JP2017157816A5 - - Google Patents
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- JP2017157816A5 JP2017157816A5 JP2016193919A JP2016193919A JP2017157816A5 JP 2017157816 A5 JP2017157816 A5 JP 2017157816A5 JP 2016193919 A JP2016193919 A JP 2016193919A JP 2016193919 A JP2016193919 A JP 2016193919A JP 2017157816 A5 JP2017157816 A5 JP 2017157816A5
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- Prior art keywords
- electrode
- photoelectric conversion
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- imaging device
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- Prior art date
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- 239000010410 layer Substances 0.000 description 88
- 238000006243 chemical reaction Methods 0.000 description 81
- 238000003384 imaging method Methods 0.000 description 52
- 239000004065 semiconductor Substances 0.000 description 27
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- 239000000758 substrate Substances 0.000 description 15
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 13
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- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- OBOYOXRQUWVUFU-UHFFFAOYSA-N [O-2].[Ti+4].[Nb+5] Chemical compound [O-2].[Ti+4].[Nb+5] OBOYOXRQUWVUFU-UHFFFAOYSA-N 0.000 description 1
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- 150000008378 aryl ethers Chemical class 0.000 description 1
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- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
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- 239000002041 carbon nanotube Substances 0.000 description 1
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- WSUTUEIGSOWBJO-UHFFFAOYSA-N dizinc oxygen(2-) Chemical compound [O-2].[O-2].[Zn+2].[Zn+2] WSUTUEIGSOWBJO-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
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- 229910003437 indium oxide Inorganic materials 0.000 description 1
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- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
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- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- QJAOYSPHSNGHNC-UHFFFAOYSA-N octadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCCCS QJAOYSPHSNGHNC-UHFFFAOYSA-N 0.000 description 1
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- 229920000620 organic polymer Polymers 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229920000090 poly(aryl ether) Polymers 0.000 description 1
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- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 101150018075 sel-2 gene Proteins 0.000 description 1
- 150000004819 silanols Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- TYHJXGDMRRJCRY-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) tin(4+) Chemical compound [O-2].[Zn+2].[Sn+4].[In+3] TYHJXGDMRRJCRY-UHFFFAOYSA-N 0.000 description 1
Priority Applications (14)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016193919A JP6780421B2 (ja) | 2016-03-01 | 2016-09-30 | 撮像素子、積層型撮像素子及び固体撮像装置、並びに、固体撮像装置の駆動方法 |
| KR1020257015559A KR20250073533A (ko) | 2016-03-01 | 2017-02-28 | 촬상 소자, 적층형 촬상 소자 및 고체 촬상 장치 및 고체 촬상 장치의 구동 방법 |
| EP17711364.4A EP3424089A1 (en) | 2016-03-01 | 2017-02-28 | Imaging element, stacked-type imaging element, solid-state imaging device, and driving method for solid-state imaging device |
| KR1020177022537A KR102810497B1 (ko) | 2016-03-01 | 2017-02-28 | 촬상 소자, 적층형 촬상 소자 및 고체 촬상 장치, 및, 고체 촬상 장치의 구동 방법 |
| US15/553,653 US10714532B2 (en) | 2016-03-01 | 2017-02-28 | Imaging device having first, second and third electrodes with an insulating material and a photoelectric conversion layer and driving method for imaging device having the same, and electronic apparatus |
| PCT/JP2017/007819 WO2017150540A1 (en) | 2016-03-01 | 2017-02-28 | Imaging element, stacked-type imaging element, solid-state imaging device, and driving method for solid-state imaging device |
| CN201710116479.9A CN107146850B (zh) | 2016-03-01 | 2017-03-01 | 成像元件、层叠型成像元件、固态成像装置及其驱动方法 |
| CN202410066957.XA CN118099175A (zh) | 2016-03-01 | 2017-03-01 | 光检测设备 |
| CN202110367163.3A CN113206116B (zh) | 2016-03-01 | 2017-03-01 | 成像器件及其驱动方法以及电子装置 |
| CN202110747459.8A CN113658965B (zh) | 2016-03-01 | 2017-03-01 | 光检测器件及其驱动方法以及电子装置 |
| US15/796,545 US10468451B2 (en) | 2016-03-01 | 2017-10-27 | Imaging element, stacked-type imaging element, solid-state imaging device, and driving method for solid-state imaging device |
