JP2018025565A5 - - Google Patents

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JP2018025565A5
JP2018025565A5 JP2017201457A JP2017201457A JP2018025565A5 JP 2018025565 A5 JP2018025565 A5 JP 2018025565A5 JP 2017201457 A JP2017201457 A JP 2017201457A JP 2017201457 A JP2017201457 A JP 2017201457A JP 2018025565 A5 JP2018025565 A5 JP 2018025565A5
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image data
wafer
defect
inspection system
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JP2017201457A
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JP6787867B2 (ja
JP2018025565A (ja
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JP2017201457A 2009-01-26 2017-10-18 ウエハ上の欠陥を検出するためのシステムおよび方法 Active JP6787867B2 (ja)

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JP2019205887A JP6957579B2 (ja) 2009-01-26 2019-11-14 ウエハ上の欠陥を検出するためのシステムおよび方法

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US12/359,476 US8223327B2 (en) 2009-01-26 2009-01-26 Systems and methods for detecting defects on a wafer
US12/359,476 2009-01-26

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JP2016093971A Division JP6231156B2 (ja) 2009-01-26 2016-05-09 ウエハ上の欠陥を検出するためのシステムおよび方法

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JP2018025565A JP2018025565A (ja) 2018-02-15
JP2018025565A5 true JP2018025565A5 (enExample) 2020-10-08
JP6787867B2 JP6787867B2 (ja) 2020-11-18

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JP2011548147A Active JP5719782B2 (ja) 2009-01-26 2010-01-22 ウエハ上の欠陥を検出するためのシステムおよび方法
JP2015007021A Pending JP2015096866A (ja) 2009-01-26 2015-01-16 ウエハ上の欠陥を検出するためのシステムおよび方法
JP2016093971A Active JP6231156B2 (ja) 2009-01-26 2016-05-09 ウエハ上の欠陥を検出するためのシステムおよび方法
JP2017201457A Active JP6787867B2 (ja) 2009-01-26 2017-10-18 ウエハ上の欠陥を検出するためのシステムおよび方法
JP2019205887A Active JP6957579B2 (ja) 2009-01-26 2019-11-14 ウエハ上の欠陥を検出するためのシステムおよび方法

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JP2011548147A Active JP5719782B2 (ja) 2009-01-26 2010-01-22 ウエハ上の欠陥を検出するためのシステムおよび方法
JP2015007021A Pending JP2015096866A (ja) 2009-01-26 2015-01-16 ウエハ上の欠陥を検出するためのシステムおよび方法
JP2016093971A Active JP6231156B2 (ja) 2009-01-26 2016-05-09 ウエハ上の欠陥を検出するためのシステムおよび方法

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US (4) US8223327B2 (enExample)
EP (1) EP2389685A4 (enExample)
JP (5) JP5719782B2 (enExample)
KR (2) KR101700319B1 (enExample)
CN (2) CN102292805B (enExample)
IL (4) IL213490A (enExample)
WO (1) WO2010085679A2 (enExample)

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