JP6637864B2 - キャリア基材付き配線基板、キャリア基材付き配線基板の製造方法 - Google Patents
キャリア基材付き配線基板、キャリア基材付き配線基板の製造方法 Download PDFInfo
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- JP6637864B2 JP6637864B2 JP2016191485A JP2016191485A JP6637864B2 JP 6637864 B2 JP6637864 B2 JP 6637864B2 JP 2016191485 A JP2016191485 A JP 2016191485A JP 2016191485 A JP2016191485 A JP 2016191485A JP 6637864 B2 JP6637864 B2 JP 6637864B2
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
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- Ceramic Engineering (AREA)
- Geometry (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
なお、添付図面は、便宜上、特徴を分かりやすくするために特徴となる部分を拡大して示している場合があり、各構成要素の寸法比率などが実際と同じであるとは限らない。また、断面図では、各部材の断面構造を分かりやすくするために、一部の部材のハッチングを梨地模様に代えて示し、一部の部材のハッチングを省略している。なお、本明細書において、「平面視」とは、対象物を図1等の鉛直方向(図中上下方向)から視ることを言い、「平面形状」とは、対象物を図1等の鉛直方向から視た形状のことを言う。
配線層31は、絶縁層32の上面側において、絶縁層32に埋め込まれるように形成されている。具体的には、配線層31は、配線層31の上面と絶縁層32の上面が面一となるように、絶縁層32に埋め込まれている。配線層31の上面の一部は、配線基板30に実装される半導体素子51(図7(a)参照)が接続される部品接続端子P1として利用される。絶縁層32は、配線層31の下面及び側面を覆うように形成されている。配線層33は、絶縁層32の下面に形成されている。配線層33は、絶縁層32の下面に形成された配線パターンと、絶縁層32を貫通して配線層31に接続されたビア配線とを有している。絶縁層34は、絶縁層32の下面に、配線層33を覆うように形成されている。配線層35は、絶縁層34の下面に形成されている。配線層35は、絶縁層34の下面に形成された配線パターンと、絶縁層34を貫通して配線層33に接続されたビア配線とを有している。つまり、配線基板30は、配線層31と、絶縁層32と、配線層33と、絶縁層34と、配線層35とが順次積層された構造、所謂コアレス構造を有している。
キャリア基材21は、ソルダーレジスト層36の下面36bに、接着層22により接着されている。
キャリア基材21としては、例えばコア基板、金属箔、フィルムを用いることができる。コア基板は、補強材と、補強材に含浸した熱硬化性樹脂の硬化物との複合体であるガラスエポキシ基板である。補強材は、例えば、ガラスクロス(ガラス織布)、ガラス不織布、アラミド織布、アラミド不織布、液晶ポリマ(Liquid Crystal Polymer:LCP)織布、LCP不織布である。熱硬化性の絶縁性樹脂は、例えば、エポキシ樹脂、ポリイミド樹脂、シアネート樹脂である。金属箔の材料としては、例えば銅、ステンレス、等を用いることができる。フィルムの材料としては、例えばエポキシ系樹脂、フェノール系樹脂、ポリイミド系樹脂、等を用いることができる。
なお、各図の説明に必要な部材について符号を付し、説明しない部材については符号を省略する場合がある。また、説明の便宜上、最終的に半導体装置の各構成要素となる部分には、最終的な構成要素の符号を付して説明する。
