JP2018053370A - 多結晶シリコンを製造する反応器、およびそのような反応器の構成部品上のシリコン含有層を除去する方法 - Google Patents
多結晶シリコンを製造する反応器、およびそのような反応器の構成部品上のシリコン含有層を除去する方法 Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
- B01D45/16—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by the winding course of the gas stream, the centrifugal forces being generated solely or partly by mechanical means, e.g. fixed swirl vanes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D50/00—Combinations of methods or devices for separating particles from gases or vapours
- B01D50/20—Combinations of devices covered by groups B01D45/00 and B01D46/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
- B24C1/086—Descaling; Removing coating films
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C11/00—Selection of abrasive materials or additives for abrasive blasts
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
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- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/442—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using fluidised bed process
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- General Chemical & Material Sciences (AREA)
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Abstract
Description
I 三次元でほぼ等しい空間を有する鋭いエッジ(例:立方体)
II 鋭いエッジであって、その1つが他の2つより著しく長いエッジ(例:角柱、ブレード)
III 鋭いエッジであって、その1つが他よりも著しく小さいエッジ(例:パネル、薄片)
IV 三次元でほぼ等しい空間を有する丸まったエッジ(例:球)
V 繊維状、糸状、カール状、絡み合っている。
2 内部反応管
3 中間空間
4 流動床
5 加熱装置
6 反応ガス混合物
7 流動化ガス
8 反応器ヘッド
9 反応器オフガス
10 オフガス熱交換器
11 シード供給装置
12 シード
13 生成物(ポリシリコン顆粒)
14 取り出し導管
15 反応器底部
16 供給装置
17 洗浄粒子
18 高温計
19 底部ガスノズル
20 反応ガスノズル
21 フィルタ
22 粒子流
23 粒子を含まないガス流
24 サイクロン
25 シリコン含有粒子(粒子洗浄)
26 フィルタ
27 反応器オフガスダスト
Claims (20)
- 多結晶シリコンが製造される反応器の構成部品上のシリコン含有堆積物を除去する方法であって、シリコン含有粒子により該堆積物を機械的に除去する方法。
- 反応器が動作中に、即ち多結晶シリコンが製造されている最中に堆積物が除去される、請求項1に記載の方法。
- 反応器の構成部品上の堆積物が除去される、該構成部品がオフガス管である、請求項1または請求項2に記載の方法。
- オフガス管がオフガス熱交換器である、請求項3に記載の方法。
- オフガス熱交換器がリービッヒ管である、請求項4に記載の方法。
- 反応器がフィラメント棒上に多結晶シリコンを蒸着させるCVD反応器である、請求項1から5のいずれか一項に記載の方法。
- 反応器が、反応器に添加されたシリコン種粒子上への多結晶シリコンの蒸着により多結晶シリコン顆粒を製造する流動床反応器である、請求項1から5のいずれか一項に記載の方法。
- 堆積物を除去するためのシリコン含有粒子が種粒子に添加され、流動床反応器に連続的に供給される、請求項6に記載の方法。
- 堆積物を除去するためのシリコン含有粒子が、他の物質の混合なしで別々に流動床反応器に供給される、請求項6に記載の方法。
- シリコン含有粒子が、オフガス熱交換機での冷却後に、周期的または連続的にオフガスからサイクロンまたは表面フィルタにより分離され、次いでダストにまみれた反応器オフガスを入れた直後にオフガス熱交換器に戻される、請求項7から9のいずれか一項に記載の方法。
- 堆積物を除去するシリコン含有粒子が、1μm<x50.3<400μm、好ましくは30μm<x50.3<300μmの中央粒径を有する、請求項1から10のいずれか一項に記載の方法。
- 堆積物を除去するシリコン含有粒子が、純粋なシリコン、SiC、またはSiO2である、請求項1から11のいずれか一項に記載の方法。
- シリコン含有粒子が縁の鋭い粒子である、請求項1から12のいずれか一項に記載の方法。
- エッチングガスが堆積物の除去のために混合される、請求項1から13のいずれか一項に記載の方法。
- 多結晶シリコンを製造する反応器であって、反応容器(1)、その上に多結晶シリコンを蒸着させるのに適した、反応容器(1)内のシリコンからなる複数の基板、反応ガスを反応容器(1)に供給するための1つ以上のノズル(19、20)、反応器オフガス(9)を反応容器(1)から除去する装置、除去された反応器オフガスを冷却するオフガス熱交換器(10)、および反応器オフガスおよびシリコン含有粒子をオフガス熱交換器(10)に供給するのに適した、シリコン含有粒子のための供給装置(16)を備えた反応器。
- 反応器は、棒状の多結晶シリコンを製造するCVD反応器であり、基板はシリコンのフィラメント棒であり、フィラメント棒用電源が存在し、電流の直接通過によってフィラメント棒を加熱するのに適している、請求項15に記載の反応器。
- 反応器は、顆粒ポリシリコンを製造する流動床反応器であり、基板がシリコン種粒子であり、反応容器(1)内の、顆粒ポリシリコンを有する流動床のための内部反応器管(2)および反応器底部、内部反応器管(2)内の流動床を加熱する加熱装置(5)、流動化ガスを供給するための少なくとも1つの底部ガスノズル(19)および反応ガスを供給するための少なくとも1つの反応ガスノズル(20)、シリコン種粒子を供給するための供給装置(11)、ならびに顆粒ポリシリコンのための取り出し導管(14)を備える、請求項15に記載の反応器。
- オフガス熱交換器(10)の下流に接続され、粒子およびガスを分離するのに適したフィルタ(21)をさらに備える、請求項17に記載の反応器。
- 反応器オフガスから粒子を連続的に分離するためにオフガス熱交換器(10)の下流に接続され、シリコン含有粒子のための供給装置(16)と連通可能に接続されたサイクロン(24)をさらに備える、請求項17に記載の反応器。
- 反応器オフガスダスト(27)を分離するための、サイクロン(24)の下流に接続されたフィルタ(26)をさらに備える、請求項19に記載の反応器。
