IL213490A - Systems and methods for detecting defects on a wafer - Google Patents

Systems and methods for detecting defects on a wafer

Info

Publication number
IL213490A
IL213490A IL213490A IL21349011A IL213490A IL 213490 A IL213490 A IL 213490A IL 213490 A IL213490 A IL 213490A IL 21349011 A IL21349011 A IL 21349011A IL 213490 A IL213490 A IL 213490A
Authority
IL
Israel
Prior art keywords
analyzer
systems
methods
detecting defects
defects
Prior art date
Application number
IL213490A
Other languages
English (en)
Hebrew (he)
Other versions
IL213490A0 (en
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of IL213490A0 publication Critical patent/IL213490A0/en
Publication of IL213490A publication Critical patent/IL213490A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H10P74/203—
    • H10P74/23—
    • H10P74/27—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8867—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
    • G01N2021/887—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing the measurements made in two or more directions, angles, positions

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
IL213490A 2009-01-26 2011-06-12 Systems and methods for detecting defects on a wafer IL213490A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/359,476 US8223327B2 (en) 2009-01-26 2009-01-26 Systems and methods for detecting defects on a wafer
PCT/US2010/021850 WO2010085679A2 (en) 2009-01-26 2010-01-22 Systems and methods for detecting defects on a wafer

Publications (2)

Publication Number Publication Date
IL213490A0 IL213490A0 (en) 2011-07-31
IL213490A true IL213490A (en) 2015-11-30

Family

ID=42353935

Family Applications (4)

Application Number Title Priority Date Filing Date
IL213490A IL213490A (en) 2009-01-26 2011-06-12 Systems and methods for detecting defects on a wafer
IL226184A IL226184A (en) 2009-01-26 2013-05-06 Systems and methods for detecting defects in the analyzer
IL242041A IL242041A (en) 2009-01-26 2015-10-12 Systems and methods for detecting defects in the analyzer
IL242040A IL242040A (en) 2009-01-26 2015-10-12 Systems and methods for detecting defects on a wafer

Family Applications After (3)

Application Number Title Priority Date Filing Date
IL226184A IL226184A (en) 2009-01-26 2013-05-06 Systems and methods for detecting defects in the analyzer
IL242041A IL242041A (en) 2009-01-26 2015-10-12 Systems and methods for detecting defects in the analyzer
IL242040A IL242040A (en) 2009-01-26 2015-10-12 Systems and methods for detecting defects on a wafer

Country Status (7)

Country Link
US (4) US8223327B2 (enExample)
EP (1) EP2389685A4 (enExample)
JP (5) JP5719782B2 (enExample)
KR (2) KR101700319B1 (enExample)
CN (2) CN102292805B (enExample)
IL (4) IL213490A (enExample)
WO (1) WO2010085679A2 (enExample)

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