JP2018056445A - キャリア基材付き配線基板、キャリア基材付き配線基板の製造方法 - Google Patents
キャリア基材付き配線基板、キャリア基材付き配線基板の製造方法 Download PDFInfo
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Abstract
【解決手段】キャリア基材付き配線基板10は、キャリア基材20と配線基板30とを有している。配線基板30は、配線層31と、絶縁層32と、配線層33と、絶縁層34と、配線層35とが順次積層された構造、所謂コアレス構造を有している。ソルダーレジスト層36は、絶縁層34の下面に、配線層35の一部を覆うように形成されている。キャリア基材20は、配線基板30の製品エリアを露出するように形成された開口部21Xを有し、配線基板30に接着された第1キャリア基材21と、第1キャリア基材21の開口部21X内に配置された第2キャリア基材22と、第1キャリア基材21と第2キャリア基材22とに接着された第3キャリア基材23とを含む。
【選択図】図1
Description
なお、添付図面は、便宜上、特徴を分かりやすくするために特徴となる部分を拡大して示している場合があり、各構成要素の寸法比率などが実際と同じであるとは限らない。また、断面図では、各部材の断面構造を分かりやすくするために、一部の部材のハッチングを梨地模様に代えて示し、一部の部材のハッチングを省略している。なお、本明細書において、「平面視」とは、対象物を図1等の鉛直方向(図中上下方向)から視ることを言い、「平面形状」とは、対象物を図1等の鉛直方向から視た形状のことを言う。
配線層31は、絶縁層32の上面側において、絶縁層32に埋め込まれるように形成されている。具体的には、配線層31は、配線層31の上面と絶縁層32の上面が面一となるように、絶縁層32に埋め込まれている。配線層31の上面の一部は、配線基板30に実装される半導体素子51(図9(a)参照)が接続される部品接続端子P1として利用される。絶縁層32は、配線層31の下面及び側面を覆うように形成されている。配線層33は、絶縁層32の下面に形成されている。配線層33は、絶縁層32の下面に形成された配線パターンと、絶縁層32を貫通して配線層31に接続されたビア配線とを有している。絶縁層34は、絶縁層32の下面に、配線層33を覆うように形成されている。配線層35は、絶縁層34の下面に形成されている。配線層35は、絶縁層34の下面に形成された配線パターンと、絶縁層34を貫通して配線層33に接続されたビア配線とを有している。つまり、配線基板30は、配線層31と、絶縁層32と、配線層33と、絶縁層34と、配線層35とが順次積層された構造、所謂コアレス構造を有している。
キャリア基材20は、第1キャリア基材21、第2キャリア基材22、第3キャリア基材23を有している。
以下の説明では、各製品エリアC1を枠状に囲み、複数の製品区A1を露出する開口部21Xとして説明する。
第1キャリア基材21の側面21c及び接着層25の側面25cと第2キャリア基材22の側面22c及び接着層26の側面26cとは、離間して対向するように形成されている。第1キャリア基材21の側面21c及び接着層25の側面25cと第2キャリア基材22の側面22c及び接着層26の側面26cの間には、隙間Sが形成されている。
なお、各図の説明に必要な部材について符号を付し、説明しない部材については符号を省略する場合がある。また、説明の便宜上、最終的に半導体装置の各構成要素となる部分には、最終的な構成要素の符号を付して説明する。
第3キャリア基材23は、第3キャリア基材23は、接着層26、27を介して第2キャリア基材22の下面22b側に接着されている。具体的には、第3キャリア基材23は、上面23aと下面23bを備えている。第3キャリア基材23の上面23aは、接着層27の下面27bと接着している。また、第3キャリア基材23の下面23bは、露出している。
図4(a)に示す工程では、支持基板121と、支持基板121の両面に積層した接着層122及び金属層123とを有する支持体120を形成する。
図8(a)に示す工程では、金属層123(図7参照)を例えばエッチングにより除去し、配線層31及び絶縁層32の上面を露出する。
図9(a)に示す工程では、キャリア基材付き配線基板10の上面に半導体素子51を部品接続端子P1に実装し、半導体素子51を封止する封止樹脂52を形成する。このとき、上述の電気検査においてマーキングされていない配線基板30、つまり良品と判定された配線基板30に対して半導体素子51を実装し、マーキングされた配線基板30、つまり不良品と判定された配線基板30に対して半導体素子51を実装しない。これにより、不良品の配線基板に対して半導体素子51を実装する無駄を省くことができる。また、不良品の配線基板に実装した半導体素子51が無駄になることを防止することができる。
