JP2017156337A - 光学フィルムの欠陥情報統合管理装置およびその方法 - Google Patents
光学フィルムの欠陥情報統合管理装置およびその方法 Download PDFInfo
- Publication number
- JP2017156337A JP2017156337A JP2016162690A JP2016162690A JP2017156337A JP 2017156337 A JP2017156337 A JP 2017156337A JP 2016162690 A JP2016162690 A JP 2016162690A JP 2016162690 A JP2016162690 A JP 2016162690A JP 2017156337 A JP2017156337 A JP 2017156337A
- Authority
- JP
- Japan
- Prior art keywords
- defect
- defect information
- information
- optical film
- management machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q10/063—Operations research, analysis or management
- G06Q10/0633—Workflow analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K17/00—Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Business, Economics & Management (AREA)
- Human Resources & Organizations (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Strategic Management (AREA)
- Economics (AREA)
- Entrepreneurship & Innovation (AREA)
- General Business, Economics & Management (AREA)
- Marketing (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Tourism & Hospitality (AREA)
- Educational Administration (AREA)
- Game Theory and Decision Science (AREA)
- Development Economics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Operations Research (AREA)
- Quality & Reliability (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Signal Processing (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Artificial Intelligence (AREA)
- Manufacturing & Machinery (AREA)
- Primary Health Care (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020160026298A KR20170103416A (ko) | 2016-03-04 | 2016-03-04 | 광학필름의 결함 정보 통합 관리 장치 및 그 방법 |
KR10-2016-0026298 | 2016-03-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2017156337A true JP2017156337A (ja) | 2017-09-07 |
Family
ID=59792430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016162690A Pending JP2017156337A (ja) | 2016-03-04 | 2016-08-23 | 光学フィルムの欠陥情報統合管理装置およびその方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2017156337A (ko) |
KR (1) | KR20170103416A (ko) |
CN (1) | CN107153902A (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019059012A1 (ja) | 2017-09-19 | 2019-03-28 | コニカミノルタ株式会社 | 非破壊検査方法 |
CN107703152A (zh) * | 2017-10-27 | 2018-02-16 | 深圳精创视觉科技有限公司 | 光学膜缺点自动标示装置 |
CN111452514B (zh) * | 2020-04-26 | 2021-01-12 | 杭州利珀科技有限公司 | 偏光膜整线打标系统及方法 |
CN114953764B (zh) * | 2021-02-18 | 2023-08-22 | 恒美光电股份有限公司 | 一种偏光膜缺点汇整标记系统 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000014790A1 (fr) * | 1998-09-03 | 2000-03-16 | Hitachi, Ltd. | Systeme d'inspection et procede de production d'un dispositif electronique l'utilisant |
JP2008200788A (ja) * | 2007-02-19 | 2008-09-04 | Sumitomo Chemical Co Ltd | 光学フィルムの裁断装置および光学フィルムの製造方法 |
JP5733879B2 (ja) * | 2008-12-24 | 2015-06-10 | 株式会社神戸製鋼所 | 工程不良検出装置及び工程不良検出方法 |
KR101315102B1 (ko) * | 2011-07-25 | 2013-10-07 | 동우 화인켐 주식회사 | 필름의 수율 예측 시스템 및 방법 |
-
2016
- 2016-03-04 KR KR1020160026298A patent/KR20170103416A/ko not_active Application Discontinuation
- 2016-08-23 JP JP2016162690A patent/JP2017156337A/ja active Pending
- 2016-09-30 CN CN201610875826.1A patent/CN107153902A/zh not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
KR20170103416A (ko) | 2017-09-13 |
CN107153902A (zh) | 2017-09-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI817134B (zh) | 判定圖案化製程之校正之方法、元件製造方法、用於微影裝置之控制系統及微影裝置 | |
JP2017156337A (ja) | 光学フィルムの欠陥情報統合管理装置およびその方法 | |
KR102149866B1 (ko) | 리소그래피 시스템들과 같은 시스템들을 모델링하거나 시스템들의 예측 유지보수를 수행하는 방법들, 및 연계된 리소그래피 시스템들. | |
TWI672565B (zh) | 模型化系統或執行諸如微影系統之系統之預測維修之方法及相關聯微影系統 | |
US8837810B2 (en) | System and method for alignment in semiconductor device fabrication | |
CN106949848A (zh) | 一种高精度激光3d轮廓手机结构件检测方法 | |
JP2008128651A (ja) | パターン位置合わせ方法、パターン検査装置及びパターン検査システム | |
US10466041B2 (en) | Reference system for online vision inspection | |
KR20080102708A (ko) | 프로빙 검사장치용 맵 생성 시스템 및 이를 이용하는 맵생성 방법 | |
KR20080003719A (ko) | 결함 검사 장치 및 결함 검사 방법 | |
TW200809914A (en) | Method for making photo mask, photo mask, and method of manufacturing semiconductor device | |
JP3828552B2 (ja) | 寸法測定方法と寸法測定システム及び寸法測定プログラム | |
TW202104879A (zh) | 影像辨識裝置、影像辨識方法及其電腦程式產品 | |
CN111830792B (zh) | 基板处理装置、物品制造方法、基板处理方法、基板处理系统、管理装置和存储介质 | |
JP6552312B2 (ja) | 露光装置、露光方法、およびデバイス製造方法 | |
TWI569107B (zh) | 測量裝置、測量方法、微影裝置、及物品製造方法 | |
JP2007163340A (ja) | 板長さ測定装置及び板長さ測定方法 | |
KR102524151B1 (ko) | 생산부품의 스마트 비전검사를 위한 인공지능머신의 라벨링 학습방법 | |
KR101962830B1 (ko) | 사전 정렬 측정 장치 및 방법 | |
KR20170057867A (ko) | 검사 방법 및 검사 장치 | |
JP2005338906A (ja) | 基板の欠陥検出方法及びその欠陥検出システム | |
JP2004095657A (ja) | 半導体検査装置 | |
Weickmann et al. | Automatic, task-sensitive and simulation-based optimization of fringe projection measurements | |
JP2012083128A (ja) | 学習型欠陥弁別処理システム、方法及びプログラム | |
JP2003107672A (ja) | フォトマスク外観検証システム及び方法 |