| US16/896,903 US11348965B2 (en) | 2016-03-01 | 2020-06-09 | Imaging device having a plurality of electrodes with a photoelectric conversion layer forming a photoelectric conversion unit |
| US17/733,809 US12027565B2 (en) | 2016-03-01 | 2022-04-29 | Imaging device having charge storage electrode, first electrode, second electrode and transfer control electrode, driving method for imaging device having the same, and electronic apparatus |
| US18/612,552 US20240387602A1 (en) | 2016-03-01 | 2024-03-21 | Imaging element, stacked-type imaging element, solid-state imaging device, and driving method for solid-state imaging device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016038777 | 2016-03-01 | ||
| JP2016038777 | 2016-03-01 | ||
| JP2016193919A JP6780421B2 (ja) | 2016-03-01 | 2016-09-30 | 撮像素子、積層型撮像素子及び固体撮像装置、並びに、固体撮像装置の駆動方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020121264A Division JP6992851B2 (ja) | 2016-03-01 | 2020-07-15 | 撮像素子、積層型撮像素子及び固体撮像装置、並びに、固体撮像装置の駆動方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017157816A JP2017157816A (ja) | 2017-09-07 |
| JP2017157816A5 true JP2017157816A5 (OSRAM) | 2019-10-31 |
| JP6780421B2 JP6780421B2 (ja) | 2020-11-04 |
Family
ID=58347857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016193919A Active JP6780421B2 (ja) | 2016-03-01 | 2016-09-30 | 撮像素子、積層型撮像素子及び固体撮像装置、並びに、固体撮像装置の駆動方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (5) | US10714532B2 (OSRAM) |
| EP (1) | EP3424089A1 (OSRAM) |
| JP (1) | JP6780421B2 (OSRAM) |
| KR (2) | KR20250073533A (OSRAM) |
| CN (4) | CN107146850B (OSRAM) |
| WO (1) | WO2017150540A1 (OSRAM) |
Families Citing this family (78)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8736733B2 (en) | 2010-03-19 | 2014-05-27 | Invisage Technologies, Inc. | Dark current reduction in image sensors via dynamic electrical biasing |
| WO2016019258A1 (en) | 2014-07-31 | 2016-02-04 | Emanuele Mandelli | Image sensors with noise reduction |
| TWI756207B (zh) * | 2016-03-01 | 2022-03-01 | 日商新力股份有限公司 | 成像元件、堆疊型成像元件、固態成像裝置及用於固態成像裝置之驅動方法 |
| JP6780421B2 (ja) * | 2016-03-01 | 2020-11-04 | ソニー株式会社 | 撮像素子、積層型撮像素子及び固体撮像装置、並びに、固体撮像装置の駆動方法 |
| JP2018060910A (ja) * | 2016-10-05 | 2018-04-12 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子および固体撮像装置 |
| JP6926450B2 (ja) | 2016-11-22 | 2021-08-25 | ソニーグループ株式会社 | 撮像素子、積層型撮像素子及び固体撮像装置 |
| JP6929643B2 (ja) * | 2016-12-27 | 2021-09-01 | キヤノン株式会社 | 撮像装置および撮像システム |
| KR102635858B1 (ko) | 2017-01-05 | 2024-02-15 | 삼성전자주식회사 | 이미지 센서 |
| KR102831200B1 (ko) * | 2017-02-02 | 2025-07-10 | 서울반도체 주식회사 | 발광 다이오드 패키지 |
| US10425601B1 (en) | 2017-05-05 | 2019-09-24 | Invisage Technologies, Inc. | Three-transistor active reset pixel |
| CN115332279B (zh) | 2017-06-21 | 2025-08-22 | 索尼半导体解决方案公司 | 成像元件、层叠式成像元件和固态成像装置 |
| JP7099073B2 (ja) * | 2017-06-21 | 2022-07-12 | ソニーグループ株式会社 | 撮像素子、積層型撮像素子及び固体撮像装置 |
| TW201911549A (zh) * | 2017-08-16 | 2019-03-16 | 日商索尼股份有限公司 | 攝像元件、積層型攝像元件及固體攝像裝置 |
| JP2019036641A (ja) * | 2017-08-16 | 2019-03-07 | ソニー株式会社 | 撮像素子、積層型撮像素子及び固体撮像装置 |
| EP3671840A4 (en) * | 2017-08-16 | 2020-08-19 | Sony Corporation | IMAGING ELEMENT, LAYERING IMAGING ELEMENT AND SEMICONDUCTOR IMAGING DEVICE |
| JP2019041018A (ja) | 2017-08-25 | 2019-03-14 | ソニー株式会社 | 撮像素子、積層型撮像素子及び固体撮像装置 |
| CN118471994A (zh) * | 2017-08-31 | 2024-08-09 | 索尼半导体解决方案公司 | 光检测装置和电子设备 |
| WO2019111603A1 (ja) * | 2017-12-05 | 2019-06-13 | ソニー株式会社 | 撮像素子、積層型撮像素子及び固体撮像装置 |
| JP2019114576A (ja) * | 2017-12-20 | 2019-07-11 | ソニーセミコンダクタソリューションズ株式会社 | 光電変換素子および固体撮像装置 |
| WO2019150971A1 (ja) * | 2018-01-31 | 2019-08-08 | ソニー株式会社 | 光電変換素子および撮像装置 |
| WO2019150987A1 (ja) * | 2018-01-31 | 2019-08-08 | ソニー株式会社 | 光電変換素子および撮像装置 |
| WO2019151049A1 (ja) * | 2018-01-31 | 2019-08-08 | ソニー株式会社 | 光電変換素子、固体撮像装置及び電子装置 |
| CN111566826A (zh) | 2018-01-31 | 2020-08-21 | 索尼公司 | 光电转换元件和成像装置 |
| WO2019151042A1 (ja) * | 2018-01-31 | 2019-08-08 | ソニー株式会社 | 光電変換素子、固体撮像装置及び電子装置 |
| WO2019150989A1 (ja) * | 2018-01-31 | 2019-08-08 | ソニー株式会社 | 光電変換素子および撮像装置 |
| CN111630843B (zh) | 2018-02-01 | 2023-06-16 | 索尼半导体解决方案公司 | 固态摄像装置、其制造方法和电子设备 |
| US11552268B2 (en) | 2018-03-19 | 2023-01-10 | Sony Semiconductor Solutions Corporation | Solid-state imaging element and solid-state imaging device |
| US11705530B2 (en) * | 2018-04-20 | 2023-07-18 | Sony Corporation | Imaging device, stacked imaging device, and solid-state imaging apparatus |
| TWI820114B (zh) * | 2018-04-20 | 2023-11-01 | 日商索尼股份有限公司 | 攝像元件、積層型攝像元件及固體攝像裝置 |
| KR102663945B1 (ko) | 2018-05-21 | 2024-05-10 | 소니그룹주식회사 | 고체 촬상 소자 및 그 제조 방법 |
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- 2017-02-28 KR KR1020257015559A patent/KR20250073533A/ko active Pending
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