配線基板30は、第1キャリア基材21が貼り付けられた状態で、電気検査へ搬送される。第1キャリア基材21は、配線基板30の製品エリアC1を露出するように形成された開口部21Xを有している。従って、第1キャリア基材21を貼り付けた状態で配線基板30の電気検査を実施することができる。
(1)キャリア基材付き配線基板10は、キャリア基材20と配線基板30とを有している。配線基板30は、配線層31と、絶縁層32と、配線層33と、絶縁層34と、配線層35とが順次積層された構造、所謂コアレス構造を有している。ソルダーレジスト層36は、絶縁層34の下面に、配線層35の一部を覆うように形成されている。ソルダーレジスト層36は、配線層35の下面の一部を外部接続端子P2として露出する開口部36Xを有している。
・上記各形態において、第1キャリア基材21の開口部21Xを、図13に示すように、製品区A1毎に形成してもよい。
20 キャリア基材
21 第1キャリア基材
21X 開口部
22 第2キャリア基材
23 第3キャリア基材
25,26,27 接着層
30 配線基板
31,33,35 配線層
32,34 絶縁層
36 ソルダーレジスト層
36X 開口部
101 基板
102 接着層(第1の接着層)
111 基板
112 接着層(第2の接着層)
A1 製品区
C1 製品エリア
P1 部品接続端子
P2 外部接続端子
Claims (8)
- 配線基板と、
前記配線基板の製品エリアを露出する開口部を有し、前記配線基板の下面に接着層を介して接着された第1キャリア基材と、
第1キャリア基材の開口部内に配置され、前記配線基板の下面に接する第2キャリア基材と、
前記第1キャリア基材の前記開口部を覆い、前記第1キャリア基材及び前記第2キャリア基材と接着層を介して接着された第3キャリア基材と、
を有すること、
を特徴とするキャリア基材付き配線基板。 - 前記第3キャリア基材の上面の全体に接着層が形成され、
前記第1キャリア基材は、前記第3キャリア基材の上面の接着層を介して前記第3キャリア基材に接着され、
前記第2キャリア基材は、前記第2キャリア基材の下面に形成された接着層と前記第3の上面の接着層とを介して前記第3キャリア基材に接着されていること、
を特徴とする請求項1に記載のキャリア基材付き配線基板。 - 前記第2キャリア基材は、前記第1キャリア基材と同じ厚さであり、
前記第2キャリア基材の下面の接着層の厚さは、前記第1キャリア基材を前記配線基板に接着する接着層の厚さと同じであること、
を特徴とする請求項2に記載のキャリア基材付き配線基板。 - 前記第3キャリア基材を前記第1キャリア基材に接着する接着層の接着力より弱い接着力の接着層を介して前記第1キャリア基材と前記配線基板とが接着されていること、
を特徴とする請求項1〜3のいずれか1項に記載のキャリア基材付き配線基板。 - 配線基板の製品エリアに対応する開口部を有する枠状の第1キャリア基材を用意する工程と、
支持体上に配線層と絶縁層とを積層して前記配線基板を形成する工程と、
前記配線基板に前記第1キャリア基材を貼り付ける工程と、
前記支持体を除去する工程と、
前記第1キャリア基材の開口部に挿通したプローブ端子を介して前記配線基板の電気検査を行う工程と、
前記第1キャリア基材の開口部内に第2キャリア基材を配置し、前記第1キャリア基材の前記開口部を覆う第3キャリア基材を前記第1キャリア基材に貼り付ける工程と、
を有するキャリア基材付き配線基板の製造方法。 - 前記第1キャリア基材を用意する工程において、1枚の基板を切断加工して前記開口部を有する前記第1キャリア基材を用意するとともに、前記開口部に対応して切断した部材を前記第2キャリア基材とすること、
を特徴とする請求項5に記載のキャリア基材付き配線基板の製造方法。 - 前記第1キャリア基材を用意する工程において、一面に第1の接着層が形成された1枚の基板を切断して前記開口部を有する前記第1キャリア基材を用意するとともに、前記開口部に対応して切断した部材を前記第2キャリア基材とし、
前記第1の接着層を介して前記第1キャリア基材を前記配線基板に接着し、
一面に第2の接着層が形成された第3キャリア基材に、前記第2の接着層と前記第1の接着層を介して前記第2キャリア基材を接着し、前記第3キャリア基材を前記第2の接着層を介して前記第1キャリア基材に貼り付けること、
を特徴とする請求項5に記載のキャリア基材付き配線基板の製造方法。 - 前記第3キャリア基材を前記第1キャリア基材に接着する前記第1の接着層の接着力より弱い接着力の前記1の接着層を介して前記第1キャリア基材と前記配線基板とが接着されていること、
を特徴とする請求項7に記載のキャリア基材付き配線基板の製造方法。
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