1層、前記第2層、前記第3層および前記第4層の何れの層の厚さより大きい
請求項1から請求項5の何れか一項に記載の半導体基板。 - 前記接続層の平均格子定数が、前記第1超格子層および前記第2超格子層のいずれの平均格子定数より小さい
請求項1から請求項6の何れか一項に記載の半導体基板。 - 前記第1超格子層が、前記第1層および前記第2層からなる前記第1単位層を1層〜200層有する請求項1から請求項7の何れか一項に記載の半導体基板。
- 前記第2超格子層が、前記第3層および前記第4層からなる前記第2単位層を1層〜200層有する請求項1から請求項8の何れか一項に記載の半導体基板。
- 請求項1から請求項9の何れか一項に記載の半導体基板の製造方法であって、
前記第1層および前記第2層を第1単位層とし、前記第1単位層の形成をn回繰り返して前記第1超格子層を形成するステップと、
前記接続層を形成するステップと、
前記第3層および前記第4層を第2単位層とし、前記第2単位層の形成をm回繰り返して前記第2超格子層を形成するステップと、
前記窒化物半導体結晶層を形成するステップと、を有し、
前記第1超格子層を形成するステップおよび前記第2超格子層を形成するステップから選択された1以上のステップにおいて、形成される層の耐電圧を向上する不純物原子が、7×1018[atoms/cm3]を超える密度で含まれるよう当該層を形成する
半導体基板の製造方法。 - 前記窒化物半導体結晶層の組成および厚さに応じ、前記半導体基板の前記窒化物半導体結晶層の表面における反りが50μm以下となるよう、前記第1層〜第4層の各組成、前記第1層〜第4層の各厚さ、前記第1超格子層における単位層の繰り返し数nおよび前記第2超格子層における単位層の繰り返し数mから選択された1以上のパラメータを調整する
請求項10に記載の半導体基板の製造方法。 - 前記窒化物半導体結晶層の組成および厚さに応じ、前記半導体基板の前記窒化物半導体結晶層の表面における反りが50μm以下となるよう、前記第1超格子層における単位層の繰り返し数nおよび前記第2超格子層における単位層の繰り返し数mを調整する
請求項11に記載の半導体基板の製造方法。
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CA3132525A1 (en) * | 2016-05-26 | 2017-11-30 | Robbie Jorgenson | Group iiia nitride growth method and system |
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