JP2017141397A - 樹脂組成物および板状物の固定方法 - Google Patents
樹脂組成物および板状物の固定方法 Download PDFInfo
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- JP2017141397A JP2017141397A JP2016024815A JP2016024815A JP2017141397A JP 2017141397 A JP2017141397 A JP 2017141397A JP 2016024815 A JP2016024815 A JP 2016024815A JP 2016024815 A JP2016024815 A JP 2016024815A JP 2017141397 A JP2017141397 A JP 2017141397A
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- acrylate
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- YPCHGLDQZXOZFW-UHFFFAOYSA-N [2-[[4-methyl-3-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]carbonylamino]phenyl]carbamoyloxymethyl]-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound CC1=CC=C(NC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C)C=C1NC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C YPCHGLDQZXOZFW-UHFFFAOYSA-N 0.000 description 2
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- KCUGMSZCETWVTG-UHFFFAOYSA-N 2-[[3-ethyl-1-(oxiran-2-yl)heptoxy]methyl]oxirane Chemical compound C1OC1C(CC(CC)CCCC)OCC1CO1 KCUGMSZCETWVTG-UHFFFAOYSA-N 0.000 description 1
- PZBLUWVMZMXIKZ-UHFFFAOYSA-N 2-o-(2-ethoxy-2-oxoethyl) 1-o-ethyl benzene-1,2-dicarboxylate Chemical compound CCOC(=O)COC(=O)C1=CC=CC=C1C(=O)OCC PZBLUWVMZMXIKZ-UHFFFAOYSA-N 0.000 description 1
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- 125000001931 aliphatic group Chemical group 0.000 description 1
- SCABKEBYDRTODC-UHFFFAOYSA-N bis[2-(2-butoxyethoxy)ethyl] hexanedioate Chemical compound CCCCOCCOCCOC(=O)CCCCC(=O)OCCOCCOCCCC SCABKEBYDRTODC-UHFFFAOYSA-N 0.000 description 1
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- QYMFNZIUDRQRSA-UHFFFAOYSA-N dimethyl butanedioate;dimethyl hexanedioate;dimethyl pentanedioate Chemical compound COC(=O)CCC(=O)OC.COC(=O)CCCC(=O)OC.COC(=O)CCCCC(=O)OC QYMFNZIUDRQRSA-UHFFFAOYSA-N 0.000 description 1
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- H01L2924/3511—Warping
Abstract
【解決手段】本実施形態に係る樹脂組成物15は、板状物11を固定する樹脂組成物であり、(メタ)アクリレートと、可塑剤または反応性希釈剤と、からなる組成物に光重合開始剤を含ませて構成した。第1態様に係る樹脂組成物では、組成物は、ウレタン結合を有する(メタ)アクリレートを30質量%以上45質量%以下、ウレタン結合を有しない(メタ)アクリレートを5質量%以上15質量%以下、エステルである可塑剤を40質量%以上65質量%以下含んで構成される。
【選択図】図2
Description
実施例A1では、板状物11として、インゴットからの切り出したシリコンウエーハ(アズスライスウエーハ)を用いた。また、組成物Aの組成比率は、ウレタン結合を有する(メタ)アクリレートが50質量%、ウレタン結合を有しない(メタ)アクリレートが20質量%、可塑剤が30質量%とした。ウレタン結合を有する(メタ)アクリレートには、UF-07DF(共栄社化学株式会社製)、ウレタン結合を有しない(メタ)アクリレートには、テトラヒドロフルフリルアクリレート、可塑剤には、安息香酸グリコールエステルを用いた。また、光重合開始剤には、1−ヒドロキシシクロヘキシルフェニルケトンを用いて、組成物Aの全量に対して、1質量%添加した。
実施例A2では、組成物Aの組成比率を、ウレタン結合を有する(メタ)アクリレートが45質量%、ウレタン結合を有しない(メタ)アクリレートが15質量%、可塑剤が40質量%とした。また、ウレタン結合を有しない(メタ)アクリレートには、フェニルグリシジルエーテルアクリレートを用いた。その他の構成は、実施例A1と同一である。
実施例A3では、組成物Aの組成比率を、ウレタン結合を有する(メタ)アクリレートが45質量%、ウレタン結合を有しない(メタ)アクリレートが10質量%、可塑剤が45質量%とした。また、ウレタン結合を有しない(メタ)アクリレートには、イソボルニルアクリレート、可塑剤には、ジメチルフタレートを用いた。その他の構成は、実施例A1と同一である。
実施例A4では、組成物Aの組成比率を、ウレタン結合を有する(メタ)アクリレートが40質量%、ウレタン結合を有しない(メタ)アクリレートが10質量%、可塑剤が50質量%とした。その他の構成は、実施例A1と同一である。
実施例A5では、組成物Aの組成比率を、ウレタン結合を有する(メタ)アクリレートが40質量%、ウレタン結合を有しない(メタ)アクリレートが5質量%、可塑剤が55質量%とした。また、ウレタン結合を有しない(メタ)アクリレートには、イソボルニルアクリレート、可塑剤には、ジメチルフタレートを用いた。その他の構成は、実施例A1と同一である。
