JP2017135222A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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Abstract
【解決手段】 トランジスタが設けられた表面と前記表面とは反対側の裏面を有する半導体層と、半導体層を貫通する導電部材と、を備えた半導体装置において、裏面を含む第2面と第3面との間において、導電部材と半導体層との間には絶縁体である固体材料が配されており、表面を含む第1面と第3面との間において、導電部材と半導体層との間には中空部が配されており、第1面および第2面に交差する方向における中空部の中心位置は、第1面と第3面との間に位置する。
【選択図】 図2
Description
10 表面
20 裏面
11 第1面
21 第2面
30 中間面
310 導電部材
103、203 固体材料
130、230 中空部
220 溝
Claims (15)
- トランジスタが設けられた表面と前記表面とは反対側の裏面を有する半導体層と、前記半導体層を貫通する導電部材と、を備えた半導体装置において、
前記表面を含み前記表面に沿った仮想的な平面を第1面、前記裏面を含み前記裏面に沿った仮想的な平面を第2面、前記第1面および前記第2面から等しい距離に位置する仮想的な平面を第3面として、
前記第2面と前記第3面との間において、前記導電部材と前記半導体層との間には絶縁体である固体材料が配されており、
前記第1面と前記第3面との間において、前記導電部材と前記半導体層との間には中空部が配されており、
前記第1面および前記第2面に交差する方向における前記中空部の中心は、前記第1面と前記第3面との間に位置することを特徴とする半導体装置。 - 前記第1面における前記導電部材の幅は、前記第2面における前記導電部材の幅よりも小さい、請求項1に記載の半導体装置。
- 前記中空部と前記導電部材との距離が、前記中空部と前記半導体層との距離よりも小さい、請求項1または2に記載の半導体装置。
- トランジスタが設けられた表面と前記表面とは反対側の裏面を有する半導体層を備えた半導体装置において、
前記表面を含み前記表面に沿った仮想的な平面を第1面、前記裏面を含み前記裏面に沿った仮想的な平面を第2面、前記第1面および前記第2面から等しい距離に位置する仮想的な平面を第3面として、
前記半導体層には前記第3面を貫通する溝が設けられており、
前記溝の中には中空部と固体材料が配されており、
前記第1面および前記第2面に交差する方向における前記中空部の中心は、前記第1面と前記第3面との間に位置することを特徴とする半導体装置。 - 前記溝は前記半導体層を貫通する、請求項4に記載の半導体装置。
- 前記溝は第1面と前記第3面との間に底を有する、請求項4に記載の半導体装置。
- 前記半導体層には各々が前記第1面と前記第2面との間に位置する複数の光電変換部が設けられており、前記溝は前記複数の光電変換部の間に配されている、請求項4乃至6のいずれか1項に記載の半導体装置。
- 前記中空部の一部は前記第2面と前記第3面との間に位置している、請求項1乃至7のいずれか1項に記載の半導体装置。
- 前記固体材料の少なくとも一部は前記第1面と前記第3面との間に位置している、請求項1乃至8のいずれか1項に記載の半導体装置。
- 前記固体材料が前記中空部を包囲している、請求項1乃至9のいずれか1項に記載の半導体装置。
- 表面を有する半導体基板の前記表面の側から前記半導体基板に溝を形成する工程と、
前記溝に絶縁体である固体材料を形成する工程と、
前記表面の反対側から前記半導体基板を薄くする工程と、とを備え、
前記固体材料を形成する工程は、前記溝の中に中空部が形成されるように行われ、
前記溝の深さ方向における前記中空部の中心と前記溝の底との距離は、前記溝の深さの半分よりも大きいことを特徴とする半導体装置の製造方法。 - 前記薄くする工程は、前記中空部が前記反対側に露出しないように行われる、請求項11に記載の半導体装置の製造方法。
- 前記溝は前記半導体基板の一部を囲むように形成され、
前記薄くする工程の後に、前記溝で囲まれた前記一部を除去して孔を形成する工程と、
前記孔の中に導電部材を形成する工程と、
をさらに備える、請求項11または12に記載の半導体装置の製造方法。 - 前記孔を形成する工程は、前記固体材料が前記孔の側面を成す様に行われる、請求項13に記載の半導体装置の製造方法。
- 前記溝を形成する工程は、前記溝の幅が前記溝の底に向かうほど狭くなるように行われる、請求項11乃至14のいずれか1項に記載の半導体装置の製造方法。
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US20210335863A1 (en) | 2021-10-28 |
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