FR3045156B1 - Procede de detection de defauts et dispositif associe - Google Patents
Procede de detection de defauts et dispositif associeInfo
- Publication number
- FR3045156B1 FR3045156B1 FR1562233A FR1562233A FR3045156B1 FR 3045156 B1 FR3045156 B1 FR 3045156B1 FR 1562233 A FR1562233 A FR 1562233A FR 1562233 A FR1562233 A FR 1562233A FR 3045156 B1 FR3045156 B1 FR 3045156B1
- Authority
- FR
- France
- Prior art keywords
- hole
- signal
- picked
- defect
- pixels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title abstract 2
- 230000007547 defect Effects 0.000 abstract 4
- 230000002159 abnormal effect Effects 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 3
- 239000002344 surface layer Substances 0.000 abstract 2
- 238000001446 dark-field microscopy Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/10—Condensers affording dark-field illumination
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8874—Taking dimensions of defect into account
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N2021/8928—Haze defects, i.e. with a part of diffracted light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10056—Microscopic image
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20076—Probabilistic image processing
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Optics & Photonics (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Quality & Reliability (AREA)
- Theoretical Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
L'invention concerne un procédé de détermination de la taille d'un défaut de type trou sur une face supérieure d'une structure comprenant une couche superficielle disposée sur un substrat, ledit défaut étant situé dans la couche superficielle ; le procédé comprenant : a) une étape d'introduction de la structure dans un dispositif de microscopie en champ sombre par réflexion pour générer, à partir d'un rayon lumineux diffusé par la face supérieure, un premier signal de défauts et un second signal de rugosité ; b) une étape de capture sur une pluralité de pixels de l'intensité du second signal de rugosité ; Le procédé étant remarquable en ce qu'il comprend en outre : c) une étape de traitement pour comparer l'intensité captée par chaque pixel avec celles captées par des pixels voisins et définir si ledit pixel est inclus dans une zone anormale ; d) une étape d'extraction de l'écart-type des valeurs des intensités captées par les pixels de la zone anormale ; e) une étape de détermination de la taille du défaut de type trou relatif a la zone anormale, à partir de l'écart-type extrait. L'invention concerne également un dispositif de détection de défauts de type trou.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1562233A FR3045156B1 (fr) | 2015-12-11 | 2015-12-11 | Procede de detection de defauts et dispositif associe |
TW105138739A TWI713638B (zh) | 2015-12-11 | 2016-11-24 | 缺陷檢測方法及相關裝置 |
JP2016229308A JP6776492B2 (ja) | 2015-12-11 | 2016-11-25 | 欠陥を検出するための方法及び関連する装置 |
CN201611113931.8A CN107036531B (zh) | 2015-12-11 | 2016-12-07 | 确定空洞型缺陷的尺寸的方法和检测空洞型缺陷的装置 |
DE102016224467.1A DE102016224467A1 (de) | 2015-12-11 | 2016-12-08 | Verfahren zur Erkennung von Defekten und dazugehörige Vorrichtung |
KR1020160167731A KR20170069946A (ko) | 2015-12-11 | 2016-12-09 | 결함들을 검출하기 위한 방법 및 연관된 디바이스 |
US15/374,902 US10509214B2 (en) | 2015-12-11 | 2016-12-09 | Method for detecting defects and associated device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1562233A FR3045156B1 (fr) | 2015-12-11 | 2015-12-11 | Procede de detection de defauts et dispositif associe |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3045156A1 FR3045156A1 (fr) | 2017-06-16 |
FR3045156B1 true FR3045156B1 (fr) | 2017-12-22 |
Family
ID=55182459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1562233A Active FR3045156B1 (fr) | 2015-12-11 | 2015-12-11 | Procede de detection de defauts et dispositif associe |
Country Status (7)
Country | Link |
---|---|
US (1) | US10509214B2 (fr) |
JP (1) | JP6776492B2 (fr) |
KR (1) | KR20170069946A (fr) |
CN (1) | CN107036531B (fr) |
DE (1) | DE102016224467A1 (fr) |
FR (1) | FR3045156B1 (fr) |
TW (1) | TWI713638B (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA3073287A1 (fr) * | 2017-08-18 | 2019-02-21 | Somadetect Inc. | Procedes et systemes d'evaluation de l'etat de sante d'un mammifere en lactation |
US10712292B2 (en) * | 2018-03-29 | 2020-07-14 | The Boeing Company | Backscatter x-ray inspection system for pipes |
US10295476B1 (en) * | 2018-08-14 | 2019-05-21 | Applied Materials Israel Ltd. | System and method for multiple mode inspection of a sample |
CN110837717B (zh) * | 2019-11-06 | 2022-09-06 | 成都数之联科技股份有限公司 | 一种基于Map图的玻璃面板多元缺陷根因分析方法 |
CN110806412A (zh) * | 2019-11-15 | 2020-02-18 | 中国工程物理研究院激光聚变研究中心 | 一种基于光学元件的缺陷尺寸检测方法及系统 |