支持基板101としては、例えば、ガラスクロス(織布)やガラス不織布又はアラミド繊維等にエポキシ系樹脂等の樹脂を含侵させた部材等を用いることができる。接着層102としては、例えば、銅箔、アルミ箔、ニッケル箔、亜鉛箔等の金属箔、セラミック板、アクリルやポリイミド等の樹脂を主成分とする樹脂シート等を用いることができる。金属層103としては、例えば、銅箔等を用いることができる。
図5(a)に示す工程では、金属層103(図4参照)を例えばエッチングにより除去し、配線層31及び絶縁層32の上面を露出する。
図7(a)に示す工程では、キャリア基材付き配線基板10の上面に半導体素子51を部品接続端子P1に実装し、半導体素子51を封止する封止樹脂52を形成する。このとき、上述の電気検査においてマーキングされていない配線基板30、つまり良品と判定された配線基板30に対して半導体素子51を実装し、マーキングされた配線基板30、つまり不良品と判定された配線基板30に対して半導体素子51を実装しない。これにより、不良品の配線基板に対して半導体素子51を実装する無駄を省くことができる。また、不良品の配線基板に実装した半導体素子51が無駄になることを防止することができる。
(1)キャリア基材付き配線基板10は、キャリア基材21と接着層22と配線基板30とを有している。配線基板30は、配線層31と、絶縁層32と、配線層33と、絶縁層34と、配線層35とが順次積層された構造、所謂コアレス構造を有している。ソルダーレジスト層36は、絶縁層34の下面に、配線層35の一部を覆うように形成されている。ソルダーレジスト層36は、配線層35の下面の一部を外部接続端子P2として露出する開口部36Xを有している。キャリア基材21は、接着層22を介してソルダーレジスト層36の下面36bに接着されている。このキャリア基材21により、シート状のキャリア基材付き配線基板10を形成した後の電気検査でコアレス構造の配線基板30を容易にハンドリングすることができる。
図10は、参考例のキャリア基材付き配線基板200を示す。このキャリア基材付き配線基板200について、上述した実施形態の各部材と同じ構造の部材については同じ符号を付して説明の一部または全てを省略する。
キャリア基材211は、ソルダーレジスト層36の下面36bに、接着層212により接着されている。
図11(a)に示す工程では、キャリア基材211の上面に接着層212とセパレータ213とを積層し、これらを貫通する開口部214Xを形成する。開口部214Xは、キャリア基材211の開口部211Xと、接着層212の開口部212Xと、セパレータ213の開口部213Xを含む。開口部214Xは、例えばパンチやドリルなどの機械加工、レーザ加工、等により形成することができる。
支持基板101としては、例えば、ガラスクロス(織布)やガラス不織布又はアラミド繊維等にエポキシ系樹脂等の樹脂を含侵させた部材等を用いることができる。接着層102としては、例えば、銅箔、アルミ箔、ニッケル箔、亜鉛箔等の金属箔、セラミック板、アクリルやポリイミド等の樹脂を主成分とする樹脂シート等を用いることができる。金属層103としては、例えば、銅箔等を用いることができる。
図15(a)に示す工程では、図14に示す金属層103を、例えばエッチングにより除去し、配線層31及び絶縁層32の上面を露出する。この工程において、キャリア基材211の開口部211Xは、接着層221及び保護フィルム222により閉塞されている。従って、エッチング液は、開口部211Xに入り込まない。つまり、外部接続端子P2がエッチング液から保護されている。
図16(a)に示す工程では、キャリア基材付き配線基板200の上面に半導体素子51を実装し、半導体素子51を封止する封止樹脂52を形成する。このとき、上述の電気検査においてマーキングされていない配線基板30、つまり良品と判定された配線基板30に対して半導体素子51を実装し、マーキングされた配線基板30、つまり不良品と判定された配線基板30に対して半導体素子51を実装しない。これにより、不良品の配線基板に対して半導体素子51を実装する無駄を省くことができる。
尚、上記各実施形態は、以下の態様で実施してもよい。
・上記実施形態に対し、キャリア基材付き配線基板の構成を適宜変更してもよい。
・上記各実施形態に対し、配線基板30の絶縁層32の上面に、部品接続端子P1を露出する開口部を有するソルダーレジスト層を形成してもよい。
21 キャリア基材
21X 開口部
22 接着層
30 配線基板
