JP2017502844A5 - - Google Patents
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- JP2017502844A5 JP2017502844A5 JP2016539263A JP2016539263A JP2017502844A5 JP 2017502844 A5 JP2017502844 A5 JP 2017502844A5 JP 2016539263 A JP2016539263 A JP 2016539263A JP 2016539263 A JP2016539263 A JP 2016539263A JP 2017502844 A5 JP2017502844 A5 JP 2017502844A5
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- JP
- Japan
- Prior art keywords
- laser beam
- less
- focal line
- optical element
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361917140P | 2013-12-17 | 2013-12-17 | |
| US61/917,140 | 2013-12-17 | ||
| US201462022888P | 2014-07-10 | 2014-07-10 | |
| US62/022,888 | 2014-07-10 | ||
| US14/529,801 US9687936B2 (en) | 2013-12-17 | 2014-10-31 | Transparent material cutting with ultrafast laser and beam optics |
| US14/529,801 | 2014-10-31 | ||
| PCT/US2014/070275 WO2015095014A1 (en) | 2013-12-17 | 2014-12-15 | Transparent material cutting with ultrafast laser and beam optics |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017502844A JP2017502844A (ja) | 2017-01-26 |
| JP2017502844A5 true JP2017502844A5 (OSRAM) | 2018-02-01 |
| JP6571085B2 JP6571085B2 (ja) | 2019-09-04 |
Family
ID=53367591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016539263A Expired - Fee Related JP6571085B2 (ja) | 2013-12-17 | 2014-12-15 | 超高速レーザおよびビーム光学系を用いた透明材料の切断 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9687936B2 (OSRAM) |
| EP (1) | EP3083126B1 (OSRAM) |
| JP (1) | JP6571085B2 (OSRAM) |
| CN (1) | CN106170367A (OSRAM) |
| MX (1) | MX364462B (OSRAM) |
| RU (1) | RU2673258C1 (OSRAM) |
| TW (1) | TWI645929B (OSRAM) |
| WO (1) | WO2015095014A1 (OSRAM) |
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| US11556039B2 (en) | 2013-12-17 | 2023-01-17 | Corning Incorporated | Electrochromic coated glass articles and methods for laser processing the same |
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| FR2989294B1 (fr) | 2012-04-13 | 2022-10-14 | Centre Nat Rech Scient | Dispositif et methode de nano-usinage par laser |
| CN102672355B (zh) | 2012-05-18 | 2015-05-13 | 杭州士兰明芯科技有限公司 | Led衬底的划片方法 |
| US9938180B2 (en) * | 2012-06-05 | 2018-04-10 | Corning Incorporated | Methods of cutting glass using a laser |
| WO2014079478A1 (en) | 2012-11-20 | 2014-05-30 | Light In Light Srl | High speed laser processing of transparent materials |
| EP2754524B1 (de) | 2013-01-15 | 2015-11-25 | Corning Laser Technologies GmbH | Verfahren und Vorrichtung zum laserbasierten Bearbeiten von flächigen Substraten, d.h. Wafer oder Glaselement, unter Verwendung einer Laserstrahlbrennlinie |
| US20150034613A1 (en) * | 2013-08-02 | 2015-02-05 | Rofin-Sinar Technologies Inc. | System for performing laser filamentation within transparent materials |
| US10005152B2 (en) * | 2013-11-19 | 2018-06-26 | Rofin-Sinar Technologies Llc | Method and apparatus for spiral cutting a glass tube using filamentation by burst ultrafast laser pulses |
| US9517929B2 (en) * | 2013-11-19 | 2016-12-13 | Rofin-Sinar Technologies Inc. | Method of fabricating electromechanical microchips with a burst ultrafast laser pulses |
| DE102013223637B4 (de) * | 2013-11-20 | 2018-02-01 | Trumpf Laser- Und Systemtechnik Gmbh | Verfahren zum Behandeln eines lasertransparenten Substrats zum anschließenden Trennen des Substrats |
-
2014
- 2014-10-31 US US14/529,801 patent/US9687936B2/en not_active Expired - Fee Related
- 2014-12-15 WO PCT/US2014/070275 patent/WO2015095014A1/en not_active Ceased
- 2014-12-15 MX MX2016007974A patent/MX364462B/es active IP Right Grant
- 2014-12-15 JP JP2016539263A patent/JP6571085B2/ja not_active Expired - Fee Related
- 2014-12-15 RU RU2016128888A patent/RU2673258C1/ru not_active IP Right Cessation
- 2014-12-15 EP EP14822005.6A patent/EP3083126B1/en active Active
- 2014-12-15 CN CN201480075659.1A patent/CN106170367A/zh active Pending
- 2014-12-17 TW TW103144125A patent/TWI645929B/zh not_active IP Right Cessation
-
2017
- 2017-06-08 US US15/617,622 patent/US20170266757A1/en not_active Abandoned
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