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DE102013209076.5A DE102013209076A1 (de) | 2013-05-16 | 2013-05-16 | Reaktor zur Herstellung von polykristallinem Silicium und Verfahren zur Entfernung eines Silicium enthaltenden Belags auf einem Bauteil eines solchen Reaktors |
DE102013209076.5 | 2013-05-16 |
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JP2016513284A Division JP6246905B2 (ja) | 2013-05-16 | 2014-05-06 | 多結晶シリコンを製造する反応器、およびそのような反応器の構成部品上のシリコン含有層を除去する方法 |
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JP2017218791A Pending JP2018053370A (ja) | 2013-05-16 | 2017-11-14 | 多結晶シリコンを製造する反応器、およびそのような反応器の構成部品上のシリコン含有層を除去する方法 |
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US (2) | US9732420B2 (ja) |
EP (1) | EP2997175B1 (ja) |
JP (2) | JP6246905B2 (ja) |
KR (2) | KR101769229B1 (ja) |
CN (1) | CN105229198B (ja) |
DE (1) | DE102013209076A1 (ja) |
ES (1) | ES2666391T3 (ja) |
MY (1) | MY171934A (ja) |
SA (1) | SA515370060B1 (ja) |
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US10526707B2 (en) * | 2012-08-29 | 2020-01-07 | The University Of Tokyo | Heat exchanger type reaction tube |
TWI576457B (zh) * | 2015-08-04 | 2017-04-01 | 陳柏頴 | 連續式材料低溫優化裝置及方法 |
WO2018230380A1 (ja) * | 2017-06-16 | 2018-12-20 | 株式会社トクヤマ | ポリシリコンの製造方法 |
WO2019037850A1 (de) * | 2017-08-23 | 2019-02-28 | Wacker Chemie Ag | Wirbelschichtreaktor zur herstellung von polykristallinem siliciumgranulat |
CN109467090A (zh) * | 2017-09-07 | 2019-03-15 | 江苏中能硅业科技发展有限公司 | 连续生产粒状多晶硅的方法 |
CA3112945A1 (en) * | 2018-10-24 | 2020-04-30 | Automotive Components Floby Ab | System for preparing an aluminium melt including a fluidization tank |
CN111298726A (zh) * | 2018-12-11 | 2020-06-19 | 新特能源股份有限公司 | 用于流化反应的流化系统 |
CN113375058B (zh) * | 2021-06-15 | 2023-12-01 | 新疆硅基新材料创新中心有限公司 | 一种尾气排放结构和还原炉 |
CN114220561A (zh) * | 2021-11-10 | 2022-03-22 | 华能核能技术研究院有限公司 | 一种高温气冷堆吸收球表面涂层的制备方法及设备 |
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- 2014-05-06 US US14/891,458 patent/US9732420B2/en not_active Expired - Fee Related
- 2014-05-06 MY MYPI2015002577A patent/MY171934A/en unknown
- 2014-05-06 EP EP14721859.8A patent/EP2997175B1/de not_active Not-in-force
- 2014-05-06 CN CN201480028137.6A patent/CN105229198B/zh not_active Expired - Fee Related
- 2014-05-06 JP JP2016513284A patent/JP6246905B2/ja not_active Expired - Fee Related
- 2014-05-06 KR KR1020157035650A patent/KR101769229B1/ko active IP Right Grant
- 2014-05-06 KR KR1020177017243A patent/KR101801344B1/ko active IP Right Grant
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2015
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2017
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TW201445004A (zh) | 2014-12-01 |
US20170159174A1 (en) | 2017-06-08 |
ES2666391T3 (es) | 2018-05-04 |
TWI512137B (zh) | 2015-12-11 |
SA515370060B1 (ar) | 2016-12-14 |
KR101801344B1 (ko) | 2017-11-27 |
JP6246905B2 (ja) | 2017-12-13 |
US20160115591A1 (en) | 2016-04-28 |
JP2016521246A (ja) | 2016-07-21 |
WO2014184043A1 (de) | 2014-11-20 |
EP2997175B1 (de) | 2018-03-07 |
KR20170077268A (ko) | 2017-07-05 |
US9732420B2 (en) | 2017-08-15 |
MY171934A (en) | 2019-11-07 |
CN105229198B (zh) | 2017-09-19 |
DE102013209076A1 (de) | 2014-11-20 |
KR20160010561A (ko) | 2016-01-27 |
KR101769229B1 (ko) | 2017-08-17 |
CN105229198A (zh) | 2016-01-06 |
EP2997175A1 (de) | 2016-03-23 |
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