31,33,35 配線層
32,34 絶縁層
36 ソルダーレジスト層
36X 開口部
P1 部品接続端子
P2 外部接続端子
Claims (10)
- キャリア基材付き配線基板は、
配線基板であって、絶縁層と、前記絶縁層の下面に設けられた配線層と、前記絶縁層の下面を覆うとともに前記配線層の一部を外部接続端子として露出する開口部を有するソルダーレジスト層と、を有する配線基板と、
前記ソルダーレジスト層の開口部と連通する開口部を有する接着層と、
前記ソルダーレジスト層に前記接着層を介して接着されることによりキャリア基材付き配線基板とされ、前記ソルダーレジスト層の開口部及び前記接着層の開口部と連通し、前記外部接続端子を露出する開口部を有するキャリア基材と、を有し、
前記キャリア基材の開口部の開口径及び前記接着層の開口部の開口径は、前記ソルダーレジスト層の開口部の開口径よりも小さく、
前記接着層は、前記ソルダーレジスト層から剥離可能であって、前記接着層と前記キャリア基材を前記キャリア基材付き配線基板から除去するための層であること、を特徴とするキャリア基材付き配線基板。 - 前記キャリア基材は、前記接着層と接する上面と、前記上面とは反対側の下面を有し、
前記キャリア基材の開口部は、前記キャリア基材の上面における第1開口径と、前記キャリア基材の下面において前記第1開口径よりも大きい第2開口径を有し、前記第1開口径は、前記ソルダーレジスト層の開口部の開口径よりも小さいことを特徴とする請求項1に記載のキャリア基材付き配線基板。 - 前記配線基板は、交互に積層された複数の絶縁層と複数の配線層とを有し、絵複数の絶縁層のうち最上層の前記絶縁層及び前記配線層のうち最上層の前記配線層の上面は露出されており、前記最上層の前記配線層は電子部品を搭載する部品接続端子を有していること、を特徴とする請求項1又は2に記載のキャリア基材付き配線基板。
- 前記キャリア基材の開口部は、前記キャリア基材の下面から上面に向けてその開口径が縮小するテーパ状であり、
前記接着層の開口部は、前記接着層の下面から上面に向けてその開口径が縮小するテーパ状であること、を特徴とする請求項1〜3のいずれか一項に記載のキャリア基材付き配線基板。 - 前記接着層は、紫外線の照射により接着力が低下するものであることを特徴とする請求項1〜4のいずれか一項に記載のキャリア基材付き配線基板。
- 前記接着層は、接着力を低下させることができるものであることを特徴とする請求項1〜4のいずれか一項に記載のキャリア基材付き配線基板。
- 支持体の表面に、配線層と絶縁層とを交互に積層し、前記配線層の一部を外部接続端子として露出する開口部を有するソルダーレジスト層を形成し、前記配線層と前記絶縁層と前記ソルダーレジスト層を有する配線基板を形成する工程と、
前記ソルダーレジスト層の上面に接着層を介してキャリア基材を貼付する工程と、
前記キャリア基材及び前記接着層に、前記ソルダーレジスト層の開口部と連通して前記外部接続端子を露出し、前記ソルダーレジスト層の開口部の開口径よりも小さな開口径の開口部を形成する工程と、
前記キャリア基材及び前記接着層の開口部から接触子を前記外部接続端子に接触させて電気検査を行う工程と、を有するキャリア基材付き配線基板の製造方法。 - 前記キャリア基材を貼付する工程の後、前記支持体から前記配線基板を分離する工程を実行した後、前記キャリア基材に開口部を形成すること、を特徴とする請求項7に記載のキャリア基材付き配線基板の製造方法。
- 前記支持体の上下両面に前記配線基板をそれぞれ形成し、上下の前記ソルダーレジスト層に前記接着層を介して前記キャリア基材をそれぞれ貼付すること、を特徴とする請求項7又は8に記載のキャリア基材付き配線基板の製造方法。
- 前記キャリア基材は、接着層と接する上面と、上面とは反対側の下面を有し、
前記キャリア基材の開口部は、前記キャリア基材の上面における第1開口径と、前記キャリア基材の下面において前記第1開口径よりも大きい第2開口径を有し、前記第1開口径は、前記ソルダーレジスト層の開口部の開口径よりも小さいことを特徴とする請求項7〜9のいずれか一項に記載のキャリア基材付き配線基板の製造方法。
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