実施例A6では、組成物Aの組成比率を、ウレタン結合を有する(メタ)アクリレートが35質量%、ウレタン結合を有しない(メタ)アクリレートが5質量%、可塑剤が60質量%とした。また、可塑剤には、ジメチルフタレートを用いた。その他の構成は、実施例A1と同一である。
実施例A7では、組成物Aの組成比率を、ウレタン結合を有する(メタ)アクリレートが30質量%、ウレタン結合を有しない(メタ)アクリレートが5質量%、可塑剤が65質量%とした。また、ウレタン結合を有しない(メタ)アクリレートには、イソボルニルアクリレート、可塑剤には、ジメチルフタレートを用いた。その他の構成は、実施例A1と同一である。
実施例A8では、組成物Aの組成比率を、ウレタン結合を有する(メタ)アクリレートが20質量%、ウレタン結合を有しない(メタ)アクリレートが0質量%、可塑剤が80質量%とした。すなわち、この実施例A8では、ウレタン結合を有しない(メタ)アクリレートを含まず、ウレタン結合を有する(メタ)アクリレートと可塑剤とで組成物Aを構成した。また、可塑剤には、ジメチルフタレートを用いた。その他の構成は、実施例A1と同一である。
実施例B1では、板状物11として、インゴットからの切り出したシリコンウエーハ(アズスライスウエーハ)を用いた。また、組成物Bの組成比率は、ウレタン結合を有する(メタ)アクリレートが70質量%、反応性希釈剤が30質量%とした。ウレタン結合を有する(メタ)アクリレートには、UF-07DF(共栄社化学株式会社製)、反応性希釈剤には、2−エチルヘキシル−グリシジルエーテルを用いた。また、光重合開始剤には、1−ヒドロキシシクロヘキシルフェニルケトンを用いて、組成物Bの全量に対して、1質量%添加した。
実施例B2では、組成物Bの組成比率を、ウレタン結合を有する(メタ)アクリレートが60質量%、反応性希釈剤が40質量%とした。その他の構成は、実施例B1と同一である。
実施例B3では、組成物Bの組成比率を、ウレタン結合を有する(メタ)アクリレートが50質量%、反応性希釈剤が50質量%とした。その他の構成は、実施例B1と同一である。
実施例B4では、組成物Bの組成比率を、ウレタン結合を有する(メタ)アクリレートが45質量%、反応性希釈剤が55質量%とした。その他の構成は、実施例B1と同一である。
実施例B5では、組成物Bの組成比率を、ウレタン結合を有する(メタ)アクリレートが40質量%、反応性希釈剤が60質量%とした。その他の構成は、実施例B1と同一である。
実施例B6では、組成物Bの組成比率を、ウレタン結合を有する(メタ)アクリレートが35質量%、反応性希釈剤が65質量%とした。その他の構成は、実施例B1と同一である。
実施例B7では、組成物Bの組成比率を、ウレタン結合を有する(メタ)アクリレートが30質量%、反応性希釈剤が70質量%とした。その他の構成は、実施例B1と同一である。
参考例では、反応性希釈剤として、ビスフェノールA型エポキシ樹脂を用いた。このビスフェノールA型エポキシ樹脂は、化学式4に示すように、分子内に2つのエポキシ基を有する構造となっている。その他の構成は、それぞれ上記した実施例B1〜B7と同一とした。
8 樹脂供給ユニット
11 板状物
11a 表面(第2面)
11b 裏面(第1面)
15、15a、15b 樹脂組成物
15S 基準面
18 ステージ
20 光源
30 押圧機構
36 押圧パッド
A、B 組成物
Claims (4)
- 板状物を固定する樹脂組成物であって、(メタ)アクリレートと、可塑剤または反応性希釈剤と、からなる組成物に光重合開始剤を含ませたことを特徴とする樹脂組成物。
- 前記組成物は、ウレタン結合を有する(メタ)アクリレートを30質量%以上45質量%以下、前記ウレタン結合を有しない(メタ)アクリレートを5質量%以上15質量%以下、前記可塑剤を40質量%以上65質量%以下含む、請求項1に記載の樹脂組成物。
- 前記可塑剤は、エステルである請求項1または2に記載の樹脂組成物。
- 請求項1から請求項3のいずれか一項に記載の樹脂組成物を用いる板状物の固定方法であって、
ステージと前記板状物の第1面との間に前記樹脂組成物を供給する樹脂組成物供給ステップと、
該樹脂組成物供給ステップを実施した後に、前記板状物の第2面側から該第1面に向かう力を加えて前記板状物を該ステージに向けて押し付け、該樹脂組成物を該第1面の全体に広げる押圧ステップと、
該押圧ステップを実施した後に、光を照射して該樹脂組成物を硬化する硬化ステップと、を備えることを特徴とする板状物の固定方法。
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JP2016024815A JP6703848B2 (ja) | 2016-02-12 | 2016-02-12 | 樹脂組成物および板状物の固定方法 |
TW105144211A TW201739823A (zh) | 2016-02-12 | 2016-12-30 | 樹脂組成物及板狀被加工物的固定方法 |
CN201710046317.2A CN107083193B (zh) | 2016-02-12 | 2017-01-22 | 树脂组合物和板状被加工物的固定方法 |
SG10201700632XA SG10201700632XA (en) | 2016-02-12 | 2017-01-25 | Resin composition and fixing method for plate-shaped workpiece |
US15/423,774 US20170233609A1 (en) | 2016-02-12 | 2017-02-03 | Resin composition and fixing method for plate-shaped workpiece |
KR1020170017398A KR102528129B1 (ko) | 2016-02-12 | 2017-02-08 | 수지 조성물 및 판형 피가공물의 고정 방법 |
DE102017202042.3A DE102017202042A1 (de) | 2016-02-12 | 2017-02-09 | Kunststoffzusammensetzung und fixierungsverfahrens für ein plattenförmiges werkstück |
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WO2019182710A1 (en) * | 2018-03-23 | 2019-09-26 | Kateeva, Inc. | Compositions and techniques for forming organic thin films |
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