CN111595850B (zh) * | 2020-04-27 | 2022-07-15 | 平安科技(深圳)有限公司 | 切片缺陷检测方法、电子装置及可读存储介质 |
US11733172B2 (en) * | 2020-05-15 | 2023-08-22 | Kla Corporation | Apparatus and method for rotating an optical objective |
CN112345544A (zh) * | 2020-09-24 | 2021-02-09 | 海克斯康制造智能技术(青岛)有限公司 | 多功能连杆自动化检测线 |
CN112347527B (zh) * | 2020-11-09 | 2022-06-03 | 武汉科技大学 | 一种用于暗场缺陷检测的光罩掩模板图形设计方法 |
CN113534430B (zh) * | 2021-06-08 | 2023-10-10 | 浙江工商职业技术学院 | 一种金相显微镜用暗场聚光镜的设计方法及装置 |
CN115546568B (zh) * | 2022-12-01 | 2023-03-10 | 合肥中科类脑智能技术有限公司 | 绝缘子缺陷检测方法、系统、设备及存储介质 |
Family Cites Families (28)
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JP2803388B2 (ja) * | 1991-04-26 | 1998-09-24 | 三菱電機株式会社 | 部品検査装置 |
US6157444A (en) * | 1997-11-28 | 2000-12-05 | Hitachi, Ltd. | Defect inspection apparatus for silicon wafer |
JPH11237226A (ja) * | 1997-11-28 | 1999-08-31 | Hitachi Ltd | 欠陥検査装置 |
US6724947B1 (en) * | 2000-07-14 | 2004-04-20 | International Business Machines Corporation | Method and system for measuring characteristics of curved features |
JP2003098111A (ja) * | 2000-09-21 | 2003-04-03 | Hitachi Ltd | 欠陥検査方法およびその装置 |
WO2002040970A1 (fr) * | 2000-11-15 | 2002-05-23 | Real Time Metrology, Inc. | Procédé et dispositif optique d'examen d'objets plans de grande superficie |
US7840247B2 (en) * | 2002-09-16 | 2010-11-23 | Imatx, Inc. | Methods of predicting musculoskeletal disease |
US8965075B2 (en) * | 2002-09-16 | 2015-02-24 | Imatx, Inc. | System and method for predicting future fractures |
JP4691499B2 (ja) * | 2003-05-19 | 2011-06-01 | ケーエルエー−テンカー コーポレイション | 対象となる信号およびノイズ間のロバストな分離を可能にする装置および方法 |
US7557910B2 (en) * | 2004-12-19 | 2009-07-07 | Kla-Tencor Corporation | System and method for controlling a beam source in a workpiece surface inspection system |
JP5319876B2 (ja) * | 2006-07-31 | 2013-10-16 | 株式会社日立ハイテクノロジーズ | 表面検査装置及び表面検査方法 |
US7990546B2 (en) * | 2007-07-16 | 2011-08-02 | Applied Materials Israel, Ltd. | High throughput across-wafer-variation mapping |
JP2009133778A (ja) * | 2007-11-30 | 2009-06-18 | Hitachi High-Technologies Corp | 検査装置及び検査方法 |
EP2128701A1 (fr) * | 2008-05-30 | 2009-12-02 | ASML Netherlands BV | Méthode de détermination de défauts dans un substrat et appareil pour exposer un substrat dans un procédé de lithographie |
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JP2010197352A (ja) * | 2009-02-27 | 2010-09-09 | Hitachi High-Technologies Corp | 欠陥検査方法及び欠陥検査装置 |
CN102804063B (zh) * | 2009-06-19 | 2015-07-15 | 克拉-坦科技术股份有限公司 | 用于检测极紫外掩模基板上的缺陷的检验系统与方法 |
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US8401273B2 (en) * | 2010-01-21 | 2013-03-19 | Hitachi, Ltd. | Apparatus for evaluating degradation of pattern features |
US8781070B2 (en) * | 2011-08-11 | 2014-07-15 | Jordan Valley Semiconductors Ltd. | Detection of wafer-edge defects |
JP2013117490A (ja) * | 2011-12-05 | 2013-06-13 | Olympus Corp | 検査システム及びレシピ設定方法 |
WO2013142079A1 (fr) * | 2012-03-20 | 2013-09-26 | Kla-Tencor Corporation | Utilisation de cartes réfléchies et d'émission pour détecter une dégradation de réticule |
US9535009B2 (en) * | 2012-05-16 | 2017-01-03 | Hitachi High-Technologies Corporation | Inspection system |
CN104471484B (zh) * | 2012-07-05 | 2018-02-06 | Asml荷兰有限公司 | 用于光刻术的量测 |
US8830464B2 (en) * | 2012-11-06 | 2014-09-09 | Kla-Tencor Corporation | Film thickness, refractive index, and extinction coefficient determination for film curve creation and defect sizing in real time |
US9341580B2 (en) * | 2014-06-27 | 2016-05-17 | Applied Materials, Inc. | Linear inspection system |
US9797846B2 (en) * | 2015-04-17 | 2017-10-24 | Nuflare Technology, Inc. | Inspection method and template |
US20190114464A1 (en) * | 2016-03-10 | 2019-04-18 | Genomic Vision | Method of curvilinear signal detection and analysis and associated platform |
-
2015
- 2015-12-11 FR FR1562233A patent/FR3045156B1/fr active Active
-
2016
- 2016-11-24 TW TW105138739A patent/TWI713638B/zh active
- 2016-11-25 JP JP2016229308A patent/JP6776492B2/ja active Active
- 2016-12-07 CN CN201611113931.8A patent/CN107036531B/zh active Active
- 2016-12-08 DE DE102016224467.1A patent/DE102016224467A1/de active Pending
- 2016-12-09 KR KR1020160167731A patent/KR20170069946A/ko not_active Application Discontinuation
- 2016-12-09 US US15/374,902 patent/US10509214B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI713638B (zh) | 2020-12-21 |
FR3045156A1 (fr) | 2017-06-16 |
CN107036531B (zh) | 2020-07-10 |
JP2017129569A (ja) | 2017-07-27 |
US10509214B2 (en) | 2019-12-17 |
CN107036531A (zh) | 2017-08-11 |
KR20170069946A (ko) | 2017-06-21 |
TW201727218A (zh) | 2017-08-01 |
DE102016224467A1 (de) | 2017-06-14 |
JP6776492B2 (ja) | 2020-10-28 |
US20170168279A1 (en) | 2017-06-15 |
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